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Erschienen in: Microsystem Technologies 8/2020

02.03.2020 | Technical Paper

MEMS multi-vibrating ring gyroscope for space applications

verfasst von: Waqas Amin Gill, Dima Ali, Boo Hyun An, Wajih U. Syed, Numan Saeed, Muneera Al-shaibah, Ibrahim M. Elfadel, Sultan Al Dahmani, Daniel S. Choi

Erschienen in: Microsystem Technologies | Ausgabe 8/2020

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Abstract

This paper presents the design of a novel multi-ring vibratory gyroscope. The design incorporates two sets of rings, inner and outer, separated by a set of perforated inertial masses and connected to the outermost anchors by the means of springs. The structure’s performance is enhanced by utilizing springs with bends that play a significant role in reducing the device’s sensitivity to external shocks. The amalgamation of multiple rings with the C-shaped springs provides higher sensitivity with high shock resistance that makes this multi-vibrating ring gyroscope an ideal inertial sensor for space applications. Such a structure yields in-plane flexural modes that are utilized to sense rotation along the axis normal to the structure’s plane.

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Metadaten
Titel
MEMS multi-vibrating ring gyroscope for space applications
verfasst von
Waqas Amin Gill
Dima Ali
Boo Hyun An
Wajih U. Syed
Numan Saeed
Muneera Al-shaibah
Ibrahim M. Elfadel
Sultan Al Dahmani
Daniel S. Choi
Publikationsdatum
02.03.2020
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 8/2020
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-020-04793-x

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