Skip to main content

2016 | OriginalPaper | Buchkapitel

27. Micro-/Nanorobots

verfasst von : Bradley J. Nelson, Lixin Dong, Fumihito Arai

Erschienen in: Springer Handbook of Robotics

Verlag: Springer International Publishing

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

The field of microrobotics covers the robotic manipulation of objects with dimensions in the millimeter to micron range as well as the design and fabrication of autonomous robotic agents that fall within this size range. Nanorobotics is defined in the same way only for dimensions smaller than a micron. With the ability to position and orient objects with micron- and nanometer-scale dimensions, manipulation at each of these scales is a promising way to enable the assembly of micro- and nanosystems, including micro- and nanorobots.
This chapter overviews the state of the art of both micro- and nanorobotics, outlines scaling effects, actuation, and sensing and fabrication at these scales, and focuses on micro- and nanorobotic manipulation systems and their application in microassembly, biotechnology, and the construction and characterization of micro and nanoelectromechanical systems (MEMS/NEMS). Material science, biotechnology, and micro- and nanoelectronics will also benefit from advances in these areas of robotics.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 340 Zeitschriften

aus folgenden Fachgebieten:

  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Versicherung + Risiko




Jetzt Wissensvorsprung sichern!

Anhänge
Nur mit Berechtigung zugänglich
Literatur
27.1
Zurück zum Zitat R.P. Feynman: There's plenty of room at the bottom, Caltech Eng. Sci. 23, 22–36 (1960) R.P. Feynman: There's plenty of room at the bottom, Caltech Eng. Sci. 23, 22–36 (1960)
27.2
27.3
Zurück zum Zitat A.M. Flynn, R.A. Brooks, W.M. Wells, D.S. Barrett: The world's largest one cubic inch robot, IEEE Micro Electro Mech. Syst. (MEMS) (1989) pp. 98–101 A.M. Flynn, R.A. Brooks, W.M. Wells, D.S. Barrett: The world's largest one cubic inch robot, IEEE Micro Electro Mech. Syst. (MEMS) (1989) pp. 98–101
27.4
Zurück zum Zitat W. Trimmer, R. Jebens: Actuators for micro robots, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (1989) pp. 1547–1552 W. Trimmer, R. Jebens: Actuators for micro robots, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (1989) pp. 1547–1552
27.5
Zurück zum Zitat S. Fatikow, U. Rembold: An automated microrobot-based desktop station for micro assembly and handling of micro-objects, IEEE Conf. Emerg. Technol. Fact. Autom. (EFTA'96) (1996) pp. 586–592 S. Fatikow, U. Rembold: An automated microrobot-based desktop station for micro assembly and handling of micro-objects, IEEE Conf. Emerg. Technol. Fact. Autom. (EFTA'96) (1996) pp. 586–592
27.6
Zurück zum Zitat B.J. Nelson, Y. Zhou, B. Vikramaditya: Sensor-based microassembly of hybrid MEMS devices, IEEE Control Syst. Mag. 18, 35–45 (1998)CrossRef B.J. Nelson, Y. Zhou, B. Vikramaditya: Sensor-based microassembly of hybrid MEMS devices, IEEE Control Syst. Mag. 18, 35–45 (1998)CrossRef
27.7
Zurück zum Zitat K. Suzumori, T. Miyagawa, M. Kimura, Y. Hasegawa: Micro inspection robot for 1-in pipes, IEEE/ASME Trans. Mechatron. 4, 286–292 (1999)CrossRef K. Suzumori, T. Miyagawa, M. Kimura, Y. Hasegawa: Micro inspection robot for 1-in pipes, IEEE/ASME Trans. Mechatron. 4, 286–292 (1999)CrossRef
27.8
Zurück zum Zitat M. Takeda: Applications of MEMS to industrial inspection, Proc. 14th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (2001) pp. 182–191 M. Takeda: Applications of MEMS to industrial inspection, Proc. 14th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (2001) pp. 182–191
27.9
Zurück zum Zitat T. Frank: Two-Axis electrodynamic micropositioning devices, J. Micromech. Microeng. 8, 114–118 (1989)CrossRef T. Frank: Two-Axis electrodynamic micropositioning devices, J. Micromech. Microeng. 8, 114–118 (1989)CrossRef
27.10
Zurück zum Zitat N. Kawahara, N. Kawahara, T. Suto, T. Hirano, Y. Ishikawa, T. Kitahara, N. Ooyama, T. Ataka: Microfactories: New applications of micromachine technology to the manufacture of small products, Res. J. Microsyst. Technol. 3, 37–41 (1997)CrossRef N. Kawahara, N. Kawahara, T. Suto, T. Hirano, Y. Ishikawa, T. Kitahara, N. Ooyama, T. Ataka: Microfactories: New applications of micromachine technology to the manufacture of small products, Res. J. Microsyst. Technol. 3, 37–41 (1997)CrossRef
27.11
