nach oben

Microsystem Technologies

Erschienen in:

12.08.2022 | Review Paper

MEMS-based energy scavengers: journey and future

verfasst von: Kamlesh Kahar, Manish Bhaiyya, Ram Dhekekar, Gopal Gawande, Suresh Balpande, Sanket Goel

Erschienen in: Microsystem Technologies | Ausgabe 9/2022

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config

KI-gestützte Suche

Aus

Abstract

Macro to nanoscale energy scavengers is emerging as a promising solution to tackle the problems of energy shortage caused due to increasing world population and limited availability of energy resources. The capability of the miniaturized scavengers to harvest ambient energy like vibrations, mechanical motions, and body motions makes them an efficient alternative to clean energy solutions. This paper reviews the works done in the field of piezoelectric and triboelectric energy scavengers, the authors briefly described different types of scavengers, recent state-of-the-art designs, operating modes, performance comparisons, and future scope considering critical evaluation which can help the researchers to decide their work approach in the field of energy scavenging. The authors also speculate on how future advances in 3D printing technology and textile base energy scavenging could aid in the creation of wearable electronics. Energy scavengers will surely replace many energy sources in the coming future and will be proven to be a trailblazing method in the field of environment-friendly energy generation.

Nächster Artikel Analysis of selective bonding processes using reactive multi-layers for system integration on LTCC based SiPs

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Ahmed A, Hassan I, Helal AS, Sencadas V, Radhi A, Jeong CK, ElKady MF (2020) Triboelectric nanogenerator versus piezoelectric generator at low frequency (<4 Hz): a quantitative comparison. iScience 23(7):101286. https://doi.org/10.1016/j.isci.2020.101286CrossRef

Alameh AH, Gratuze M, Elsayed MY, Nabki F (2018) Effects of proof mass geometry on piezoelectric vibration energy harvesters. Sensors (switzerland). https://doi.org/10.3390/s18051584CrossRef

Ali A, Pasha RA, Elahi H, Sheeraz MA, Bibi S, Hassan ZU, Eugeni M, Gaudenzi P (2019) Investigation of deformation in bimorph piezoelectric actuator: analytical, numerical and experimental approach. Integr Ferroelectr 201(1):94–109. https://doi.org/10.1080/10584587.2019.1668694CrossRef

Apodaca MM, Wesson PJ, Bishop KJM, Ratner MA, Grzybowski BA (2010) Contact electrification between identical materials. Angew Chemie - Int Ed 49(5):946–949. https://doi.org/10.1002/anie.200905281CrossRef

Babak Ziaie MZA, Baldi A (2007) Introduction to micro- and nanofabrication. In: Bhushan B (ed) Handbook of nanotechnology. Springer, pp 231–269

Balpande S, Pande RS (2016) Design and simulation of MEMS cantilever based energy harvester-power source for piping health monitoring system. In: RAECE 2015 - Conf. Proceedings, Natl. Conf. Recent Adv. Electron. Comput. Eng, pp 183–188. https://doi.org/10.1109/RAECE.2015.7509886

Balpande SS, Bhaiyya ML, Pande RS (2017) Low-cost fabrication of polymer substratebased piezoelectric microgenerator with PPE, IDE and ME. Electron Lett 53(5):341–343. https://doi.org/10.1049/el.2016.4099CrossRef

Balpande SS, Kalambe J, Pande RS (2018) Vibration energy harvester driven wearable biomedical diagnostic system. In: NEMS 2018 - 13th Annu. IEEE Int. Conf. Nano/Micro Eng Mol Syst, pp 448–451. https://doi.org/10.1109/NEMS.2018.8556864

Balpande SS, Kalambe JP, Pande RS (2019) Development of strain energy harvester as an alternative power source for the wearable biomedical diagnostic system. Micro Nano Lett 14(7):777–781. https://doi.org/10.1049/mnl.2018.5250CrossRef

Balpande SS, Pande RS, Patrikar RM (2016) Design and low cost fabrication of green vibration energy harvester. Sensors Actuators, A Phys 251:134–141. https://doi.org/10.1016/j.sna.2016.10.012CrossRef

Balpande SS, Pande RS, Patrikar RM (2021) Grains level evaluation and performance enhancement for piezoelectric energy harvester. Ferroelectrics 572(1):71–93. https://doi.org/10.1080/00150193.2020.1868874CrossRef

Bayramol DV, Soin N, Shah T, Siores E, Matsouka D, Vassiliadis S (2017) Energy harvesting smart textiles. Springer International PublishingCrossRef

Bedeloglu A, Demir A, Bozkurt Y, Sariciftci NS (2010) A photovoltaic fiber design for smart textiles. Text Res J 80(11):1065–1074. https://doi.org/10.1177/0040517509352520CrossRef

Beeby SP, Tudor MJ, White NM (2006) Energy harvesting vibration sources for microsystems applications. Meas Sci Technol. https://doi.org/10.1088/0957-0233/17/12/R01CrossRef

