A Novel Bidirectional Z-Shaped Thermally Actuated RF MEMS Switch for Multiple-Beam Antenna Array

Jitendra Pal; Yong Zhu; Jun Wei Lu; Dzung Viet Dao

doi:10.4028/www.scientific.net/AMR.705.264

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Research on a Wavelet Filtering Method of the Fiber Optic Gyroscope Based on EMD
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A Novel Bidirectional Z-Shaped Thermally Actuated RF MEMS Switch for Multiple-Beam Antenna Array
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HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 705A Novel Bidirectional Z-Shaped Thermally Actuated...

A Novel Bidirectional Z-Shaped Thermally Actuated RF MEMS Switch for Multiple-Beam Antenna Array

Abstract:

In this paper RF MEMS switchis designed for dielectric-embedded electronically switched multiple-beam (DE-ESMB) antenna array. To achieve small stiffness without buckling, a novel bidirectional Z-shaped thermal actuator is used instead of V-shaped thermal actuator, which can generate large displacement and high contact force at low actuation voltage. With the actuation current from-0.6 A to 0.6 A, the electrothermal actuator can achieve a bidirectional motion in a dynamic range of-10.08 μm to 10.17 μm.RF performances are improved by suspending the structure 25 μm from the substrate using MetalMumps process. An ON state insertion loss of-0.14 dB at 10 GHz and an OFF state isolation of-67 dB at 10 GHz are achieved on low resistivity silicon substrate.

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Periodical:

Advanced Materials Research (Volume 705)

Pages:

264-269

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.705.264

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Cite this paper

Online since:

June 2013

Authors:

Jitendra Pal, Yong Zhu, Jun Wei Lu, Dzung Viet Dao

Keywords:

Bidirectional Motion, Dielectric Embedded Antenna Array, Electronically Switched Multiple Beams, Smart Antenna, Z-Shaped Thermal Actuator

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