Skip to main content
Erschienen in: Microsystem Technologies 7/2017

21.10.2016 | Technical Paper

Low-noise and small-area integrated amplifier circuit for mems-based implantable hearing aid applications

verfasst von: Nazli Zargarpour, Hamid Abdi, Hamid Jangi Bahador

Erschienen in: Microsystem Technologies | Ausgabe 7/2017

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

Hearing aid devices are used by patients with hearing impairment to help with hearing problems. These devices consist of a microphone, an amplifier, and speaker modules. The author previously developed a micro-electromechanical piezoelectric diaphragm for a hearing aid device. The proposed diaphragm was in circular shape with 700 μm diameter and 10 μm thickness using AlN piezoelectric material. The design was performed in MEMS scale to offer maximum performance by the diaphragm for the human hearing frequency range. Adding to the previous work, in the present paper, a voltage amplifier circuit is designed for that piezoelectric microphone. The design is performed with respect to suitable circuit performance for the 5 Hz–22.5 kHz frequency range, small area, low noise, high gain and integration capability between the circuit and the diaphragm. The designed circuit is modeled and implemented in Cadence based on the 180 nm (0.18 μm) CMOS technology standard and the circuit layout is demonstrated with the circuit occupying an area of 0.08 mm × 0.04 mm. Simulation study is performed for assessment of the performance of the circuit. The results indicate that the frequency range of the amplifier covers the audio frequency of 5 Hz–22.5 k Hz, the amplification gain is 84.78 dB with the phase margine (PM) of 75.95°, the average power consumption of 0.216 mW, the Input noise level of 4.19 μVrms, CMRR of 133.69 dB and PSRR of 98.76 dB. The integration of the circuit with the microphone for hearing aid devices is proposed based on circuit binding method.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literatur
Zurück zum Zitat Azadpour M (2013) Overview and challenges of implantable auditory prostheses. Basic Clin Neurosci 4:3–4 Azadpour M (2013) Overview and challenges of implantable auditory prostheses. Basic Clin Neurosci 4:3–4
Zurück zum Zitat Baborowski J (2004) Microfabrication of piezoelectric MEMS. J Electroceramics 12:33–51CrossRef Baborowski J (2004) Microfabrication of piezoelectric MEMS. J Electroceramics 12:33–51CrossRef
Zurück zum Zitat Bittencourt AG, Burke PR, Jardim IDS, Brito RD, Tsuji RK, Fonseca ACDO et al (2014) Implantable and semi-implantable hearing aids: a review of history, indications, and surgery. Int Arch Otorhinolaryngol 18:303–310CrossRef Bittencourt AG, Burke PR, Jardim IDS, Brito RD, Tsuji RK, Fonseca ACDO et al (2014) Implantable and semi-implantable hearing aids: a review of history, indications, and surgery. Int Arch Otorhinolaryngol 18:303–310CrossRef
Zurück zum Zitat Deligoz I, Naqvi SR, Copani T, Kiaei S, Bakkaloglu B, Sang-Soo J et al (2011) A MEMS-based power-scalable hearing aid analog front end. Biomed Circ Syst IEEE Trans 5:201–213CrossRef Deligoz I, Naqvi SR, Copani T, Kiaei S, Bakkaloglu B, Sang-Soo J et al (2011) A MEMS-based power-scalable hearing aid analog front end. Biomed Circ Syst IEEE Trans 5:201–213CrossRef
Zurück zum Zitat El-Hoiydi A, Callias F, Oesch Y, Kuratli C, Kvacek R (2014) 18.1 A 1 V 3 mA 2.4 GHz wireless digital audio communication SoC for hearing-aid applications in 0.18 μm CMOS. In: 2014 61st IEEE International Solid-State Circuits Conference, ISSCC 2014, San Francisco, CA, 2014, pp 310–311 El-Hoiydi A, Callias F, Oesch Y, Kuratli C, Kvacek R (2014) 18.1 A 1 V 3 mA 2.4 GHz wireless digital audio communication SoC for hearing-aid applications in 0.18 μm CMOS. In: 2014 61st IEEE International Solid-State Circuits Conference, ISSCC 2014, San Francisco, CA, 2014, pp 310–311
Zurück zum Zitat Garcia Mondelli MFC, Rocha AV, Honório HM (2013) Degree of satisfaction among hearing aid users. Int Arch Otorhinolaryngol 17:51–56 Garcia Mondelli MFC, Rocha AV, Honório HM (2013) Degree of satisfaction among hearing aid users. Int Arch Otorhinolaryngol 17:51–56
