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Erschienen in:
2006 | OriginalPaper | Buchkapitel
Micro- and Nano-assembly and Manipulation Techniques for MEMS
verfasst von : Eniko T. Enikov
Erschienen in: Microsystems Mechanical Design
Verlag: Springer Vienna
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This paper presents a review of the most commonly used techniques for the assembly of micro-systems. Following a brief overview of the dominant forces working at this scale, the operation and design of mechanical, electrostatic, and magnetic micro-grippers is presented. The use of electrostatic forces is further described in the context of nano-assembly, where sub-micron-sized charged spots are used as the anchoring sites for nano-particles.