Abstract
Shape-memory alloy (SMA) thin films formed by sputter deposition have attracted considerable attention in the last decade. Current intensive research demonstrates that unique fine microstructures are responsible for the superior shape-memory characteristics observed in thin films as compared with bulk materials. Simultaneously, much effort has been undertaken to develop and fabricate micro devices actuated by SMA thin films. This article reviews the research to date on shape-memory behavior and the mechanical properties of SMA thin films in connection with their peculiar microstructures. Promising applications such as microvalves are demonstrated, along with a focused discussion on process-related problems. All of the results indicate that thin-film shape-memory actuators are ready to contribute to the development of microelectromechanical systems.
Similar content being viewed by others
References
K. Ikuta, in Proc. IEEE Int. Conf. on Robotics and Automation-90 (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1990) p. 2156.
C.A. Ray, C.L. Sloan, A.D. Johnson, J.D. Busch, and B.R. Petty, in Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems, edited by A.P. Jardine, G.C. Johnson, A. Crowson, and M. Allen, (Mater. Res. Soc. Symp. Proc. 276, Pittsburgh, 1992) p. 161.
L. Hou, T.J. Pence, and D.S. Grummon, in Materials for Smart Systems, edited by E.P. George, S. Takahashi, S. Trolier-McKinstry, K. Uchino, and M. Wun-Fogle (Mater. Res. Soc. Symp. Proc. 360, Pittsburgh, 1995) p. 369.
A. Ishida, A. Takei, and S. Miyazaki, Thin Solid Films 228 (1993) p. 210.
Y. Kawamura, A. Gyobu, T. Saburi, and M. Asai, Mater. Sci. Forum 327-328 (2000) p. 303.
Y. Nakata, T. Tadaki, H. Sakamoto, A. Tanaka, and K. Shimizu, J. Phys. IV (France) 5 (C8) (1995) p. 671.
A. Ishida, K. Ogawa, M. Sato, and S. Miyazaki, Metall. Mater. Trans. A 28A (1997) p. 1985.
T. Kikuchi, K. Ogawa, S. Kajiwara, T. Matsu-naga, and S. Miyazaki, Philos. Mag. A 78 (1998) p. 467.
S. Kajiwara, T. Kikuchi, K. Ogawa, T. Matsunaga, and S. Miyazaki, Philos. Mag. Lett. 74 (1996) p. 137.
Y. Kawamura, A. Gyobu, H. Horikawa, and T. Saburi, J. Phys. IV (France) 5 (C8) (1995) p. 683.
S. Miyazaki, K. Nomura, A. Ishida, and S. Kajiwara, J. Phys. IV (France) 7 (C5) (1997) p. 275.
K. Kuribayashi, in Proc. IEEE Micro Electro Mechanical Systems Workshop (Institute of Electrical and Electronics Engineers, Piscataway, NJ, 1990) p. 217.
S. Miyazaki, K. Nomura, and H. Zhirong, in Proc. Int. Conf. on Shape Memory and Superelastic Technologies (SMST-94) (The International Organization on Shape Memory and Superelastic Technologies, Santa Clara, CA, 1994) p. 19.
A. Ishida, M. Sato, T. Kimura, and S. Miyazaki, Philos. Mag. A 80 (2000) p. 967.
D.S. Grummon and J.P. Zhang, Phys. Status Solidi A 186 (2001) p. 17.
A. Ishida (unpublished manuscript).
J.A. Walker, M. Mehregany, and K.J. Gabriel, Sens. Actuators, A 21-23 (1990) p. 243.
M. Kohl, D. Dittmann, E. Quandt, B. Winzek, S. Miyazaki, and D.M. Allen, Mater. Sci. Eng., A 273-275 (1999) p. 794.
G. Hahm, H. Kahn, S.M. Phillips, and A.H. Heuer, in Proc. Solid-State Sensor and Actuator Workshop (Transducer Research Foundation Inc., Cleveland, OH, 2000) p. 230.
W.L. Benard, H. Kahn, A.H. Heuer, and M.A. Huff, in Proc. Int. Conf. on Solid-State Sensors and Actuators 1997, p. 361.
A.D. Johnson, Micromachine Devices 4 (1999) p. 1.
A.D. Johnson and V. Martynov, in Proc. Int. Conf. on Shape Memory and Superelastic Technologies (SMST-97) (The International Organization on Shape Memory and Superelastic Technologies, Santa Clara, CA, 1997) p. 149.
N.M. Roth, U.S. Patent No. 6,096,175 (August 1, 2000).
J.D. Busch, A.D. Johnson, C.H. Lee, and D.A. Stevenson, J. Appl. Phys. 68 (1990) p. 6224.
Rights and permissions
About this article
Cite this article
Ishida, A., Martynov, V. Sputter-Deposited Shape-Memory Alloy Thin Films: Properties and Applications. MRS Bulletin 27, 111–114 (2002). https://doi.org/10.1557/mrs2002.46
Published:
Issue Date:
DOI: https://doi.org/10.1557/mrs2002.46