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Stress Determination in Textured Thin Films Using X-Ray Diffraction

  • Mechanical Behavior of Thin Film
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References

  1. Donald S. Gardner and Paul Flinn, in Thin Films: Stresses and Mechanical Properties, edited by J.C. Bravman, W.D. Mix, D.M. Barnett, and Smith D.A. (Mater. Res. Soc. Symp. Proc. 130, Pittsburgh, PA, 1989) p. 69.

    CAS  Google Scholar 

  2. S. Chikazumi and S.H. Charap, Physics of Magnetism (Kreiger, Malabar, Florida, 1986).

    Google Scholar 

  3. J.C. Bean, in Layered Structures, Epitaxy, and Interfaces, edited by J.M. Gibson and L.R. Dawson (Mater. Res. Soc. Symp. Proc. 37, Pittsburgh, PA, 1985) p. 245–254.

    CAS  Google Scholar 

  4. I.K. Schuller, in Thin Films: Stresses and Mechanical Properties III, edited by W.D. Nix, J.C. Bravman, E. Arzt, and L.B. Freund (Mater. Res. Soc. Symp. Proc. 239, Pittsburgh, PA, 1992).

  5. Noyan I.C. and J.B. Cohen Residual Stress: Measurement by Diffraction and Interpretation (Springer-Verlag, New York, 1987).

    Book  Google Scholar 

  6. M.R. James and J.B. Cohen, “The Measurement of Residual Stresses by X-ray Diffraction Techniques,” in Treatise on Materials Science and Technology 19A, edited by H. Herbert (Academic Press, New York, 1980) p. 1–62.

    Google Scholar 

  7. A. Segmüller and M. Murakami, “X-ray Diffraction Analysis of Strains and Stresses in Thin Films,” in Treatise on Materials Science and Technology 27, edited by H. Herbert (Academic Press, New York, 1988) p. 143–200.

    Article  Google Scholar 

  8. L.H. Schwartz and J.B. Cohen, Diffraction rom Materials (Springer-Verlag, New York, 1987).

    Book  Google Scholar 

  9. G.H. Vineyard, Phys. Rev. B 26 (1982) p. 4146–4159.

    Article  CAS  Google Scholar 

  10. George E. Dieter, Mechanical Metallurgy (McGraw-Hill, New York, 1986).

    Google Scholar 

  11. Stephen Wolfram, Mathematica, A System for Doing Mathematics by Computer (Addison-Wesley, Redwood City, California, 1991).

    Google Scholar 

  12. D. B Cullity, Elements of X-Ray Diffraction (Addison-Wesley, Reading, Massachusetts, 1967).

    Google Scholar 

  13. M. Langlet and J.C. Joubert, J. Appl. Phys. 64 (1988) p. 780.

    Article  CAS  Google Scholar 

  14. V. Valvoda, R. Kužel Jr., R. Černý, and D. Rafaja, Thin Solid Films 193/194 (1990) p. 401–408.

    Article  Google Scholar 

  15. P.A. Flinn and G.A. Waychunas, J. Vac. Sci. Technol. B 6 (1988) p. 1749–1755.

    Article  CAS  Google Scholar 

  16. H. Behnken and V. Hauk, Thin Solid Films 193/194 (1990) p. 333–341.

    Article  Google Scholar 

  17. A.J. Perry J. Vac. Sci. Technol. A 8 (1990) p. 1351.

    Article  CAS  Google Scholar 

  18. T.J. Vink, M.A. Somers, J.L.C. Daams, and A.G. Dirks, J. Appl. Phys. 70 (1991) p. 4301.

    Article  CAS  Google Scholar 

  19. M.A. Korhonen, C.A. Paszkiet, R.D. Black, and Che-Yu Li, Scripta Met. Mater. 24 (1990) p. 2297–2302.

    Article  CAS  Google Scholar 

  20. J.A. Bain, L.J. Chyung, S.M. Brennan, and B.M. Clemens, Phys. Rev. B 44 (1991) p. 1184–1192.

    Article  CAS  Google Scholar 

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Stress Determination in Textured Thin Films Using X-Ray Diffraction. MRS Bulletin 17, 46–51 (1992). https://doi.org/10.1557/S0883769400041658

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