Zurück zum Zitat Grosh K, Littrell RJ (2013) Piezoelectric mems microphone. Google Patents Grosh K, Littrell RJ (2013) Piezoelectric mems microphone. Google Patents
Zurück zum Zitat Gyo K, Yanagihara N, Saiki T, Hinohira Y (1990) Present status and outlook of the implantable hearing aid. Otol Neurotol 11:250–253 Gyo K, Yanagihara N, Saiki T, Hinohira Y (1990) Present status and outlook of the implantable hearing aid. Otol Neurotol 11:250–253
Zurück zum Zitat Haynes DS, Young JA, Wanna GB, Glasscock ME (2009) Middle ear implantable hearing devices: an overview. Trends Amplif 13:206–214CrossRef Haynes DS, Young JA, Wanna GB, Glasscock ME (2009) Middle ear implantable hearing devices: an overview. Trends Amplif 13:206–214CrossRef
Zurück zum Zitat Israsena P, Isaradisaikul S, Noymai A, Boonyanukul S, Hemakom A, Chinnarat C et al (2013) Developing an appropriate digital hearing aid for low-resource countries: a case study. Sci World J. doi:10.1155/2013/549486 Israsena P, Isaradisaikul S, Noymai A, Boonyanukul S, Hemakom A, Chinnarat C et al (2013) Developing an appropriate digital hearing aid for low-resource countries: a case study. Sci World J. doi:10.​1155/​2013/​549486
Zurück zum Zitat Johns DA, Martin K (2008) Analog integrated circuit design. Wiley, India Johns DA, Martin K (2008) Analog integrated circuit design. Wiley, India
Zurück zum Zitat Kahue CN, Carlson ML, Daugherty JA, Haynes DS, Glasscock Iii ME (2014) Middle ear implants for rehabilitation of sensorineural hearing loss: a systematic review of fda approved devices. Otol Neurotol Kahue CN, Carlson ML, Daugherty JA, Haynes DS, Glasscock Iii ME (2014) Middle ear implants for rehabilitation of sensorineural hearing loss: a systematic review of fda approved devices. Otol Neurotol
Zurück zum Zitat Keidser G, Alamudi K (2013) Real-Life efficacy and reliability of training a hearing aid. Ear Hear 34:619–629CrossRef Keidser G, Alamudi K (2013) Real-Life efficacy and reliability of training a hearing aid. Ear Hear 34:619–629CrossRef
Zurück zum Zitat Ko WH, Rui Z, Ping H, Jun G, Xuesong Y, Young DJ et al (2009) Studies of MEMS acoustic sensors as implantable microphones for totally implantable hearing-aid systems. Biomed Circ Syst IEEE Trans 3:277–285CrossRef Ko WH, Rui Z, Ping H, Jun G, Xuesong Y, Young DJ et al (2009) Studies of MEMS acoustic sensors as implantable microphones for totally implantable hearing-aid systems. Biomed Circ Syst IEEE Trans 3:277–285CrossRef
Zurück zum Zitat Laperuta EB, Fiorini AC (2012) Satisfaction of elderly individuals with hearing aids in the first six months of use. Jornal da Sociedade Brasileira de Fonoaudiologia 24:316–321CrossRef Laperuta EB, Fiorini AC (2012) Satisfaction of elderly individuals with hearing aids in the first six months of use. Jornal da Sociedade Brasileira de Fonoaudiologia 24:316–321CrossRef
Zurück zum Zitat Lasak JM, Allen P, McVay T, Lewis D (2014) Hearing loss: diagnosis and management. Prim Care Clin Off Pract 41:19–31CrossRef Lasak JM, Allen P, McVay T, Lewis D (2014) Hearing loss: diagnosis and management. Prim Care Clin Off Pract 41:19–31CrossRef
Zurück zum Zitat Littrell RJ (2010) High performance piezoelectric MEMS microphones. The University of Michigan, USA Littrell RJ (2010) High performance piezoelectric MEMS microphones. The University of Michigan, USA
Zurück zum Zitat Mahmoud AF, Massa ST, Douberly SL, Montes ML, Ruckenstein MJ (2014) Safety, efficacy, and hearing preservation using an integrated electro-acoustic stimulation hearing system. Otol Neurotol 35:1421–1425CrossRef Mahmoud AF, Massa ST, Douberly SL, Montes ML, Ruckenstein MJ (2014) Safety, efficacy, and hearing preservation using an integrated electro-acoustic stimulation hearing system. Otol Neurotol 35:1421–1425CrossRef
Zurück zum Zitat McPherson B (2014) Hearing assistive technologies in developing countries: background, achievements and challenges. Disabil Rehab Assist Technol 9:360–364CrossRef McPherson B (2014) Hearing assistive technologies in developing countries: background, achievements and challenges. Disabil Rehab Assist Technol 9:360–364CrossRef
