Vibratory Finishing of Immobilized Cylinders
p.278
p.278
A Framework for the Analysis of Mass Finishing Processes
p.284
p.284
Simulation of 1D Abrasive Vibratory Finishing Process
p.290
p.290
A Study on the Characteristics of a Wafer Final Polishing Process at Various Machining and Temperature Variation
p.296
p.296
Effect of Fabrication Conditions on Ultra-Fine Abrasive Polishing Pad
p.302
p.302
A New Automatic Backlash Adjustment Method for Lapping of Spiral Bevel Gear
p.307
p.307
Kinematics Simulation of Eccentric Dual Rotated-Plates Lapping for Bearing Balls
p.312
p.312
Research on the Workpiece Kinematics in Face Lapping with Friction Drive
p.318
p.318
Slurry Flow Visualisation of Chemical Mechanical Polishing Based on a Computational Fluid Dynamics Model
p.324
p.324
Effect of Fabrication Conditions on Ultra-Fine Abrasive Polishing Pad
Abstract:
Considering the grit aggregation of fixed abrasive and the environmental pollution of free abrasive machining tools, a kind of ultra-fine abrasive polishing pad was fabricated by means of sol-gel technology. The effects of drying method, gel reaction time, sodium alginate concentration and pad thickness which determine the property of the polishing pad were respectively investigated. And the polishing pad fabricated under the optimized condition was utilized to polish silicon wafer on a nano-polishing machine to evaluate the tool performance.
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Info:
Periodical:
Advanced Materials Research (Volume 565)
Pages:
302-306
Citation:
Online since:
September 2012
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