Skip to main content
Fachgebiete
Automobil + Motoren Bauwesen + Immobilien Business IT + Informatik Elektrotechnik + Elektronik Energie + Nachhaltigkeit Finance + Banking Management + Führung Marketing + Vertrieb Maschinenbau + Werkstoffe Versicherung + Risiko
DE
EN
Bücher
Zeitschriften
Themenseiten
Organisationspsychologie Projektmanagement Marketing Smart Manufacturing
Weitere Formate
Podcasts Webinare Technik Webinare Wirtschaft Kongresse Veranstaltungskalender Awards
Jetzt Einzelzugang starten
Zugang für Unternehmen
Referenzkunden
SLX-Digitalkonferenz: Zukunftswerkstatt 2024

Mehr Umsatz mit Top-Kontakten

Am 7. Mai erfahren Sie, wie Vertriebsteams Leadgenerierung, Leadnurturing und Leadstrategien effizient steuern können.
Erweiterte Suche
Anmelden
nach oben
Journal of Materials Engineering and Performance
Erschienen in: Journal of Materials Engineering and Performance 12/2020

13.11.2020

Mechanical and Tribological Properties and High-Speed Drilling Performance of NbTiN Coatings Prepared by High-Power Impulse Magnetron Sputtering with Varying Nitrogen and Acetylene Flux Rates

verfasst von: Y. L. Su, W. H. Kao, Y. C. Chang

Erschienen in: Journal of Materials Engineering and Performance | Ausgabe 12/2020

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

NbTiNx and NbTiN25-CHx coatings (where x indicates the nitrogen or acetylene flux rate) were deposited on SKH51 substrates by high-power impulse magnetron sputtering. The study comprised three stages. In the first stage, NbTiNx coatings with nitrogen flux rates varying from 0 to 50 sccm were deposited to determine the nitrogen flux rate which yielded the best mechanical and tribological properties. In the second stage, NbTiN25-CHx coatings with acetylene flux rates varying in the range of 5-25 sccm were prepared using the optimal nitrogen flux rate determined in the first stage in an attempt to further improve the tribological performance. In the final stage, the NbTiN25-CHx coating with the best tribological properties was deposited on micro-drills and used to perform a series of high-speed through-hole drilling tests under dry conditions using printed circuit board specimens. Among the various NbTiNx coatings, the NbTiN25 coating showed an excellent adhesive strength (Lc > 100 N) and superior tribological properties. The NbTiN25 coating was thus selected for further experimentation using various acetylene additions. The NbTiN25-CH25 coating was found to possess a sufficient carbon content (34.9 at.%) to produce a transition from a metal nitride crystalline (NbTiN25) structure to a diamond-like carbon structure with a high sp2 concentration. The coating exhibited a high hardness/elastic modulus ratio of 0.063 and an adhesive strength of Lc > 100 N. Consequently, a carbon-rich solid lubricant layer was formed at the contact interface under ball-on-disk sliding, which resulted in an excellent tribological performance. The NbTiN25-CH25 coating was thus chosen for deposition on micro-drills. The coating increased the lifetime of the micro-drill by around three times compared to that of an uncoated drill. Even after drilling 6000 holes, the holes showed an excellent quality with a low nail head ratio and surface roughness and a diameter error of less than 1.5%.
Vorheriger Artikel Cracking of Copper Brazed Steel Joints Due to Precipitation of MnS upon Cooling
Nächster Artikel Study on Electroless Plating Ni-W-P Ternary Alloy with High Tungsten from Compound Complexant Bath

