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Aligned diamond nanowhiskers

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Abstract

We investigated the formation of nanowhiskers by means of air plasma dry etching using diamond films of two different kinds: as-grown diamond films and films with molybdenum (Mo) deposits. As for the as-grown diamond films, nanowhiskers were found to form preferentially at grain boundaries of diamond crystals. Auger depth profile analysis of the etched films revealed a progressive enrichment by Mo toward the whisker tip, resulting from accidental sputtering of Mo substrate holder. With dry etching of diamond films with preformed Mo deposits, well-aligned whiskers 100 nm in diameter were found to form uniformly over the entire film surface with a population density of 30/μm2. From these findings, it follows that Mo deposits serve as micromasks for the formation of the nanowhiskers. It was also confirmed that these whiskers showed excellent field-emission behavior.

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Authors and Affiliations

  1. Thin Film Technology Research Center, Korea Institute of Science and Technology, P.O. Box 131, Cheongryang, Seoul, 130-650, Korea

    Eun-Song Baik & Young-Joon Baik

  2. Department of Physics, Myong Ji University, Yongin Kyunggi-do, Seoul, 449-728, Korea

    Dongryul Jeon

Authors
  1. Eun-Song Baik
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  2. Young-Joon Baik
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  3. Dongryul Jeon
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Correspondence to Young-Joon Baik.

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Baik, ES., Baik, YJ. & Jeon, D. Aligned diamond nanowhiskers. Journal of Materials Research 15, 923–926 (2000). https://doi.org/10.1557/JMR.2000.0131

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  • DOI: https://doi.org/10.1557/JMR.2000.0131

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