Betancourt T, Brannon-peppas L (2006) “Micro- and nanofabrication methods in nanotechnological medical and pharmaceutical devices. Int J Nanomed 1(4):483–495CrossRef

Bourisli RI, Al-Ajmi MA (2010) Optimization of smart beams for maximum modal electromechanical coupling using genetic algorithms. J Intell Mater Syst Struct 21(9):907–914. https://doi.org/10.1177/1045389X10370544CrossRef

Bryzek J (2014) Trillion sensors movement in support of abundance and internet of everything. Vice President, MEMS and Sensing Solutions, Fairchild Semiconductor, Santa Clara, CA

Cao W, Zhu S, Jiang B (1998) Analysis of shear modes in a piezoelectric vibrator. J Appl Phys 83(8):4415–4420. https://doi.org/10.1063/1.367233CrossRef

Chakole P, Rathee V, Kalambe J, Kulkarni P, Balpande SS (2019) Design and development of triboelectric blue energy harvester. Int J Eng Adv Technol 8(5):1278–1283

Chen B (2019) Introduction to energy harvesting transducers and their power conditioning circuits. Low-Power Analog Tech Sensors Mob Devices Energy Effic Amplifiers. https://doi.org/10.1007/978-3-319-97870-3_1CrossRef

Chen Z, Yang Y, Lu Z, Luo Y (2013) Broadband characteristics of vibration energy harvesting using one-dimensional phononic piezoelectric cantilever beams. Phys B Condens Matter 410(1):5–12. https://doi.org/10.1016/j.physb.2012.10.029CrossRef

Chen J, Huang Y, Zhang N, Zou H, Liu R, Tao C, Fan X, Wang ZL (2016) Micro-cable structured textile for simultaneously harvesting solar and mechanical energy. Nat Energy 1(10):1–8. https://doi.org/10.1038/nenergy.2016.138CrossRef

Chidambaram N, Mazzalai A, Muralt P (2012) Comparison of lead zirconate titanate (PZT) thin films for MEMS energy harvester with interdigitated and parallel plate electrodes. In: Proc. 2012 21st IEEE Int. Symp. Appl. Ferroelectr. held jointly with 11th IEEE Eur. Conf. Appl. Polar Dielectr. IEEE PFM, ISAF/ECAPD/PFM, pp 8–11, 2012. https://doi.org/10.1109/ISAF.2012.6297833

Chidambaram N, Mazzalai A, Balma D, Muralt P (2013) Comparison of lead Zirconate Titanate thin films for microelectromechanical energy harvester with interdigitated and parallel plate electrodes. IEEE Trans Ultrason Ferroelectr Freq Control 60(8):1564–1571. https://doi.org/10.1109/TUFFC.2013.2736CrossRef

Chiu Y, Wu SH (2013) Flexible electret energy harvesters with parylene electret on PDMS substrates. J Phys Conf Ser. https://doi.org/10.1088/1742-6596/476/1/012037CrossRef

Chiu Y, Lee MH, Hsu WH (2014) Flexible electret energy harvester with copper mesh electrodes. J Phys Conf Ser. https://doi.org/10.1088/1742-6596/557/1/012072CrossRef

Choi YS, Jing Q, Datta A, Boughey C, Kar-Narayan S (2017) A triboelectric generator based on self-poled Nylon-11 nanowires fabricated by gas-flow assisted template wetting. Energy Environ Sci 10(10):2180–2189. https://doi.org/10.1039/c7ee01292fCrossRef

Chun J, Ye BU, Lee JW, Choi D, Kang CY, Kim SW, Wang ZL, Baik JM (2016) Boosted output performance of triboelectric nanogenerator via electric double layer effect. Nat Commun 7(May):1–9. https://doi.org/10.1038/ncomms12985CrossRef

Covaci C, Gontean A (2020) Piezoelectric energy harvesting solutions: a review. Sensors (switzerland) 20(12):1–37. https://doi.org/10.3390/s20123512CrossRef

Davies DK (1969) Charge generation on dielectric surfaces. J Phys D Appl Phys 2(11):1533–1537. https://doi.org/10.1088/0022-3727/2/11/307CrossRef

Deng L, Fang Y, Wang D, Wen Z (2018) A MEMS based piezoelectric vibration energy harvester for fault monitoring system. Microsyst Technol 24(9):3637–3644. https://doi.org/10.1007/s00542-018-3784-7CrossRef

Deutz DB, Pascoe JA, Schelen B, Van Der Zwaag S, De Leeuw DM, Groen P (2018) Analysis and experimental validation of the figure of merit for piezoelectric energy harvesters. Mater Horizons 5(3):444–453. https://doi.org/10.1039/c8mh00097bCrossRef

Dhone MD, Gawatre PG, Balpande SS (2018) Frequency band widening technique for cantilever-based vibration energy harvesters through dynamics of fluid motion. Mater Sci Energy Technol 1(1):84–90. https://doi.org/10.1016/j.mset.2018.06.002CrossRef

