Reversible and Irreversible Contributions to the Polarization in SrBi₂Ta₂O₉ Ferroelectric Capacitors

Abstract

This work presents a survey of the mechanisms of the polarization in ferroelectric thin films which are relevant for application in non-volatile ferroelectric memories (FeRAM). Since the integration of these materials in new memory generations requires small structures and therefore a maximum utilization of the switchable polarization, the distinction between the several polarization mechanisms is of specific interest. Standard characterization methods, such as hysteresis loops, C-V measurements and fast pulse switching tests are evaluated and used to distinguish between the reversible and irreversible contributions to the total polarization. The respective contributions are described qualitatively and demonstrated at spin-coated SrBiTa₂O₉ thin films and compared with Pb(Zr,Ti)O₃ films. Additionally, a method is described to obtain the static hysteresis curve, a precise characterization of the polarization which does not depend on the measuring frequency. These data are compared with C-V measurements. It is shown that the standard dynamic hysteresis curve reveals misleading statements about the remanent polarization and the coercive voltage.