Abstract
A site specific technique for cross-section transmission electron microscopy specimen preparation of difficult materials is presented. Focused ion beams are used to slice an electron transparent sliver of the specimen from a specific area of interest. Micromanipulation lift-out procedures are then used to transport the electron transparent specimen to a carbon coated copper grid for subsequent TEM analysis. The experimental procedures are described in detail and an example of the lift-out technique is presented.
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Acknowledgement
This work was funded by Cirent Semiconductor. Special thanks are due to J. Bindell for encouraging this work. Samples were donated by D. Kuschner, S. Li and S. Merchant. Fig. 4 was imaged by B. Purcell.
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Giannuzzi, L.A., Drown, J.L., Brown, S.R. et al. Focused Ion Beam Milling and Micromanipulation Lift-Out for Site Specific Cross-Section Tem Specimen Preparation. MRS Online Proceedings Library 480, 19–27 (1997). https://doi.org/10.1557/PROC-480-19
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DOI: https://doi.org/10.1557/PROC-480-19