Diaz AF, Guay J (1993) Contact charging of organic materials: ion vs. electron transfer. IBM J Res Dev 37(2):249–259. https://doi.org/10.1147/rd.372.0249CrossRef

Dong K, Deng J, Zi Y, Wang YC, Xu C, Zou H, Ding W, Dai Y, Gu B, Sun B, Wang ZL (2017) 3D Orthogonal woven triboelectric nanogenerator for effective biomechanical energy harvesting and as self-powered active motion sensors. Adv Mater 29(38):1–11. https://doi.org/10.1002/adma.201702648CrossRef

Dong L, Han X, Xu Z, Closson AB, Liu Y, Wen C, Liu X, Escobar GP, Oglesby M, Feldman M, Chen Z, Zhang JXJ (2019) Flexible porous piezoelectric cantilever on a pacemaker lead for compact energy harvesting. Adv Mater Technol 4(1):1–9. https://doi.org/10.1002/admt.201800148CrossRef

Elahi H, Munir K, Eugeni M, Atek S, Gaudenzi P (2020) Energy harvesting towards self-powered IoT devices. Energies 13(21):1–31. https://doi.org/10.3390/en13215528CrossRef

Esashi M, Takinami M, Wakabayashi Y, Minami K (1995) High-rate directional deep dry etching for bulk silicon micromachining. J Micromech Microeng 5(1):5–10. https://doi.org/10.1088/0960-1317/5/1/002CrossRef

Faisal A, Annus P, Le Moullec Y (2015) Energy harvesting technologies: potential application to wearable health-monitoring. Isbem 2015

Feenstra J, Granstrom J, Sodano H (2008) Energy harvesting through a backpack employing a mechanically amplified piezoelectric stack. Mech Syst Signal Process 22(3):721–734. https://doi.org/10.1016/j.ymssp.2007.09.015CrossRef

Ghaffarinejad A, Hasani JY, Hinchet R, Lu Y, Zhang H, Karami A, Galayko D, Kim SW, Basset P (2018) A conditioning circuit with exponential enhancement of output energy for triboelectric nanogenerator. Nano Energy 51:173–184. https://doi.org/10.1016/j.nanoen.2018.06.034CrossRef

Ghomian T, Mehraeen S (2019) Survey of energy scavenging for wearable and implantable devices. Energy 178:33–49. https://doi.org/10.1016/j.energy.2019.04.088CrossRef

Gosavi SK, Balpande SS (2019) A comprehensive review of micro and nano scale piezoelectric energy harvesters. Sens Lett 17(3):180–195. https://doi.org/10.1166/sl.2019.4081CrossRef

Gowthaman S, Chidambaram GS, Rao DBG, Subramya HV, Chandrasekhar U (2016) A review on energy harvesting using 3D printed fabrics for wearable electronics. J Inst Eng Ser C 99(4):435–447. https://doi.org/10.1007/s40032-016-0267-4CrossRef

Guo Y (2010) Selected topics in micro/nano-robotics for biomedical applications. Sel Top Micro/nano-Robotics Biomed Appl 9781441984:1–193. https://doi.org/10.1007/978-1-4419-8411-1CrossRef

Hadimani RL, Bayramol DV, Sion N, Shah T, Qian L (2013) Continuous production of piezoelectric PVDF fibre for e-textile applications. Smart Mater Struct. https://doi.org/10.1088/0964-1726/22/7/075017CrossRef

Han Y, Cao Y, Zhao J, Yin Y, Ye L, Wang X, You Z (2016) A self-powered insole for humanmotion recognition. Sensors (switzerland) 16(9):1–12. https://doi.org/10.3390/s16091502CrossRef

He C, Wang ZL (2018) Triboelectric nanogenerator as a new technology for effective PM2.5 removing with zero ozone emission. Prog Nat Sci Mater Int 28(2):99–112. https://doi.org/10.1016/j.pnsc.2018.01.017CrossRef

Henniker J (1962) Triboelectricity in polymers. Nature 196:474CrossRef

Hong D, Choi YM, Jang Y, Jeong J (2018) A multilayer thin-film screen-printed triboelectric nanogenerator. Int J Energy Res 42(11):1–8. https://doi.org/10.1002/er.4092CrossRef

Howells CA (2009) Piezoelectric energy harvesting. Energy Convers Manag 50(7):1847–1850. https://doi.org/10.1016/j.enconman.2009.02.020CrossRef

Iannacci J (2019) Microsystem based Energy Harvesting (EH-MEMS): powering pervasivity of the Internet of Things (IoT) – a review with focus on mechanical vibrations. J King Saud Univ - Sci 31(1):66–74. https://doi.org/10.1016/j.jksus.2017.05.019CrossRef

Jagtap SN, Paily R (2011) Geometry optimization of a MEMS-based energy harvesting device. In: TechSym 2011 - Proc. 2011 IEEE Students’ Technol. Symp, pp 265–269, 2011, https://doi.org/10.1109/TECHSYM.2011.5783827