Zurück zum Zitat Park JH, Kim JH, Song Y-K, Jung Y, Hur S, Kim W et al (2013) Design of an analog front end for a bio-inspired auditory sensor of a novel totally implantable cochlear implant. Sens Mater 25:553–565 Park JH, Kim JH, Song Y-K, Jung Y, Hur S, Kim W et al (2013) Design of an analog front end for a bio-inspired auditory sensor of a novel totally implantable cochlear implant. Sens Mater 25:553–565
Zurück zum Zitat Paulick PE, Merlo MW, Mahboubi H, Djalilian HR, Bachman M (2014) A micro-drive hearing aid_ a novel non-invasive hearing prosthesis actuator. Biomed Microdev 16:915–925CrossRef Paulick PE, Merlo MW, Mahboubi H, Djalilian HR, Bachman M (2014) A micro-drive hearing aid_ a novel non-invasive hearing prosthesis actuator. Biomed Microdev 16:915–925CrossRef
Zurück zum Zitat Razavi B (2002) Design of analog CMOS integrated circuits. Tata McGraw-Hill Education, New Delhi Razavi B (2002) Design of analog CMOS integrated circuits. Tata McGraw-Hill Education, New Delhi
Zurück zum Zitat Sang-Soo J, Rivas F, Diaz RE, Jiuk K, Jeonghwan K, Bakkaloglu B et al (2009) A compact and low-cost MEMS loudspeaker for digital hearing aids. Biomed Circ Syst IEEE Trans 3:348–358CrossRef Sang-Soo J, Rivas F, Diaz RE, Jiuk K, Jeonghwan K, Bakkaloglu B et al (2009) A compact and low-cost MEMS loudspeaker for digital hearing aids. Biomed Circ Syst IEEE Trans 3:348–358CrossRef
Zurück zum Zitat Suyog RM, Ketaki DP (2012) GASD: an aid for stone-deaf person. Int J Eng Sci Technol 4(4):1544–1552 Suyog RM, Ketaki DP (2012) GASD: an aid for stone-deaf person. Int J Eng Sci Technol 4(4):1544–1552
Zurück zum Zitat Vujanic A, Pavelka R, Adamovic N, Kment C, Mitic S, Brenner W et al (2002) Development of a totally implantable hearing aid. In: Microelectronics, 2002. MIEL 2002. 23rd International Conference on 2002, pp 235–238 Vujanic A, Pavelka R, Adamovic N, Kment C, Mitic S, Brenner W et al (2002) Development of a totally implantable hearing aid. In: Microelectronics, 2002. MIEL 2002. 23rd International Conference on 2002, pp 235–238
Zurück zum Zitat Williams MD, Griffin BA, Reagan TN, Underbrink JR, Sheplak M (2012) An AlN MEMS piezoelectric microphone for aeroacoustic applications. Microelectromech Syst J 21:270–283CrossRef Williams MD, Griffin BA, Reagan TN, Underbrink JR, Sheplak M (2012) An AlN MEMS piezoelectric microphone for aeroacoustic applications. Microelectromech Syst J 21:270–283CrossRef
Zurück zum Zitat Williger B, Lang FR (2014) Managing age-related hearing loss: how to use hearing aids efficiently - a mini-review. Gerontology 60(5):440–447CrossRef Williger B, Lang FR (2014) Managing age-related hearing loss: how to use hearing aids efficiently - a mini-review. Gerontology 60(5):440–447CrossRef
Zurück zum Zitat Yang C-T (2010) The sensitivity analysis of a MEMS microphone with different membrane diameters. J Mar Sci Technol 18:790–796 Yang C-T (2010) The sensitivity analysis of a MEMS microphone with different membrane diameters. J Mar Sci Technol 18:790–796
Zurück zum Zitat Young DJ, Zurcher MA, Semaan M, Megerian CA, Ko WH (2012) MEMS capacitive accelerometer-based middle ear microphone. IEEE Trans Biomed Eng 59:3283–3292CrossRef Young DJ, Zurcher MA, Semaan M, Megerian CA, Ko WH (2012) MEMS capacitive accelerometer-based middle ear microphone. IEEE Trans Biomed Eng 59:3283–3292CrossRef
Zurück zum Zitat Zargarpour N, Zarifi MH (2014) A piezoelectric micro-electromechanical microphone for implantable hearing aid applications. Microsyst Technol 21(4):893–902CrossRef Zargarpour N, Zarifi MH (2014) A piezoelectric micro-electromechanical microphone for implantable hearing aid applications. Microsyst Technol 21(4):893–902CrossRef
Metadaten
Titel
Low-noise and small-area integrated amplifier circuit for mems-based implantable hearing aid applications
verfasst von
Nazli Zargarpour
Hamid Abdi
Hamid Jangi Bahador
Publikationsdatum
21.10.2016
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 7/2017
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-016-3166-y

Weitere Artikel der Ausgabe 7/2017

Microsystem Technologies 7/2017 Zur Ausgabe

Neuer Inhalt