nach oben

Measurement Techniques

Erschienen in:

26.07.2017

Measurement of the Height of Nanorelief Elements by the Method of Three-Dimensional Reconstruction in a Scanning Electron Microscope

verfasst von: S. A. Darznek, D. A. Karabanov, A. Yu. Kuzin, V. B. Mityukhlyaev, P. A. Todua, M. N. Filippov

Erschienen in: Measurement Techniques | Ausgabe 3/2017

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config

KI-gestützte Suche

Aus

Abstract

Comparative measurements of the height of the nanorelief steps of the surface of a silicon wafer by methods of three-dimensional reconstruction using a scanning electron microscope and profilometry were carried out. To realize the method of three-dimensional reconstruction, an islet gold film is formed on the surface of the test sample. The AlphaStep D-600 profiler is calibrated with a KTS-4500 QS step height gauge. The coincidence of the results of measurements with the methods of three-dimensional reconstruction and profilometry is established. The possibilities of reducing the uncertainty of the measurement results by the method of three-dimensional reconstruction were analyzed.

Vorheriger Artikel Pulsed Laser Ablation for Obtaining Contrast Agents Based on Dysprosium Oxide (Dy2O3) Nanoparticles

Nächster Artikel Measurement of Angles of Polyhedral Prisms on the State Primary Standard Get 22-2014 for a Flat Angle Unit

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

Jetzt informieren

J. A. Kim, J. W. Kim, B. C. Park, and T. B. Eom, “Measurement of microscope calibration standards in nanometrology using a metrological atomic force microscope,” Meas. Sci. Technol., 17, 1792–1800 (2006).ADSCrossRef

R. Dixson, N. G. Orji, J. Fu, at al., “Traceable atomic force microscope dimensional metrology at NIST,” Proc. SPIE, 6152, 61520P-1–11 (2006).

P. Thomsen-Schmidt, K. Hasche, G. Ulm, at al., “Realisation and metrological characterization of thickness standards below 100 nm,” Appl. Phys. A, 78, 645–649 (2004).

G. Piazzesi, “Photogrammetry with the scanning electron microscope,” J. Phys. E: Sci. Instrum, 6. No. 4, 392–396 (1973).ADSCrossRef

L. Carli, G. Genta, A. Cantatore, et al., “Uncertainty evaluation for the three-dimensional scanning electron microscope based on the stereo-pair technique,” Measur. Sci. Technol., 22. No. 3, 035103-1–11 (2011).ADSCrossRef

F. Marinello, P. Bariani, E. Savio, et al., “Critical factors in SEM 3D stereo microscopy,” Measur. Sci. Technol., 19, No. 6, 065705-1–12 (2008).ADSCrossRef

P. Bariani, L. De Chiffre, H. N. Hansen, and A. Horsewell, “Investigation on the traceability of three-dimensional scanning electron microscope measurements based on the stereo-pair technique,” Precis. Eng., 29, 219–228 (2005).CrossRef

V. P. Gavrilenko, D. A. Karabanov, A. Yu. Kuzin, et al., “Three-dimensional reconstruction of the surface of relief structures by stereo images obtained in a scanning electron microscope,” Izmer. Tekhn., No. 3, 15–18 (2015).

A. Yu. Kuzin, A. L. Vasil’ev, V. B. Mityukhlyaev, at al., “Analysis of the factors influencing the error of three-dimensional reconstruction on top of the objects with submicron relief, according to the stereo images obtained in the SEM,” Izmer. Tekhn., No. 3, 20–23 (2016).

10.

A. Yu. Kuzin, A. L. Vasil’ev, D. A. Karabanov, et al., “Experimental studies of three-dimensional reconstruction of relief structures on stereo images obtained in a scanning electron microscope,” Izmer. Tekhn., No. 8, 21–24 (2016).

11.

R. V. Kirtaev, A. Yu. Kuzin, V. G. Maslov, et al., “Calibration of raster electron microscopes in a wide range of magnitudes,” Izmer. Tekhn., No. 12, 7–10 (2016).

Titel: Measurement of the Height of Nanorelief Elements by the Method of Three-Dimensional Reconstruction in a Scanning Electron Microscope
verfasst von: S. A. Darznek
D. A. Karabanov
A. Yu. Kuzin
V. B. Mityukhlyaev
P. A. Todua
M. N. Filippov
Publikationsdatum: 26.07.2017
Verlag: Springer US
Erschienen in: Measurement Techniques / Ausgabe 3/2017
Print ISSN: 0543-1972
Elektronische ISSN: 1573-8906
DOI: https://doi.org/10.1007/s11018-017-1177-4

Springer Professional

Abstract

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Weitere Artikel der Ausgabe 3/2017

Algorithm for Monitoring the State of Insulation in Voltage Measurement Transformers in the Generator Voltage Circuit of Power Plants

Measurement of Angles of Polyhedral Prisms on the State Primary Standard Get 22-2014 for a Flat Angle Unit

Multichannel Measurement System for Data Acquisition From Silicon Photomultiplier Arrays

A New Technique for Measuring the Nonlinear Distortion of Analog Multipliers

Pulsed Laser Ablation for Obtaining Contrast Agents Based on Dysprosium Oxide (Dy2O3) Nanoparticles

Upgraded Microwave Radio Thermometer Input Unit for Remote Temperature Measurement of a Biological Object