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2016 | OriginalPaper | Buchkapitel

2. MEMS Technologies for Energy Harvesting

verfasst von : Manuel Domínguez-Pumar, Joan Pons-Nin, Juan A. Chávez-Domínguez

Erschienen in: Nonlinearity in Energy Harvesting Systems

Verlag: Springer International Publishing

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Abstract

The objective of this chapter is to introduce the technology of Microelectromechanical Systems, MEMS, and their application to emerging energy harvesting devices. The chapter begins with a general introduction to the most common MEMS fabrication processes. This is followed with a survey of design mechanisms implemented in MEMS energy harvesters to provide nonlinear mechanical actuations. Mechanisms to produce bistable potential will be studied, such as introducing fixed magnets, buckling of beams or using slightly slanted clamped-clamped beams. Other nonlinear mechanisms are studied such as impact energy transfer, or the design of nonlinear springs. Finally, due to their importance in the field of MEMS and their application to energy harvesters, an introduction to actuation using piezoelectric materials is given. Examples of energy harvesters found in the literature using this actuation principle are also presented.

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Titel: MEMS Technologies for Energy Harvesting
verfasst von: Manuel Domínguez-Pumar
Joan Pons-Nin
Juan A. Chávez-Domínguez
Verlag: Springer International Publishing
Buch: Nonlinearity in Energy Harvesting Systems
Print ISBN: 978-3-319-20354-6

Electronic ISBN: 978-3-319-20355-3

Copyright-Jahr: 2016
DOI: https://doi.org/10.1007/978-3-319-20355-3_2