Jenkins K, Nguyen V, Zhu R, Yang R (2015) Piezotronic effect: An emerging mechanism for sensing applications. Sensors (switzerland) 15(9):22914–22940. https://doi.org/10.3390/s150922914CrossRef

Judy JW (2001) Microelectromechanical systems (MEMS): fabrication, design and applications. Smart Mater Struct 10(6):1115–1134. https://doi.org/10.1088/0964-1726/10/6/301CrossRef

Kanno I (2015) Piezoelectric MEMS for energy harvesting. J Phys Conf Ser. https://doi.org/10.1088/1742-6596/660/1/012001CrossRef

Kawa B, Śliwa K, Lee VCh, Shi Q, Walczak R (2020) Inkjet 3D printed MEMS vibrational electromagnetic energy harvester. Energies 13(11):1–10. https://doi.org/10.3390/s20071849CrossRef

Khan U, Hinchet R, Ryu H, Kim SW (2017) Research Update: Nanogenerators for self-powered autonomous wireless sensors. APL Mater. https://doi.org/10.1063/1.4979954CrossRef

Kim DW, Kim SW, Jeong U (2018) Lipids: source of static electricity of regenerative natural substances and nondestructive energy harvesting. Adv Mater 30(52):1–6. https://doi.org/10.1002/adma.201804949CrossRef

Kim DW, Lee JH, Kim JK, Jeong U (2020) Material aspects of triboelectric energy generation and sensors. NPG Asia Mater. https://doi.org/10.1038/s41427-019-0176-0CrossRef

Kim MP, Um DS, Shin YE, Ko H (2021) High-performance triboelectric devices via dielectric polarization: a review. Nanoscale Res Lett 16(1):1–14. https://doi.org/10.1186/s11671-021-03492-4CrossRef

Kumar S, Katoria D, Sehgal D (2013) Environment impact assessment of thermal power plant for sustainable development. Int J Environ Eng Manag 4(6):567–572

Lee S, Ko W, Oh Y, Lee J, Baek G, Lee Y, Sohn J, Cha S, Kim J, Park J, Hong J (2015) Triboelectric energy harvester based on wearable textile platforms employing various surface morphologies. Nano Energy 12:410–418. https://doi.org/10.1016/j.nanoen.2015.01.009CrossRef

Lee JW, Cho HJ, Chun J, Kim KN, Kim S, Ahn CW, Kim IW, Kim JY, Kim SW, Yang C, Baik JM (2017) Robust nanogenerators based on graft copolymers via control of dielectrics for remarkable output power enhancement. Sci Adv 3(5):1–10. https://doi.org/10.1126/sciadv.1602902CrossRef

Li H, Tian C, Deng ZD (2014) Energy harvesting from low frequency applications using piezoelectric materials. Appl Phys Rev 1(4):20. https://doi.org/10.1063/1.4900845CrossRef

Li C, Cao R, Zhang X (2018) Breathable materials for triboelectric effect-based wearable electronics. Appl Sci. https://doi.org/10.3390/app8122485CrossRef

Lin L, Xie Y, Wang S, Wu W, Niu S, Wen X, Wang ZL (2013) Triboelectric active sensor array for self-powered static and dynamic pressure detection and tactile imaging. ACS Nano 7(9):8266–8274. https://doi.org/10.1021/nn4037514CrossRef

Lin Z, Chen J, Yang J (2016) Recent progress in triboelectric nanogenerators as a renewable and sustainable power source. J Nanomater. https://doi.org/10.1155/2016/5651613CrossRef

Liu JQ, Bin Fang H, Xu ZY, Mao XH, Shen XC, Chen D, Liao H, Cai BC (2008) A MEMS-based piezoelectric power generator array for vibration energy harvesting. Microelectronics J 39(5):802–806CrossRef

Liu P, Gao Z, Xu L, Shi X, Fu X, Li K, Zhang B, Sun X, Peng H (2018) Polymer solar cell textiles with interlaced cathode and anode fibers. J Mater Chem A 6(41):19947–19953. https://doi.org/10.1039/c8ta06510aCrossRef

Liu J, Gu L, Cui N, Xu Q, Qin Y, Yang R (2019) Fabric-based triboelectric nanogenerators. Research 2019:1–13. https://doi.org/10.34133/2019/1091632CrossRef

Lu F, Lee HP, Lim SP (2004) Modeling and analysis of micro piezoelectric power generators for micro-electromechanical-systems applications. Smart Mater Struct 13(1):57–63. https://doi.org/10.1088/0964-1726/13/1/007CrossRef

Lu S, Lei W, Gao L, Chen X, Tong D, Yuan P, Mu X, Yu H (2021) Regulating the high-voltage and high-impedance characteristics of triboelectric nanogenerator toward practical self-powered sensors. Nano Energy 87:106137. https://doi.org/10.1016/j.nanoen.2021.106137CrossRef