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Jetzt informieren
Literatur
1.
U. Helmersson, M. Lattemann, J. Bohlmark, A.P. EhiasarianJon, and T. Gudmundsson, Ionized Physical Vapor Deposition (IPVD): A Review Of technology and Applications, Thin Solid Films, 2006, 513, p 1–24
2.
3.
M. Lattemann, A.P. Ehiasarian, J. Bohlmark, P.Å.O. Persson, and U. Helmersson, Investigation of High Power Impulse Magnetron Sputtering Pretreated Interfaces for Adhesion Enhancement of Hard Coatings on Steel, Surf. Coat. Technol., 2006, 200, p 6495–6499
4.
J. Lin, J.J. Moore, W.D. Sproul, B. Mishra, J.A. Rees, Z. Wu, R. Chistyakov, and B. Abraham, Ion Energy and Mass Distributions of The Plasma During Modulated Pulse Power Magnetron Sputtering, Surf. Coat. Technol., 2009, 203, p 3676–3685
5.
A.P. Ehiasarian and R. Wei, Fundamentals and Applications of HIPIMS, Trivandrum, Plasma Surf. Eng. Res. Its. Pract. Appl. Res. Signpost, 2008, p 35–86
6.
J.H. Huang, C.H. Lin, and G.P. Yu, Texture Evolution of Vanadium Nitride Thin Films, Thin Solid Films, 2019, 688, p 137415
7.
E. Budke, J. Krempel-Hesse, H. Maidhof, and H. Schüssler, Decorative Hard Coatings with Improved Corrosion Resistance, Surf. Coat. Technol., 1999, 12, p 108–113
8.
B.M. Howea, E. Sammanna, J.G. Wena, T. Spilaa, J.E. Greenea, L. Hultmanb, and I. Petrov, Real-Time Control of AlN Incorporation in Epitaxial Hf1 xAlxNusing High-Flux, Low-Energy (10–40 eV) Ion Bombardment During Reactive Magnetron Sputter Deposition From a Hf0.7Al0.3 Alloy Target, Acta Mater, 2011, 59, p 421–428
9.
ASM International Handbook Committee, Metallography and Microstructures 10th, ASM Handbook, 1990, p 2–4
10.
H. Zenghu, H. Xiaoping, T. Jiawan, L. Geyang, and M. Gu, Magnetron Sputtered NbN Thin Films and Mechanical Properties, Surf. Coat. Technol., 2004, 179, p 188–192
11.
V.N. Zhitomirsky, I. Grimberg, L. Rapoport, N.A. Travitzky, R.L. Boxman, S. Gold-smith et al., Structure and Mechanical Properties of Vacuum Arc-Deposited NbN Coatings, Thin Solid Films, 1998, 326, p 134–142
12.
S. Kim, B. Cha, and J. Yoo, Deposition of NbN Thin Films by DC Magnetron Sputtering Process, Surf. Coat. Technol., 2004, 177, p 434–440
13.
N. Cansever, M. Danışman, and K. Kazmanlı, The Effect of Nitrogen Pressure on Cathodic Arc Deposited NbN Thin Films, Surf. Coat. Technol., 2008, 202, p 5919–5923
14.
M. Benkahoul, E. Martinez, A. Karimi, R. Sanjinés, and F. Lévy, Structural and Mechanical Properties of Sputtered Cubic and Hexagonal NbNx Thin Films, Surf. Coat. Technol., 2004, 180, p 178–183
15.
M. Wen, C.Q. Hu, Q.N. Meng, Z.D. Zhao, T. An, Y.D. Su, W.X. Yu, and W.T. Zheng, Effects of Nitrogen Flow Rate on The Preferred Orientation and Phase Transition for Niobium Nitride Films Grown by Direct Current Reactive Magnetron Sputtering, J. Phys. D. Appl. Phys., 2009, 42, p 035304
16.
Y.G. Li, H. Yuan, Z.T. Jiang, N. Pan, and M.K. Lei, Phase Composition and Mechanical Properties of Homostructure NbN Nanocomposite Coatings Deposited by Modulated Pulsed Power Magnetron Sputtering, Surface & Coatings Technology, 2020, 385, p 125387
17.
V. Zhitomirsky, Structure and Properties of Cathodic Vacuum Arc Deposited NbN and NbN-based Multi-Component and Multi-Layer Coatings, Surf. Coat. Technol., 2007, 201, p 6122–6130
