ZnO films were prepared on silica glass substrates by the sol-gel method from Zn(CH₃COO)₂⋅2H₂O-2-methoxyethanol solutions containing monoethanolamine (MEA) or diethanolamine (DEA). Smooth and transparent ZnO films were obtained by heating at temperatures from 200 to 500°C for 10min after each coating and finally at the same temperatures for 1h. The films prepared from coating solutions containing MEA were strongly oriented along the (002) plane. The effects of heating temperature and ethanolamines on the film morphology, grain size distribution and crystallographic orientation are discussed based on X-ray diffraction and scanning electron microscopy.