Three types of carbon fibers, PAN-based HSCF, pitch-based HMCF with low graphitization degree, and pitch-based CF70 with high graphitization degree, were used to prepare unidirectional carbon fiber reinforced SiC composites (CF/SiC) by multiple impregnation of polycarbosilane and subsequent pyrolysis at 1200°C for 5-9 times. The experimental results showed that pyrolytic product of polycarbosilane at 1200°C in N₂ consisted of β-SiC phase in a nearly amorphous state and impurity oxygen. The impregnation behavior of polycarbosilane for CF70/SiC was different from those of HSCF/SiC and HMCF/SiC. CF70/SiC showed a flexural strength of 700MPa, which was markedly higher than those of HSCF/SiC and HMCF/SiC. Moreover, CF70/SiC exhibited non-catastrophic fracture behavior, whereas HSCF/SiC and HMCF/SiC showed brittle fracture behavior. Scanning electron microscope (SEM) and transmission electron microscope (TEM) observation of these composites clarified that HSCF/SiC and HMCF/SiC had a strong fiber/matrix interface bonding, whereas CF70/SiC had a weak interface bonding. It was concluded that highly graphitized CF70 was the most suitable reinforcement for the CF/SiC composite.