Abstract
A liquid-precursor process was used to produce an epitaxial all-oxide ferroelectric memory device structure. The lanthanum strontium manganate–lead zirconate titanate–lanthanum strontium manganate (LSMO–PZT–LSMO) structure used for this device shows excellent polarization and fatigue behavior with a remnant polarization Pr of 42 µC/cm2 and a coercive field Ec of 68 keV. The polarization was found to only slightly degrade after over 1010 fatigue cycles. This behavior is contrasted with epitaxial PZT using a metal top electrode. In addition, the use of a top LSMO electrode was a sufficient barrier to Pb loss during heating to allow subsequent (or prolonged) heat treatments that would generally lead to Pb loss.
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References
O. Auciello, J.F. Scott, and R. Ramesh, Phys. Today 51, 22 (1998).
S.B. Desu, Phys. Status Solidi A 151, 467 (1995).
C.B. Eom, R.B. Van Dover, J.M. Phillips, J.H. Marshall, C.H. Chen, R.J. Cava, R.M. Fleming, and D.K. Fork, Appl. Phys. Lett. 63, 2570 (1993).
S. Jin, T.H. Tiefel, M. McCormack, R.A. Fastnacht, R. Ramesh, and L.H. Chen, Science 264, 413 (1994).
B.W. Chung, E.L. Brosha, F.H. Garzon, I.D. Raistrick, R.J. Houlton, and E. Hawley, J. Mater. Res. 10, 2518 (1995).
J.T. Cheung, P. Morgan, D.H. Lowndes, X-Y. Zheng, and J. Breen, Appl. Phys. Lett. 62, 2045 (1993).
B.A. Tuttle and R.W. Schwartz, MRS Bull. 21(6), 49 (1996).
A.D. Polli, F.F. Lange, M. Ahlskog, R. Menon, and A.K. Cheetham, J. Mater. Res. 14, 1337 (1999).
T. Manabe, I. Yamaguchi, W. Kondo, S. Mizuta, and T. Kumagi, J. Mater. Res. 12, 541 (1997).
F. Wang and S. Leppävuori, J. Appl. Phys. 83, 1293 (1997).
A. Polli, formerly of the University of California, Santa Barbara, CA (personal communication).
J.H. Kim, A.T. Chien, F.F. Lange, and L. Wills, J. Mater. Res. 14, 1190 (1999).
A. Seifert, F.F. Lange, and J. Speck, J. Mater. Res. 10, 680 (1995).
F. McNally, Doctoral Thesis, University of California at Santa Barbara (1999).
T. Tani and D. Payne, J. Am. Ceram. Soc. 77, 1242 (1994).
X. Du and I-W. Chen, J. Appl. Phys. 83, 7789 (1998).
C.K. Kwok, D.P. Vijay, S.B. Desu, N.R. Parikh, and E.A. Hill, Integr. Ferroelectr. 3, 121 (1993).
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McNally, F., Kim, J.H. & Lange, F.F. Fatigue Properties of Lanthanum Strontium Manganate–lead Zirconate Titanate Epitaxial Thin Film Heterostructures Produced by a Chemical Solution Deposition Method. Journal of Materials Research 15, 1546–1550 (2000). https://doi.org/10.1557/JMR.2000.0221
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DOI: https://doi.org/10.1557/JMR.2000.0221