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Physical Characterization of Zirconium Doped Zinc Oxide Thin Firms Deposited by Spray Pyrolysis

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Abstract

Zinc oxide thin films doped with zirconium were prepared from solutions with doping material dispersed at several concentrations and using the spray pyrolysis technique.The films were deposited over sodocalcic glasses at different substrate temperatures. Effects of doping material concentration and substrate temperatures on electrical, optical, structural and morphological film properties are presented. Results show an evolution in morphology and grains size as the doping concentration is increased. Preferential growth in the (002) orientation was detected for each thin film from X ray diffractograms.

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Authors and Affiliations

  1. Dpto. de Imgeniería Eléctrica, CINVESTAV, A.P. 14-740, 07000, México D.F., Mexico

    A. Maldonado, M. De La Luz Olvera, J. Ca~netas Ortega & R. Asomoza

  2. Instituto de Física, UNAMN, A.P. 20-364, 01000, México D.F., Mexico

    D. R. Acosta

  3. Laboratorio de Investigación en Materiales, CINVESTAV-IPN, Centro Universitario Querétaro, Mexico

    R. Castanedo & G. Torres

Authors
  1. A. Maldonado
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  2. D. R. Acosta
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  3. M. De La Luz Olvera
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  4. R. Castanedo
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  5. G. Torres
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  6. J. Ca~netas Ortega
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  7. R. Asomoza
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Maldonado, A., Acosta, D.R., De La Luz Olvera, M. et al. Physical Characterization of Zirconium Doped Zinc Oxide Thin Firms Deposited by Spray Pyrolysis. MRS Online Proceedings Library 520, 57–62 (1998). https://doi.org/10.1557/PROC-520-57

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  • DOI: https://doi.org/10.1557/PROC-520-57

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