18.
R. Franz, M. Lechthaler, C. Polzer, and C. Mitterer, Structure, Mechanical Properties and Oxidation Behaviour of Arc-Evaporated NbAlN Hard Coatings, Surf. Coat. Technol., 2010, 204, p 2447–2453
19.
Z. Yan, D. Jiang, X. Gao, M. Hu, D. Wang, Y. Fu, J. Sun, D. Feng, and L. Weng, Friction and Wear Behavior of TiN Films Against Ceramic and Steel Balls, Tribology International, 2018, 124, p 61–69
20.
J.M. González-Carmona, J.D. Triviño, Á. Gómez-Ovalle, C. Ortega, J.M. Alvarado-Orozco, H. Sánchez-Sthepa, and A. Avila, Wear Mechanisms Identification Using Kelvin Probe Force Microscopy in TiN, ZrN and TiN/ZrN Hard Ceramic Multilayers Coatings, Ceramics International, 2020, 46, p 24592–24604
21.
K. Holmberg, H. Ronkainen, and A. Laukkanenl, A Model for Stresses, Crack Generation and Fracture Toughness Calculation in Scratched TiN-Coated Steel Surfaces, Wear, 2003, 254, p 278–291
22.
X. Pang, H. Yang, K.W. Gao, Y. Wang, and A.A. Volinsky, AlTiN Layer Effect on Mechanical Properties of Ti-Doped Diamond-Like Carbon Composite Coatings, Thin Solid Films, 2011, 519, p 5353–5357
23.
R. Machunze and G.C.A.M. Janssen, Stress and Strain in Titanium Nitride Thin Films, Thin Solid Films, 2009, 517, p 5888–5893
24.
J. Westlinder, T. Schram, L. Pantisano, E. Cartier, A. Kerber, G.S. Lujan, J. Olsson, and G. Groeseneken, On the Thermal Stability of Atomic Layer Deposited TiN as Gate Electrode in MOS Devices, IEEE Electron Device Lett., 2003, 24, p 550–552
25.
N. Mustapha and R. Howson, Optical TiN Films by Filtered Arc Evaporation, Surf. Coat. Technol., 1997, 92, p 29–33
26.
K. Lal, A.K. Meikap, S.K. Chattopadhyay, S.K. Chatterjee, M. Ghosh, K. Baba, and R. Hatada, Electrical Resistivity of Titanium Nitride Thin Films Prepared by Ion Beam-Assisted Deposition, Phys. B, 2001, 307, p 150–157
27.
Y.L. Jeyachandran, S.K. Narayandass, D. Mangalaraj, S. Areva, and J.A. Mielczarski, Properties of Titanium Nitride Films Prepared by Direct Current Magnetron Sputtering, Mater. Sci. Eng. A, 2007, 445, p 223–236
28.
J.R. Roos, J.P. Celis, E. Vancoille, H. Veltrop, S. Boelens, and F. Jungblut, Interrelationship Between Processing, Coating Properties and Functional Properties of Steered Arc Physically Vapor Deposited (Ti, A1)N and (Ti, Nb)N Coatings, Thin Solid Films, 1990, 193–194, p 547–556
29.
K. Vasu, M.G. Krishna, and K.A. Padmanabhan, Effect of Nb Concentration on The Structure, Mechanical Optical, and Electrical Properties of Nano-Crystalline Ti1-xNbxN Thin Films, Mater. Sci., 2012, 47, p 3522–3528
30.
N.N. Iosad, B.D. Jackson, F. Ferro, J.R. Gao, S.N. Polyakov, P.N. Dmitriev, and T.M. Klapwijk, Source Optimization for Magnetron Sputter Deposition of NbTiN Tuning Elements for SIS THz Detectors, Supercond. Sci. Technol., 1999, 12, p 736–740
31.
A.P. Serro, C. Completo, R. Colaço, F. dos Santos, C. Lobato da Silva, J.M.S. Cabral, H. Araújo, E. Pires, and B. Saramago, A Comparative Study of Titanium Nitrides, TiN, TiNbN and TiCN, as Coatings for Biomedical Applications, Surf. Coat. Technol., 2009, 203, p 3701–3707
32.