Lussenburg K, Van Der Velden N, Doubrovski Z, Geraedts J, Karana E (2014) Designing with 3D Printed Textiles. In: 5th International Conference on Additive Technologies, pp 74–81

Mo C, Arnold D, Kinsel WC, Clark WW (2013) Modeling and experimental validation of unimorph piezoelectric cymbal design in energy harvesting. J Intell Mater Syst Struct 24(7):828–836. https://doi.org/10.1177/1045389X12463459CrossRef

Muhammad F, Waleed Raza M, Khan S, Ahmed A (2017) Low efficiency of the photovoltaic cells: causes and impacts. Int J Sci Eng Res 8(11):1201–1207

Nechibvute A, Chawanda A, Luhanga P (2012) Piezoelectric energy harvesting devices: an alternative energy source for wireless sensors. Smart Mater Res 2012:1–13. https://doi.org/10.1155/2012/853481CrossRef

Nguyen CH, Hanke U, Halvorsen E (2018) Actuation of Piezoelectric Layered Beams with d31 and d33 Coupling. IEEE Trans Ultrason Ferroelectr Freq Control 65(5):815–827. https://doi.org/10.1109/TUFFC.2018.2808239CrossRef

Nilsson E, Mateu L, Spies P, Hagström B (2014) Energy harvesting from piezoelectric textile fibers. Procedia Eng 87:1569–1572. https://doi.org/10.1016/j.proeng.2014.11.600CrossRef

Nisanth A, Suja KJ, Seena V (2020) Design and optimization of MEMS piezoelectric energy harvester for low frequency applications. Microsyst Technol. https://doi.org/10.1007/s00542-020-04944-0CrossRef

Nisanth A, Suja KJ, Seena V (2021) Design and optimization of MEMS piezoelectric energy harvester for low frequency applications. Microsyst Technol 27(1):251–261. https://doi.org/10.1007/s00542-020-04944-0CrossRef

Niu S, Liu Y, Wang S, Lin L, Zhou YS, Hu Y, Wang ZL (2013) Theory of sliding-mode triboelectric nanogenerators. Adv Mater 25(43):6184–6193. https://doi.org/10.1002/adma.201302808CrossRef

Niu S, Wang X, Yi F, Zhou YS, Wang ZL (2015) A universal self-charging system driven by random biomechanical energy for sustainable operation of mobile electronics. Nat Commun. https://doi.org/10.1038/ncomms9975CrossRef

Palosaari J, Leinonen M, Juuti J, Jantunen H (2018) The effects of substrate layer thickness on piezoelectric vibration energy harvesting with a bimorph type cantilever. Mech Syst Signal Process 106:114–118. https://doi.org/10.1016/j.ymssp.2017.12.029CrossRef

Pan C, Guo W, Dong L, Zhu G, Wang ZL (2012) Optical fiber-based core-shell coaxially structured hybrid cells for self-powered nanosystems. Adv Mater 24(25):3356–3361. https://doi.org/10.1002/adma.201201315CrossRef

Pan M, Yuan C, Liang X, Zou J, Zhang Y, Bowen C (2020) Triboelectric and piezoelectric nanogenerators for future soft robots and machines. iScience 23(11):101682. https://doi.org/10.1016/j.isci.2020.101682CrossRef

Peng H, Wen DL, Yu Q, Yang M-H, Cheng T, Zhang XS (2021) Textile-based triboelectric nanogenerators for wearable. Micromachines 12(158):1–21

Priya S (2007) Advances in energy harvesting using low profile piezoelectric transducers. J Electroceramics 19(1):165–182. https://doi.org/10.1007/s10832-007-9043-4MathSciNetCrossRef

Pu X, Li L, Liu M, Jiang C, Du C, Zhao Z, Hu W, Wang ZL (2016) Wearable self-charging power textile based on flexible yarn supercapacitors and fabric nanogenerators. Adv Mater 28(1):98–105. https://doi.org/10.1002/adma.201504403CrossRef

Rodrigues C, Gomes A, Ghosh A, Pereira A, Ventura J (2019) Power-generating footwear based on a triboelectric-electromagnetic-piezoelectric hybrid nanogenerator. Nano Energy 62:660–666. https://doi.org/10.1016/j.nanoen.2019.05.063CrossRef

Romero E (2013) Enabling technologies. Powering Biomed Devices 2005:31–46. https://doi.org/10.1016/b978-0-12-407783-6.00003-5CrossRef

Roscow JI, Lewis RWC, Taylor J, Bowen CR (2017) Modelling and fabrication of porous sandwich layer barium titanate with improved piezoelectric energy harvesting figures of merit. Acta Mater 128:207–217. https://doi.org/10.1016/j.actamat.2017.02.029CrossRef

