Synthesiology English edition
Online ISSN : 1883-2318
Print ISSN : 1883-0978
ISSN-L : 1883-0978
Research papers
The aerosol deposition method
— For production of high performance micro devices with low cost and low energy consumption —
Jun AKEDOShizuka NAKANOJaehyuk PARKSo BABAKiwamu ASHIDA
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JOURNAL FREE ACCESS

2008 Volume 1 Issue 2 Pages 121-130

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Abstract

AD (aerosol deposition) method is one of newly developed technologies for spray coating powder materials. It is a revolutionary coating technology in which high-density consolidation of ceramic powder can be obtained at room temperature, without sintering at high temperature as in conventional ceramic formation. By using AD, it is expected to improve device performance, to greatly reduce energy consumption and to decrease the number of steps during fabrication process that ultimately result in cutting production costs. How the characteristics of AD method are positioned from the perspective of technological competitiveness and reduction of environment load, as well as its potential, is investigated from the viewpoint of Full Research, along with description of principles and specific case studies.

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© 2008 National Institute of Advanced Industrial Science and Technology
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