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1982 | OriginalPaper | Buchkapitel

Measurements of the Energy Distributions of Positive Secondary Ions in the Energy Range from 0 to About 500 eV

verfasst von : C. Pahlke, H. Düsterhöft, U. Müller-Jahreis

Erschienen in: Secondary Ion Mass Spectrometry SIMS III

Verlag: Springer Berlin Heidelberg

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In this paper energy distributions of singly charged ions of Bi, Sb, W, Th, Cu, Zn and Cd as well as ions of some of their oxides emitted from the pure elements are presented. The purity of the target materials was ranged from 99 % (W, Th) to 99.999 % (other elements) ; all the materials had a polycrystalline structure and were mechanically polished.

Metadaten
Titel
Measurements of the Energy Distributions of Positive Secondary Ions in the Energy Range from 0 to About 500 eV
verfasst von
C. Pahlke
H. Düsterhöft
U. Müller-Jahreis
Copyright-Jahr
1982
Verlag
Springer Berlin Heidelberg
DOI
https://doi.org/10.1007/978-3-642-88152-7_20