S.C. Liao, C.Y. Chen, Y.H. Hsu, C.T. Li, C.C. Hsieh, M.S. Tsai, M.Y. Chan, C.H. Lee, S.H. Wang, S.K. Ng, H.K. Tsou, and W.Y. Wu, In Vitro and In Vivo Biocompatibility Study of Surface Modified TiN Deposited on Ti6Al4V Using High-Power Impulse Magnetron Sputtering Technique, Surface & Coatings Technology, 2020, 394, p 125814
33.
M.L.S. Arockiasamy, M. Sundarewari, and M. Rajagopalan, Ductility Behaviour of Cubic Titanium Niobium Nitride Ternary Alloy: a First Principles Study, Indian J. Phys., 2016, 90, p 149–154
34.
M.P. Gispert, A.P. Serro, R. Colaco, E. Pires, and B. Saramago, Wear of Ceramic Coated Metal-on-Metal Bearings Used for Hip Replacement, Wear, 2007, 263, p 1060–1065
35.
F. Zhou, K. Adachi, and K. Kato, Sliding Friction and Wear Property of a-C and a-CNx Coatings Against SiC Balls in Water, Thin Solid Films, 2006, 514, p 231–239
36.
K.H. Lee, R. Ohta, H. Sugimura, Y. Inoue, O. Takaia, and H. Sugimur, Amorphous Carbon and Carbon Nitride Multilayered Films Prepared by Shielded Arc Ion Plating, Thin Solid Films, 2005, 475, p 308–312
37.
J. Guo, J. Zhang, C. Zhao, J. Zhang, and Z. Zhang, Influence of Temperature on Structure as Well as Adhesion and Friction and Wear Behavior of Hydrogenated Carbon Nitride Films Prepared on Silicon Substrate, Appl. Surf. Sci., 2011, 258, p 791–799
38.
C. Duan, D. Yuan, Z. Yang, S. Li, L. Tao, Q. Wang, and T. Wang, High Wear-Resistant Performance of Thermosetting Polyimide Reinforced by Graphitic Carbon Nitride (g-C3N4) under High Temperature, Composites Part A, 2018, 113, p 200–208
39.
A. Erdemir, I.B. Nilufer, O.L. Eryilmaz, M. Beschliesser, and G.R. Fenske, Friction and Wear Performance of Diamond-Like Carbon Films Grown in Various Source Gas Plasmas, Surf. Coat. Technol., 1999, 120–121, p 589–593
40.
Y.L. Su, W.H. Kao, and Y.H. Mao, Mechanical and Tribological Properties of NbTi–NX and NbTi–N12–CH Coatings Prepared Using Radio Frequency Magnetron Sputtering and Their Application for Micro-Drills, J. Mater. Eng. Perform., 2020, 29, p 259–277
41.
M. Huanga, X. Zhanga, P. Ke, and A. Wang, Graphite-Like Carbon Films by High Power Impulse Magnetron Sputtering, Applied Surface Science, 2013, 283, p 321–326
42.
Q. Luo, S. Yang, and K.E. Cooke, Hybrid HIPIMS and DC Magnetron Sputtering Deposition of TiN Coatings: Deposition Rate, Structure and Tribological Properties, Surface & Coatings Technology, 2013, 236, p 13–21
43.
L.D. Giudice, S. Adjam, D.L. Grange, O. Banakh, A. Karimi, and R. Sanjinés, NbTiN Thin Films Deposited by Hybrid HiPIMS/DC Magnetron Co-Sputtering, Surf. Coat. Technol., 2016, 295, p 99–106
44.
P.-K. Huang and J.-W. Yeh, Effects of Nitrogen Content on Structure and Mechanical Properties of Multi-element(AlCrNbSiTiV)N Coating, Surf. Coat. Technol., 2009, 203, p 1891–1896
45.
J. Robertson, Diamond-like Amorphous Carbon, Mater. Sci. Eng. R., 2002, 37, p 129–281
46.
C. Guo, S. Lin, D. Gao, Q. Shi, C. Wei, M. Dai, Y. Su, W. Xu, P. Tang, H. Li, W. Wang, and X. Zhu, Tuning C-C sp2/sp3 Ratio of DLC Films in FCVA System for Biomedical Application, Bioact. Mater., 2020, 5, p 192–200
47.
L. Qiang, S. Yu, G. Liu, H. Tangc, X. Zhanga, and J. Zhang, Comparative Study on The Influence of Bias on The Properties of Si-DLC Film With and Without Si Interlayer on NBR: The Role of Si Interlayer, Diam Relat Mater., 2020, 101, p 107614
48.
