In general, Raman analysis is one of the useful candidates to obtain structure of carbonaceous coatings. To improve the depth resolution of Raman analysis, surface-enhanced Raman Scattering (SERS) using gold nanoparticles (Au nanoparticles: AuNPs) and Au sputtered particles were investigated. The analysis was conducted to approximately 1.7, 2.4, 4.7, and 10.0 nm thickness of carbon coatings on silicon substrate with a 532 nm incident wavelength laser. The results indicated that the underlying silicon substrate was detected in the results of the Au sputtering method. Contrastingly, the underlying silicon substrate was not detected by the AuNPs method. This result clarified that using the AuNPs method, the detection depth of the carbon film was approximately 1.7 nm or less. The a-C:H coating was processed using a calotester, and SERS measurements at different depths were performed for the 633 and 532 nm wavelengths using the AuNPs method. As a result, the I_G peak position tended to increase from the vicinity of the inter face between the a-C:H coating and the substrate to the surface. In addition, the I_D/I_G ratio was as low as 0.28 near the substrate and 0.72 at 3800 nm.