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Hydrogen Dilution of Silane: Correlation Between the Structure and Optical Band Gap in Gd a-Si:H Films

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Abstract

The influence of diluting SiH4 with H2 on the optical and structural properties of a-Si:H has been investigated. The major effects of the dilution are a pronounced decrease of the amount of (Si-H2)n-chains, an increase of the macroscopic density, and a decrease of the total amount of incorporated hydrogen in the films. Different models for the structure as a function of the hydrogen concentration are deduced. We also present new data on the dependence of the optical band gap Eg on the hydrogen concentration and density of the films. An important result from this work is that Eg appears to correlate with the distance between the silicon atoms, rather than with the overall hydrogen concentration.

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Acknowledgements

This research was financially supported by the Stichting voor Technische Wetenschappen (STW). The authors are grateful to Prof.Dr. F.H.P.M. Habraken for his helpful and stimulating discussions and to W.M. Arnold Bik for his help with the NRA measurements.

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Authors and Affiliations

  1. Department of Atomic and Interface Physics, University of Utrecht, P.O.Box 80000, NL-3508 TA, Utrecht, The Netherlands

    H. Meiling, M. J. Van Den Boogaard, R.E.I. Schropp, J. Bezemer & W.F. Van der Weg

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  1. H. Meiling
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  2. M. J. Van Den Boogaard
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  3. R.E.I. Schropp
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  4. J. Bezemer
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  5. W.F. Van der Weg
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Meiling, H., Van Den Boogaard, M.J., Schropp, R. et al. Hydrogen Dilution of Silane: Correlation Between the Structure and Optical Band Gap in Gd a-Si:H Films. MRS Online Proceedings Library 192, 645–650 (1990). https://doi.org/10.1557/PROC-192-645

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  • DOI: https://doi.org/10.1557/PROC-192-645

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