Roscow JI, Pearce H, Khanbareh H, Kar-Narayan S, Bowen CR (2019) Modified energy harvesting figures of merit for stress- and strain-driven piezoelectric systems. Eur Phys J Spec Top 228(7):1537–1554. https://doi.org/10.1140/epjst/e2019-800143-7CrossRef

Roundy S, Wright PK, Rabaey J (2003) A study of low level vibrations as a power source for wireless sensor nodes. Comput Commun 26(11):1131–1144. https://doi.org/10.1016/S0140-3664(02)00248-7CrossRef

Ryu H, Lee JH, Kim TY, Khan U, Lee JH, Kwak SS, Yoon HJ, Kim SW (2017) High-performance triboelectric nanogenerators based on solid polymer electrolytes with asymmetric pairing of ions. Adv Energy Mater 7(17):1–6. https://doi.org/10.1002/aenm.201700289CrossRef

Saadon S, Sidek O (2015) Micro-electro-mechanical system (MEMS)-based piezoelectric energy harvester for ambient vibrations. Procedia - Soc Behav Sci 195:2353–2362. https://doi.org/10.1016/j.sbspro.2015.06.198CrossRef

Safaei M, Sodano HA, Anton SR (2019) A review of energy harvesting using piezoelectric materials: state-of-the-art a decade later (2008–2018). Smart Mater Struct. https://doi.org/10.1088/1361-665X/ab36e4CrossRef

Sakaguchi M, Makino M, Ohura T, Iwata T (2014) Contact electrification of polymers due to electron transfer among mechano anions, mechano cations and mechano radicals. J Electrostat 72(5):412–416. https://doi.org/10.1016/j.elstat.2014.06.006CrossRef

Satharasinghe A, Hughes-Riley T, Dias T (2020) A review of solar energy harvesting electronic textiles. Sensors (switzerland) 20(20):1–39. https://doi.org/10.3390/s20205938CrossRef

Seol M, Kim S, Cho Y, Byun KE, Kim H, Kim J, Kim SK, Kim SW, Shin HJ, Park S (2018a) Triboelectric Series of 2D Layered Materials. Adv Mater 30(39):1–8. https://doi.org/10.1002/adma.201801210CrossRef

Seol ML, Ivaškevičiūtė R, Ciappesoni MA, Thompson FV, Il Moon D, Kim SJ, Kim SJ, Han JW, Meyyappan M (2018b) All 3D printed energy harvester for autonomous and sustainable resource utilization. Nano Energy 52:271–278CrossRef

Seung W, Gupta MK, Lee KY, Shin K, Lee J, Kim TY, Kim S, Lin J, Kim JH, Kim S (2015) Nanopatterned textile-based. ACS Nano 9(4):1–9CrossRef

Shaikh FK, Zeadally S (2016) Energy harvesting in wireless sensor networks: a comprehensive review. Renew Sustain Energy Rev 55:1041–1054. https://doi.org/10.1016/j.rser.2015.11.010CrossRef

Shi B, Liu Z, Zheng Q, Meng J, Ouyang H, Zou Y, Jiang D, Qu X, Yu M, Zhao L, Fan Y, Wang ZL, Li Z (2019) Body-integrated self-powered system for wearable and implantable applications. ACS Nano 13(5):6017–6024. https://doi.org/10.1021/acsnano.9b02233CrossRef

Singh SK, Kumar P, Magdum R, Khandelwal U, Deswal S, More Y, Muduli S, Boomishankar R, Pandit S, Ogale S (2019) Seed power: natural seed and electrospun Poly(vinyl difluoride) (PVDF) nanofiber based triboelectric nanogenerators with high output power density. ACS Appl Bio Mater 2(8):3164–3170. https://doi.org/10.1021/acsabm.9b00348CrossRef

Singh R, Pant BD, Jain A (2020) Simulations, fabrication, and characterization of d 31 mode piezoelectric vibration energy harvester. Microsyst Technol 26(5):1499–1505. https://doi.org/10.1007/s00542-019-04684-wCrossRef

Slabov V, Kopyl S, Soares MP (2020) Natural and eco - friendly materials for triboelectric energy harvesting. Nano-Micro Lett 12(1):1–18. https://doi.org/10.1007/s40820-020-0373-yCrossRef

Soin N, Shah TH, Anand SC, Geng J, Pornwannachai W, Mandal P, Reid D, Sharma S, Hadimani RL, Bayramol DV, Siores E (2014) Novel ‘3-D spacer’ all fibre piezoelectric textiles for energy harvesting applications. Energy Environ Sci 7(5):1670–1679. https://doi.org/10.1039/c3ee43987aCrossRef

Soin N, Anand SC, Shah TH (2016) Energy harvesting and storage textiles, 2nd edn. Elsevier Ltd.

