Abstract
Using the measured elastic constants of TiN and NbN single crystals with cubic symmetry, the effective elastic constants of single-crystal TiN/NbN superlattice films with tetragonal symmetry, namely c11, c12, c13, c33, c44, and c66 have been calculated for various thickness ratios of the layers. Using a line-focus acoustic microscope, measurements of surface acoustic waves (SAWs) have been carried out on single-crystal TiN/NbN superlattice films grown on the (001) plane of cubic crystal MgO substrates. The phase velocities measured as functions of the angle of propagation display the expected anisotropic nature of cubic crystals. Dispersion curves of SAWs propagating along the symmetry axes have been obtained by measuring wave velocities for various film thicknesses and frequencies. The SAW dispersion curves calculated from the effectiveelastic constants and the effective mass density of the superlattice films show very good agreement with experimental results. The results of this paper exhibit no anomalous dependence of the elastic constants on the superlattice period of TiN/NbN superlattices.
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References
M. Shinn, L. Hultman, and S.A. Barnett, J. Mater. Res. 7, 901 (1992).
U. Helmersson, S. Todorova, S. A. Barnett, J-E. Sundgren, L.C. Markert, and J. E. Greene, J. Appl. Phys. 62, 481 (1987).
P.B. Mirkarimi, L. Hultman, and S.A. Barnett, Appl. Phys. Lett. 57, 2654 (1990).
W. M. C. Yang, T. Tsakalakos, and J. E. Hilliard, J. Appl. Phys. 48, 876 (1977).
P.B. Mirkarimi, M. Shinn, S.A. Barnett, S. Kumar, and M. Grimsditch, J. Appl. Phys. 71, 4955 (1992).
J. D. Achenbach, A Theory of Elasticity with Microstructure for Directionally Reinforced Composites (Springer-Verlag, New York, 1975), pp. 21–38.
M. Grimsditch, Phys. Rev. B 31, 6818 (1985).
M. Grimsditch and F. Nizzoli, Phys. Rev. B 33, 5891 (1986).
E. Akcakaya and G.W. Farnell, J. Appl. Phys. 64, 4469 (1988).
J. O. Kim and J.D. Achenbach, Thin Solid Films, to appear (1992).
R.D. Weglein, Appl. Phys. Lett. 34, 179 (1979).
R.D. Weglein, IEEE Trans. Sonics Ultrason. SU-32, 225 (1985).
J. Kushibiki and N. Chubachi, IEEE Trans. Sonics Ultrason. SU-32, 189 (1985).
J.O. Kim, J.D. Achenbach, P.B. Mirkarimi, M. Shinn, and S.A. Barnett, J. Appl. Phys., to appear (1992).
P.B. Mirkarimi, M. Shinn, and S. A. Barnett, J. Vac. Sci. Technol. A 10, 75 (1992).
R. W. Hertzberg, Deformation and Fracture Mechanics of Engineering Materials (John Wiley & Sons, New York, 1989), 3rd ed., Chap. 1.
H. Holleck, J. Vac. Sci. Technol. A 4, 2661 (1986).
G.W. Farnell and E. L. Adler, in Physical Acoustics, edited by W. P. Mason and R. N. Thurston (Academic Press, New York, 1972), Vol. 9, Chap. 2.
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Kim, J.O., Achenbach, J.D., Shinn, M. et al. Effective elastic constants and acoustic properties of single-crystal TiN/NbN superlattices. Journal of Materials Research 7, 2248–2256 (1992). https://doi.org/10.1557/JMR.1992.2248
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DOI: https://doi.org/10.1557/JMR.1992.2248