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Effects of Surface Homogeneity on Optical Properties of Sputter-deposited AlTiO Selective Transmitting Layers

스퍼터 증착으로 형성된 AlTiO 선택적 투과막의 표면 균질성에 따른 광학적 특성

  • Jeong, So-Un (Department of Applied Materials Engineering, Hanbat National University) ;
  • Lim, Jung-Wook (Electronics and Telecommunications Research Institute) ;
  • Lee, Seung-Yun (Department of Applied Materials Engineering, Hanbat National University)
  • 정소운 (한밭대학교 응용소재공학과) ;
  • 임정욱 (한국전자통신연구원 융합부품소재연구부문) ;
  • 이승윤 (한밭대학교 응용소재공학과)
  • Received : 2011.10.18
  • Accepted : 2011.11.25
  • Published : 2012.01.30

Abstract

Transparent dye-sensitized solar cells have been widely investigated for the application to building integrated photovoltaic system. Thin film Si-based solar cells are emerging as a substitute for the dye-sensitized solar cells because their merits of well-established manufacturing processes. Since the selective transmitting layer transmits visible light and reflects infrared light, the solar cell efficiency increases with the introduction of the selective transmitting layer. In this work, AlTiO thin films were grown as the selective transmitting layer by cost-effective sputter deposition and their transmittances were improved by controlling deposition parameters.

건물일체형 태양전지는 투명 연료감응형 태양전지 기술을 중심으로 연구개발이 진행되고 있다. 신뢰성-수율 개선 및 대면적화의 필요성 때문에 잘 정립된 박막 공정 기술에 기초하는 Si계 박막 태양전지가 건물일체형 태양전지를 구현할 기술로서 새롭게 조명 받고 있다. Si계 박막 태양전지에 선택적 투과막을 적용하면 가시광선은 태양전지를 투과하고 적외선은 광흡수층으로 반사되기 때문에 투명 태양전지의 변환효율이 향상된다. 본 연구에서는 선택적 투과막의 증착 기술로서 생산성 측면에서 유리한 스퍼터 증착을 이용하여 AlTiO 선택적 투과막을 형성하고 증착 조건을 조절하여 투과율을 향상시켰다.

Keywords

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  2. Optical properties of zirconium oxide thin films for semitransparent solar cell applications vol.27, pp.11, 2016, https://doi.org/10.1007/s10854-016-5260-4