Song JH, Kim YT, Cho S, Song WJ, Moon S, Park CG, Park S, Myoung JM, Jeong U (2017) Surface-embedded stretchable electrodes by direct printing and their uses to fabricate ultrathin vibration sensors and circuits for 3D structures. Adv Mater 29(43):1–7. https://doi.org/10.1002/adma.201702625CrossRef

Starner TE, Paradiso JA (2004) Human-generated power for mobile electronics, no. July 2014

Steffel C (2021) 3D printed piezoelectric materials line up for medical applications. IOP publishing. https://physicsworld.com/a/3d-printed-piezoelectric-materials-line-up-for-medical-applications/. Accessed 12 Sep 2021

Thainiramit P, Yingyong P, Isarakorn D (2020) Impact-driven energy harvesting: piezoelectric versus triboelectric energy harvesters. Sensors (switzerland) 20(20):1–20. https://doi.org/10.3390/s20205828CrossRef

Torah R, Lawrie-Ashton J, Li Y, Arumugam S, Sodano HA, Beeby S (2018) Energy-harvesting materials for smart fabrics and textiles. MRS Bull 43(3):214–219. https://doi.org/10.1557/mrs.2018.9CrossRef

Toshiyoshi H, Ju S, Honma H, Ji CH, Fujita H (2019) MEMS vibrational energy harvesters. Sci Technol Adv Mater 20(1):124–143. https://doi.org/10.1080/14686996.2019.1569828CrossRef

Toyabur RM, Kim JW, Park JY (2018) A hybrid piezoelectric and electromagnetic energy harvester for scavenging low frequency ambient vibrations. J Phys Conf Ser. https://doi.org/10.1088/1742-6596/1052/1/012051CrossRef

“Triboelectric effect.” https://www.sciencedaily.com/terms/triboelectric_effect.htm

Vivekananthan V, Chandrasekhar A, Alluri NR, Purusothaman Y, Khandelwal G, Kim S (2019) Triboelectric nanogenerators: design, fabrication, energy harvesting, and portable- wearable applications. Nanogenerators. Intech, pp 1–18

Walden S (2021) The ‘Indoor Generation’ and the health risks of spending more time inside. VELUX. https://www.usatoday.com/story/sponsor-story/velux/2018/05/15/indoor-generation-and-health-risks-spending-more-time-inside/610289002/. Accessed 12 Sep 2021

Wang ZL (2017) On Maxwell’s displacement current for energy and sensors: the origin of nanogenerators. Mater Today 20(2):74–82. https://doi.org/10.1016/j.mattod.2016.12.001CrossRef

Wang S, Lin L, Wang ZL (2012) Nanoscale triboelectric-effect-enabled energy conversion for sustainably powering portable electronics. Nano Lett 12(12):6339–6346. https://doi.org/10.1021/nl303573dCrossRef

Wang ZL, Lin L, Chen J, Niu S, Zi Y (2016) Triboelectric nanogenerator: single-electrode mode. Springer International Publishing, pp 91–107CrossRef

Wei C, Jing X (2017) A comprehensive review on vibration energy harvesting: modelling and realization. Renew Sustain Energy Rev 74(2016):1–18. https://doi.org/10.1016/j.rser.2017.01.073MathSciNetCrossRef

Xiong J, Lee PS (2019) Progress on wearable triboelectric nanogenerators in shapes of fiber, yarn, and textile. Sci Technol Adv Mater 20(1):837–857. https://doi.org/10.1080/14686996.2019.1650396CrossRef

Xu R, Kim SG (2012) Figures of merits of piezoelectric materials in energy. PowerMEMS, no. October, pp 464–467

Yang W, Chen J, Zhu G, Wen X, Bai P, Su Y, Lin Y, Wang Z (2013) Harvesting vibration energy by a triple-cantilever based triboelectric nanogenerator. Nano Res 6(12):880–886. https://doi.org/10.1007/s12274-013-0364-0CrossRef

Yang Z, Zhou S, Zu J, Inman D (2018) High-performance piezoelectric energy harvesters and their applications. Joule. https://doi.org/10.1016/j.joule.2018.03.011CrossRef

Yeo HG, Xue T, Roundy S, Ma X, Rahn C, Trolier-McKinstry S (2018) Strongly (001) Oriented Bimorph PZT film on metal foils grown by rf-sputtering for Wrist-Worn piezoelectric energy harvesters. Adv Funct Mater 28(36):1–9. https://doi.org/10.1002/adfm.201801327CrossRef

Yi Z, Yang B, Li G, Liu J, Chen X, Wang X, Yang C (2017) High performance bimorph piezoelectric MEMS harvester via bulk PZT thick films on thin beryllium-bronze substrate. Appl Phys Lett. https://doi.org/10.1063/1.4991368CrossRef

Yu H, He X, Ding W, Hu Y, Yang D, Lu S, Wu C, Zou H, Liu R, Lu C, Wang ZL (2017) A self-powered dynamic displacement monitoring system based on triboelectric accelerometer. Adv Energy Mater 7(19):1–8. https://doi.org/10.1002/aenm.201700565CrossRef

