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Control of porosity in fluoride thin films prepared by vapor deposition

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Abstract

We have measured the porosity in thin films of lithium fluoride (LiF), magnesium fluoride (MgF2), barium fluoride (BaF2), and calcium fluoride (CaF2) as a function of the substrate temperature for films deposited by thermal evaporation onto glass substrates. The amount of porosity in the thin films was measured using an atomic force microscope and a quartz crystal thickness monitor. The porosity was very sensitive to the substrate temperature and decreased as the substrate temperature increased. Consistent behavior was observed among all of the materials in this study.

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ACKNOWLEDGMENT

This work is supported by the National Science Foundation, Division of Materials Research, under Grant No. 0504813.

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Authors and Affiliations

  1. School of Materials Engineering, Purdue University, West Lafayette, Indiana, 47907-2044, USA

    Hakkwan Kim & Alexander H. King

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  1. Hakkwan Kim
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  2. Alexander H. King
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Correspondence to Hakkwan Kim.

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Kim, H., King, A.H. Control of porosity in fluoride thin films prepared by vapor deposition. Journal of Materials Research 22, 2012–2016 (2007). https://doi.org/10.1557/jmr.2007.0225

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