Skip to main content
SpringerLink
Log in

Large-Scale Manufacturing of Nanoscale Multilayered Hard Coatings Deposited by Cathodic Arc/Unbalanced Magnetron Sputtering

  • Published:
MRS Bulletin Aims and scope Submit manuscript

Abstract

Nanoscale multilayered (superlattice) hard coatings can be manufactured in a plastic hardness range (HP) between 25 GPa and 55 GPa by a combination of cathodic arc evaporation and unbalanced magnetron sputtering (arc bond sputter technology). Using large-scale industrial physical vapor deposition (PVD) equipment and a sufficiently high pumping speed, multilayered coatings can be deposited by simultaneously operating cathodes without special shutter and shielding facilities in a common reactive-gas atmosphere. The efficiency of the process is in many cases identical to that of TiN and CrN.Temperature-resistant, wear-resistant, and corrosion-resistant coatings of various compositions have been produced under industrial conditions. So far, the main applications concentrate on metal-forming and on cutting die steel, Inconel, stainless steel, and titanium. Applications have also been found in the chemical, textile, medical, and automotive industries.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. U. Helmersson, S. Todorova, S.A. Barnett, J.-E. Sundgren, L.C. Markert, and J.E. Greene, J. Appl. Phys. 62 (1987) p. 481.

    Article  CAS  Google Scholar 

  2. X. Chu, M.S. Wong, W.D. Sproul, S.L. Rohde, and S.A. Barnett, J. Vac. Sci. Technol., A 10 (1992) p. 1604.

    Article  CAS  Google Scholar 

  3. P. Yashar, S.A. Barnett, J. Rechner, and W.D. Sproul, J. Vac. Sci. Technol., A 16 (5) (1998) p. 2913.

    Article  CAS  Google Scholar 

  4. P.C. Yashar and W.D. Sproul, Vacuum 55 (1999) p. 179.

    Article  CAS  Google Scholar 

  5. L.A. Donohue, W.-D. Münz, D.B. Lewis, J. Cawley, T. Hurkmans, T. Trinh, I. Petrov, and J.E. Greene, Surf. Coat. Technol. 93 (1997) p. 69.

    Article  CAS  Google Scholar 

  6. W.-D. Münz, D.B. Lewis, P.Eh. Hovsepian, C. Schönjahn, A.P. Ehiasarian, and I.J. Smith, Surf. Eng. 17 (1) (2001) p. 15.

    Article  Google Scholar 

  7. M. Setoyama, A. Nakayama, M. Tanaka, N. Kitagawa, and T. Nomura, Surf. Coat. Technol. 86/87 (1996) p. 225.

    Article  Google Scholar 

  8. W.-D. Münz, D. Schulze, and F.J.M. Hauzer, Surf. Coat. Technol. 50 (1992) p. 169.

    Article  Google Scholar 

  9. L.A. Donohue, I.J. Smith, W.-D. Münz, I. Petrov, and J.E. Greene, Surf. Coat. Technol. 94/95 (1997) p. 226.

    Article  Google Scholar 

  10. M.I. Lembke, D.B. Lewis, W.-D. Münz, and J.M. Titchmarsh, Surf. Eng. 17 (2) (2001) p. 153.

    Article  CAS  Google Scholar 

  11. S. Yang and D.G. Teer, Surf. Coat. Technol. 131 (2000) p. 412.

    Article  CAS  Google Scholar 

  12. C. Schönjahn, D.B. Lewis, W.-D. Münz, and I. Petrov, Surf. Eng. 16 (2) (2000) p. 176.

    Article  Google Scholar 

  13. C. Schönjahn, H. Paritong, W.-D. Münz, R.D. Twesten, and I. Petrov, J. Vac. Sci. Technol., A 19 (4) (2001) p. 1392.

    Article  Google Scholar 

  14. Fokker B.V. (unpublished).

  15. C. Leyens, M. Peters, P.Eh. Hovsepian, D.B. Lewis, Q. Luo, and W.-D. Münz, Surf. Coat. Technol. 155 (2002) p. 103.

    Article  CAS  Google Scholar 

  16. D.K. Aspinwall, R.C. Dewes, E.-G. Ng, C. Sage, and S.L. Soo, in Proc. 5th Int. Conf. on Behavior of Materials in Machining (2000) p. 45.

    Google Scholar 

  17. G. Nayal, D.B. Lewis, M. Lembke, W.-D. Münz, and J.E. Cockrem, Surf. Coat. Technol. 111 (1999) p. 148.

    Article  CAS  Google Scholar 

  18. A.P. Ehiasarian, W.-D. Münz, L. Hultman, U. Helmersson, and I. Petrov, Surf. Coat. Technol. 163–164 (2003) p. 267.

    Article  Google Scholar 

Download references

Authors
  1. W. D. Münz
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Münz, W.D. Large-Scale Manufacturing of Nanoscale Multilayered Hard Coatings Deposited by Cathodic Arc/Unbalanced Magnetron Sputtering. MRS Bulletin 28, 173–179 (2003). https://doi.org/10.1557/mrs2003.58

Download citation

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1557/mrs2003.58

Keywords

Search

Navigation