Zhang K, Wang X, Yang Y, Wang ZL (2015) Hybridized electromagnetic-triboelectric nanogenerator for scavenging biomechanical energy for sustainably powering wearable electronics. ACS Nano 9(4):3521–3529. https://doi.org/10.1021/nn507455fCrossRef

Zhang N, Chen J, Huang Y, Guo W, Yang J, Du J, Fan X, Tao C (2016) A wearable all-solid photovoltaic textile. Adv Mater 28(2):263–269. https://doi.org/10.1002/adma.201504137CrossRef

Zhang G, Gao S, Liu H, Niu S (2017) A low frequency piezoelectric energy harvester with trapezoidal cantilever beam: theory and experiment. Microsyst Technol 23(8):3457–3466. https://doi.org/10.1007/s00542-016-3224-5CrossRef

Zhang R, Örtegren J, Hummelgård M, Olsen M, Andersson H, Olin H (2018) Harvesting triboelectricity from the human body using non-electrode triboelectric nanogenerators. Nano Energy 45:298–303. https://doi.org/10.1016/j.nanoen.2017.12.053CrossRef

Zhao C, Zhang Q, Zhang W, Du X, Zhang Y, Gong S, Ren K, Sun Q, Wang ZL (2019) Hybrid piezo/triboelectric nanogenerator for highly efficient and stable rotation energy harvesting. Nano Energy 57(Nov 2018):440–449. https://doi.org/10.1016/j.nanoen.2018.12.062CrossRef

Zheng Q, Shi B, Li Z, Wang ZL (2017) Recent progress on piezoelectric and triboelectric energy harvesters in biomedical systems. Adv Sci 4(7):1–23. https://doi.org/10.1002/advs.201700029CrossRef

Zhu G, Lin ZH, Jing Q, Bai P, Pan C, Yang Y, Zhou Y, Wang ZL (2013a) Toward large-scale energy harvesting by a nanoparticle-enhanced triboelectric nanogenerator. Nano Lett 13(2):847–853. https://doi.org/10.1021/nl4001053CrossRef

Zhu G, Bai P, Chen J, Lin Wang Z (2013b) Power-generating shoe insole based on triboelectric nanogenerators for self-powered consumer electronics. Nano Energy 2(5):688–692CrossRef

Zhu M, Yi Z, Yang B, Lee C (2021) Making use of nanoenergy from human – nanogenerator and self-powered sensor enabled sustainable wireless IoT sensory systems. Nano Today 36(800):101016. https://doi.org/10.1016/j.nantod.2020.101016CrossRef

Zou H, Zhang Y, Guo L, Wang P, He X, Dai G, Zheng H, Chen C, Wang AC, Xu C, Wang ZL (2019) Quantifying the triboelectric series. Nat Commun 10(1):1–9. https://doi.org/10.1038/s41467-019-09461-xCrossRef

Titel: MEMS-based energy scavengers: journey and future
verfasst von: Kamlesh Kahar
Manish Bhaiyya
Ram Dhekekar
Gopal Gawande
Suresh Balpande
Sanket Goel
Publikationsdatum: 12.08.2022
Verlag: Springer Berlin Heidelberg
Erschienen in: Microsystem Technologies / Ausgabe 9/2022
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI: https://doi.org/10.1007/s00542-022-05356-y

Neuer Inhalt

Bildnachweise

VDI-Icon, Profil Icon, inhalt2, Springer Professional Modul/© Springer Fachmedien Wiesbaden GmbH, Nachhaltigkeitsaward Key Visual/© Cometis AG/Global ESG Monitor | Daniel Rupp | Generiert mit KI, Search Icon, Banner Hanser, Beijing Auto Show 2024: Deutsche Hersteller wollen angreifen./© EKH-Pictures / Generated with AI / Stock.adobe.com, Buchstaben, die aus einem Megaphon kommen/© MicroStockHub/Getty Images/iStock, Digitale Lieferkette/© zapp2photo / stock.adobe.com, Zeitschrift Wissensmanagement Cover, PatentFit-Logo/© Springer Fachmedien Wiesbaden GmbH, Sustainibility Finance/© Robert Kneschke / stock.adobe.com / Springer Fachmedien Wiesbaden GmbH, Zukunftswerkstatt Sales Excellence 2024/© AndreyPopov / Getty Images / iStock, 2023_Antrieb/© supervisuell

Springer Professional

Abstract

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Springer Professional "Technik"

Weitere Artikel der Ausgabe 9/2022

A wearable omnidirectional inertial switch of security detection for the elderly

Non-linear hysteresis modelling of piezoelectric actuator using feedforward with PI control for micromanipulation

High sensitivity Ge-source L-shaped tunnel BioFETs for detection of high-K biomolecules

Design and fabrication of micromanipulation tools for electrochemical-based manipulation of metal microcomponents

Very small size capacitive DMTL phase shifters using a new approach

A novel approach to construct self-assembled 3D MEMS arrays

Neuer Inhalt

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.

Bitte loggen Sie sich ein, um Zugang zu Ihrer Lizenz zu erhalten.