Abstract
Cd1-x Mn x Te thin films were prepared by co-sputtering CdTe and Mn targets on to a variety of substrates at room temperature. The sputter powers of the CdTe and the Mn targets were fixed at 75 W and 65 W, respectively, and the influences of the substrate on the structural properties of the deposited thin films were investigated. All of the films were polycrystalline in nature, and X-ray diffraction showed that the lattice constant varied between 6.3912 and 6.4518 Ǻ depending on the substrate. The incorporated Mn mole fraction varied between 12.796% and 13.046%; this variation may be attributed to a change in the band-gap. The band-gap energy increased from 1.6767 to 1.6799 eV and the grain size decreased from 133 to 74 nm as the strain increased from 14.12% to 34.12% for the various substrates.
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Ahn, H., Seo, J., Shin, H. et al. Substrate effects on the structural properties of Cd1-x Mn x Te thin films grown via magnetron Co-sputtering. Journal of the Korean Physical Society 67, 668–671 (2015). https://doi.org/10.3938/jkps.67.668
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DOI: https://doi.org/10.3938/jkps.67.668