The soft magnetic properties of electrodeposited CoNiFe films were studied. Films composed of 30∼50 wt%Co-23∼35 wt%Ni-25∼35 wt%Fe alloy with a high saturation magnetization of more than 1.5 T show a low coercivity of less than 0.2 Oe. A film composed of 40Co-30Ni-30Fe alloy and having an fcc phase structure with small bcc phase, which was created by annealing at 300°C, has excellent soft-magnetic properties (Hc=0.06 Oe, μ=3200, Bs= 1.8 T). This bcc phase makes an appearance during the first stage of crystallization at 287°C. The structure is thermally unstable, and is due to a special feature of electrodeposition. During the annealing, H2O, H2, and CO2 were released from the film, but the patterns of generation of these gases bear little relationship to the DSC pattern.