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Erschienen in:
2001 | OriginalPaper | Buchkapitel
Magnetic Sensor Based on Stabilized MOSFET Field Emitter Arrays
verfasst von : Marioara Avram
Erschienen in: Transducers ’01 Eurosensors XV
Verlag: Springer Berlin Heidelberg
Enthalten in: Professional Book Archive
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This paper present a new magnetic sensor based on vacuum field emission from silicon emitter tips incorporated into the drain of a MOSFET structure. The emitted electrons could be supplied both by thermal generation in the depletion layer under emitters and in the inversion layer under the gate. The operation of the sensor is based on the deflection of the electron current due to the Lorentz force. The anode is split into two parts. The current unbalance between the two parts of the split anode is a measure of the applied magnetic field. The sensor based on cold emission is less sensitive to environmental conditions and the relative magnetic sensitivity ranges from 10 to 40T1.