The Design of a New Biaxial Decoupled Resonant Micro-Accelerometer

Bo Yang; Hui Zhao; Bo Dai

doi:10.4028/www.scientific.net/AMR.744.466

Paper Titles

The Influence of Aging on the Flexural and Physical Performance of Restructured Bamboo Lumber
p.445

The Validation of Computational Software System for Creep Damage Analysis
p.449

Study of Stiffness Calculation Method on Reinforced Concrete Beam Strengthened with CFRP
p.455

Optimizing Design of the Guide-Vane Attached to the New Bidirectional Flowmeter
p.461

The Design of a New Biaxial Decoupled Resonant Micro-Accelerometer
p.466

Design and Application for Heller System Radiator Built-In Automatic Cleaning Device
p.470

Non-Uniform Dose Measurement Based on Two-Stage Bleaching Integrated with Thermo-Luminescence and Optically Stimulated Luminescence Dosimeter
p.474

The Design and Simulation of a New Z-Axis Resonant Micro-Accelerometer Based on Electrostatic Stiffness
p.478

Design of Hall Vehicle Speed Sensor Comprehensive System
p.487

HomeAdvanced Materials ResearchAdvanced Materials Research Vol. 744The Design of a New Biaxial Decoupled Resonant...

The Design of a New Biaxial Decoupled Resonant Micro-Accelerometer

Abstract:

A new biaxial decoupled resonant micro-accelerometer is researched. The new biaxial resonant micro-accelerometer consists of four same tuning forking resonators, four pair of decoupled beams, four lever mechanisms and a proof mass. The decoupling between two orthogonal axes is realized by the decoupling beams, which will benefit to isolate two axes acceleration detection. The simulation is implemented to verify the basic principle by the Ansys. The simulation results prove that the effective frequencies of two acceleration sensitive modes are 3.699 kHz and 3.718 kHz separately. Two pair of resonator modes which are 23.893 kHz, 23.946 kHz, 26.974 kHz and 26.999 kHz separately have about 3kHz difference in frequency in order to prevent the mutual interference. And the interference modes are isolated with effective mode apparently. The input-output characteristic simulation results indicate the y-axis scale factor is 57.1Hz/g and the coupling output in the x-axis is 0.0148Hz/g, while the x-axis scale factor is 56.1Hz/g and the coupling output in the y-axis is 0.0073Hz/g, which proves that the new biaxial resonant micro-accelerometer is practicable and has an excellent decoupled performance.

You might also be interested in these eBooks

Advances in Material Science, Mechanical Engineering and Manufacturing

View Preview

Info:

Periodical:

Advanced Materials Research (Volume 744)

Pages:

466-469

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.744.466

Citation:

Cite this paper

Online since:

August 2013

Authors:

Bo Yang, Hui Zhao, Bo Dai

Keywords:

Bi-Axial, Decoupled, Resonant Micro-Accelerometer, Tuning Forking Resonator

Export:

RIS, BibTeX

Price:

Permissions:

Request Permissions

References

[1] Claudia Comi, Alberto Corigliano, Giacomo Langfelder, et al. Journal of microelectromechanical systems Vol. 19 (2010), pp.1140-1152.

Google Scholar

[2] Sangkyung Sung, Jang Gyu Lee and Byeungleu Lee. J. Micromech. Microeng. Vol. 13 (2003), p.246–253.

Google Scholar

[3] Ashwin A. Seshia, Moorthi Palaniapan, Trey A. Roessig, et al. Journal of microelectromechanical systems Vol. 11(2002), pp.784-793.

Google Scholar

[4] Osamu Tabata, Takeshi Yamamoto. Sensors and Actuators Vol. 75 (1999), pp.53-59.

Google Scholar

[5] Deng-Huei Hwang, Kan-Ping Chin, Yi-Chung Lo. J. Microlith., Microfab., Microsyst. Vol. 4(2005), p.033009.

Google Scholar

[6] C. Comi, A. Corigliano1, G. Langfelder, et al. MEMS 2011, Cancun, MEXICO, January 23-27, (2011).

Google Scholar

[7] Susan X. P. Su, Henry S. Yangand Alice M. Agogino. IEEE SENSORS JOURNAL, Vol. 5(2005), pp.1214-1213.

Google Scholar