C. Guo, S. Lin, D. Gao, Q. Shi, C. Wei, M. Dai, Y. Su, W. Xu, P. Tang, H. Li, W. Wang, and X. Zhu, Modulation of Si on Microstructure and Tribo-Mechanical Properties of Hydrogen-Free DLC Films Prepared by Magnetron Sputtering, Appl. Surf. Sci., 2020, 509, p 145381
49.
W. Xu, K. Zhoua, S. Lin, M. Dai, Q. Shi, and C. Wei, Structural Properties of Hydrogenated Al-Doped Diamond-Like Carbon Films Fabricated by a Hybrid Plasma System, Diamond & Related Materials, 2018, 87, p 177–185
50.
W. Dai, J. Liu, D. Geng, P. Guo, J. Zheng, and Q. Wang, Microstructure and Property of Diamond-Like Carbon Films with Al and Cr Co-doping Deposited Using a Hybrid beams System, Applied Surface Science, 2016, 388, p 503–509
51.
L.R. Shepparda, H. Zhang, R. Liu, S. Macartney, T. Murphy, P. Wainer, and R. Wuhrer, Reactive Sputtered TixN by N Coatings. II. Effect of Common Deposition Parameters, Mater. Chem. Phys., 2019, 224, p 320–327
52.
Y.L. Su, W.H. Kao, and Y.C. Chang, The Effect of CN Coatings Doped with Niobium, Titanium and Zirconium Metal on Mechanical, Tribological and Corrosion Resistance Properties of Thin Films, Key Eng. Mater., 2019, 823, p 81–90
53.
H. Ju, N. Ding, J. Xu, L. Yu, Y. Geng, G. Yi, and T. Wei, Improvement of Tibological Poperties of Nobium Ntride Flms via Cpper Adition, Vacuum, 2018, 58, p 1–5
54.
J.R. Roos, J.P. Celis, and E. Vancoille, Interrelationship Between Processing, Coating Properties and Functional Properties of Steered Arc Physically Vapour Deposited (Ti, A1)N and (Ti, Nb)N Coatings, Thin Solid Film, 1990, 193, p 547–556
55.
W.H. Kao, High-Speed Drilling Performance of Coated Micro-Drills with Zr–C:H:Nx% Coatings, Wear, 2009, 267, p 1068–1074
Metadaten
Titel
Mechanical and Tribological Properties and High-Speed Drilling Performance of NbTiN Coatings Prepared by High-Power Impulse Magnetron Sputtering with Varying Nitrogen and Acetylene Flux Rates
verfasst von
Y. L. Su
W. H. Kao
Y. C. Chang
Publikationsdatum
13.11.2020
Verlag
Springer US
Erschienen in
Journal of Materials Engineering and Performance / Ausgabe 12/2020
Print ISSN: 1059-9495
Elektronische ISSN: 1544-1024
DOI
https://doi.org/10.1007/s11665-020-05305-8

Weitere Artikel der Ausgabe 12/2020

Journal of Materials Engineering and Performance 12/2020 Zur Ausgabe

OriginalPaper

Autogenous Tungsten Inert Gas Welding of 430 Ferritic Stainless Steel: The Effect of Inter-pass Temperature on Microstructure Evolution and Mechanical Properties

OriginalPaper

Investigations into Hot Form Quench Conditions on Microstructure Evolution and Bake-Hardening Response for High-Strength Aluminum Alloy

OriginalPaper

Comparison of Very High Cycle Fatigue Properties of 18CrNiMo7-6 Steel after Carburizing and Pseudo-carburizing

OriginalPaper

Pitting Morphologies and Characteristics of Low-Alloy Steel With and Without Plastic Deformation in Industrial and Non-industrial Marine Splash Zones

OriginalPaper

Investigation of Viton O-Ring Performance for the SABRE Dark Matter Experiment

OriginalPaper

Finite Element Analysis of Thermal-Induced Stresses in Submerged Arc Welded Chromium-Molybdenum Steel and Their Mitigation through Heat Treatment

Premium Partner

    Marktübersichten

    Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen. 

    Zur Marktübersicht
    Bildnachweise