Evaluation of Properties of Lapped PZT Ceramics and Silicon Cantilever Based on Eutectic Bonding and Dicing Process

Yi Gui Li; Jian Sun; Jing Quan Liu; Chun Sheng Yang; Dan Nong He; Katsuhiko Tanaka; Susumu Sugiyama

doi:10.4028/www.scientific.net/MSF.663-665.999

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HomeMaterials Science ForumMaterials Science Forum Vols. 663-665Evaluation of Properties of Lapped PZT Ceramics...

Evaluation of Properties of Lapped PZT Ceramics and Silicon Cantilever Based on Eutectic Bonding and Dicing Process

Abstract:

Piezoelectric sensor can produce voltage when deflected (function as an energy harvester) while piezoelectric actuator can deflect when a voltage is applied. Different device applications have different requirements on the thickness and in-plane geometry of the Lead Zirconate Titanate(PZT) piezoelectric layers and thus have their own processing difficulties. In this paper, PZT-Au-Si cantilever is fabricated by eutectic bonding and dicing process.The properties of lapped PZT ceramics and silicon cantilever is also evaluated. The PZT-Au-Si cantilever applications for both piezoelectric actuators and energy harvesters have been confirmed.

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Periodical:

Materials Science Forum (Volumes 663-665)

Pages:

999-1003

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.663-665.999

Citation:

Cite this paper

Online since:

November 2010

Authors:

Yi Gui Li, Jian Sun, Jing Quan Liu, Chun Sheng Yang, Dan Nong He, Katsuhiko Tanaka, Susumu Sugiyama

Keywords:

Cantilever, Energy Harvester, Eutectic Bonding, Micro-Fabrication, PZT

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