Abstract
Electron spin resonance and its use as a tool for building reliability into MOS oxides is reviewed.
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Acknowledgments
The author thanks P.M. Lenahan, H.L. Evans, and R.K. Lowry for informative technical discussions and Dynamics Research Corporation for support.
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Conley, J.F. Application of Electron Spin Resonance as a Tool for Building In Reliability (BIR). MRS Online Proceedings Library 428, 293–310 (1996). https://doi.org/10.1557/PROC-428-293
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DOI: https://doi.org/10.1557/PROC-428-293