Abstract
We demonstrate that polyurea films can be prepared by alternating deposition with automated deposition control involving quartz crystal microbalance monitoring and optical source heating. The thickness of the films was linearly controlled by changing the repetition time of deposition, and the stoichiometry obtained was much higher than ±5%. The surface roughness of a 600-nm-thick film was 0.5 nm, which ensures the nm thickness control of the deposited polymers. The piezoelectricity of the films was confirmed by directly measuring the current transient induced by mechanical stress and by measuring the capacitance change induced by electric field.