Abstract
The influence of substrate temperature and bias voltage on the structure and tribomechanical properties of the Ti–Al–N coatings obtained by reactive magnetron sputtering technique has been investigated. The structure and elemental and phase compositions have been studied by scanning electron microscopy, Rutherford backscattering, and X-Ray diffraction. The results of friction and wear experiments indicated that the lowest coefficient of friction (three times lower than 12Cr18Ni10Ti) corresponded to a coating deposited at a bias voltage of–200 V and a substrate temperature of 340°С, while the most wear-resistant coating (under a load of 700 mN and the testing time of 1080 s) was Ti–Al–N sputtered at a bias voltage of–200 V and a substrate temperature of 440°С.
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Latushkina, S.D., Romanov, I.M., Zhizhchenko, A.G., Posylkina, O.I., Komarovskaya, V.M., and Piskunova, O.Yu., Formation of wear-resistant nanostructured TiN/Cu coatings, J. Frict. Wear, 2016, vol. 37, no. 1, pp. 27–31.
Reshetnyak, E.N. and Strel’nitskii, V.E., Synthesis of hardening nanostructured coatings, Vopr. At. Nauki Tekh., Ser.: Fiz. Radiats. Povrezhdenii Radiats. Materialoved., 2008, vol. 92, no. 2, pp. 119–130.
Danisman, S. and Savas, S., Relation between coating parameters and structural and mechanical properties of magnetron sputtered TiAlN coatings, Arab. J. Sci. Eng., 2014, vol. 39, pp. 5025–5034.
Huibo, H., Wenqiang, H., Huaying, L., Jun, Y., and Tao, G., Effect of TiN and TiAlN coatings on tribological properties and efficiency of gear, Adv. Mater. Res., 2014, vol. 933, pp. 159–164.
Aihua, L., Jianxin, D., Haibing, C., Yangyang, C., and Jun, Z., Friction and wear properties of TiN, TiAlN, AlTiN, and CrAlN PVD nitride coatings, Int. J. Refract. Met. Hard Mater., 2012, vol. 31, pp. 82–88.
Burmakov, A.P. and Kuleshov, V.N., Spectroscopic system for controlling gas flow and impurity content during magnetron deposition of films, J. Appl. Spectrosc., 2007, vol. 74, no. 3, pp. 459–463.
Conrad, H. and Narayan, J., On the grain size softening in nanocrystalline materials, Scr. Mater., 2000, vol. 42, pp. 1025–1030.
Sergeev, V.P., Fedorishcheva, M.V., Voronov, A.V., Sergeev, O.V., Yanovskii, V.P., and Psakh’e, S.G., Tribomechanical properties and structure of Ti1–xAlxN nanocomposite coatings, Izv. Tomsk. Politekh. Univ., 2006, vol. 309, no. 2, pp. 149–153.
Transition Metal Carbides and Nitrides, Toth, L., Ed., Amsterdam: Elsevier, 1971.
Devia, D.M., Restrepo-Parra, E., Arango, P.J., Tschiptschin, A.P., and Velez, J.M., TiAlN coatings deposited by triode magnetron sputtering varying the bias voltage, Appl. Surf. Sci., 2011, vol. 257, pp. 6181–6185.
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Original Russian Text © I.M. Klimovich, F.F. Komarov, V.A. Zaikov, A.K. Kuleshov, V.V. Pilko, 2018, published in Trenie i Iznos, 2018, Vol. 39, No. 2, pp. 122–129.
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Klimovich, I.M., Komarov, F.F., Zaikov, V.A. et al. Influence of Parameters of Reactive Magnetron Sputtering on Tribomechanical Properties of Protective Nanostructured Ti–Al–N Coatings. J. Frict. Wear 39, 92–98 (2018). https://doi.org/10.3103/S1068366618020083
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DOI: https://doi.org/10.3103/S1068366618020083