Zurück zum Zitat Y. Sun, B.J. Nelson: Microrobotic cell injection, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (2001) pp. 620–625 Y. Sun, B.J. Nelson: Microrobotic cell injection, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (2001) pp. 620–625
27.12
Zurück zum Zitat P. Dario, M.C. Carrozza, L. Lencioni, B. Magnani, S. Dapos Attanasio: A micro robotic system for colonoscopy, Proc. Int. Conf. Robotics Autom. (ICRA) (1997) pp. 1567–1572 P. Dario, M.C. Carrozza, L. Lencioni, B. Magnani, S. Dapos Attanasio: A micro robotic system for colonoscopy, Proc. Int. Conf. Robotics Autom. (ICRA) (1997) pp. 1567–1572
27.13
Zurück zum Zitat F. Tendick, S.S. Sastry, R.S. Fearing, M. Cohn: Application of micromechatronics in minimally invasive surgery, IEEE/ASME Trans. Mechatron. 3, 34–42 (1998)CrossRef F. Tendick, S.S. Sastry, R.S. Fearing, M. Cohn: Application of micromechatronics in minimally invasive surgery, IEEE/ASME Trans. Mechatron. 3, 34–42 (1998)CrossRef
27.14
Zurück zum Zitat G. Iddan, G. Meron, A. Glukhovsky, P. Swain: Wireless capsule endoscopy, Nature 405, 417 (2000)CrossRef G. Iddan, G. Meron, A. Glukhovsky, P. Swain: Wireless capsule endoscopy, Nature 405, 417 (2000)CrossRef
27.15
Zurück zum Zitat K.B. Yesin, K. Vollmers, B.J. Nelson: Analysis and design of wireless magnetically guided microrobots in body fluids, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (2004) pp. 1333–1338 K.B. Yesin, K. Vollmers, B.J. Nelson: Analysis and design of wireless magnetically guided microrobots in body fluids, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (2004) pp. 1333–1338
27.16
Zurück zum Zitat M.C. Roco, R.S. Williams, P. Alivisatos: Nanotechnology Research Directions. Vision for Nanotechnology in the Next Decade (Kluwer, Dordrecht 2000) M.C. Roco, R.S. Williams, P. Alivisatos: Nanotechnology Research Directions. Vision for Nanotechnology in the Next Decade (Kluwer, Dordrecht 2000)
27.17
Zurück zum Zitat M.L. Downey, D.T. Moore, G.R. Bachula, D.M. Etter, E.F. Carey, L.A. Perine: National Nanotechnology Initiative: Leading to the Next Industrial Revolution, A Report by the Interagency Working Group on Nanoscience, Engineering and Technology (Committee on Technology, National Science and Technology Council, Washington 2000) M.L. Downey, D.T. Moore, G.R. Bachula, D.M. Etter, E.F. Carey, L.A. Perine: National Nanotechnology Initiative: Leading to the Next Industrial Revolution, A Report by the Interagency Working Group on Nanoscience, Engineering and Technology (Committee on Technology, National Science and Technology Council, Washington 2000)
27.18
Zurück zum Zitat K. Drexler: Nanosystems: Molecular Machinery, Manufacturing and Computation (Wiley, New York 1992) K. Drexler: Nanosystems: Molecular Machinery, Manufacturing and Computation (Wiley, New York 1992)
27.19
Zurück zum Zitat G. Binnig, H. Rohrer, C. Gerber, E. Weibel: Surface studies by scanning tunneling microscopy, Phys. Rev. Lett. 49, 57–61 (1982)CrossRef G. Binnig, H. Rohrer, C. Gerber, E. Weibel: Surface studies by scanning tunneling microscopy, Phys. Rev. Lett. 49, 57–61 (1982)CrossRef
27.20
Zurück zum Zitat W.F. Degrado: Design of peptides and proteins, Adv. Protein Chem. 39, 51–124 (1998)CrossRef W.F. Degrado: Design of peptides and proteins, Adv. Protein Chem. 39, 51–124 (1998)CrossRef
27.21
Zurück zum Zitat G.M. Whitesides, B. Grzybowski: Self-assembly at all scales, Science 295, 2418–2421 (2002)CrossRef G.M. Whitesides, B. Grzybowski: Self-assembly at all scales, Science 295, 2418–2421 (2002)CrossRef
27.22
Zurück zum Zitat R. Fearing: Survey of sticking effects for micro-parts, Proc. IEEE/RSJ Int. Conf. Int. Robots Syst. (1995) pp. 212–217 R. Fearing: Survey of sticking effects for micro-parts, Proc. IEEE/RSJ Int. Conf. Int. Robots Syst. (1995) pp. 212–217
27.23
Zurück zum Zitat E.L. Wolf: Nanophysics and Nanotechnology (Wiley-VCH, Weinheim 2004) E.L. Wolf: Nanophysics and Nanotechnology (Wiley-VCH, Weinheim 2004)
27.24
Zurück zum Zitat T. Ebefors, G. Stemme: Microrobotics. In: The MEMS Handbook, ed. by M. Gad-el-Hak (CRC, Boca Raton 2002) T. Ebefors, G. Stemme: Microrobotics. In: The MEMS Handbook, ed. by M. Gad-el-Hak (CRC, Boca Raton 2002)
27.25
Zurück zum Zitat C.-J. Kim, A.P. Pisano, R.S. Muller: Silicon-processed overhanging microgripper, IEEE/ASME J. Microelectromechanical Syst. 1, 31–36 (1992)CrossRef C.-J. Kim, A.P. Pisano, R.S. Muller: Silicon-processed overhanging microgripper, IEEE/ASME J. Microelectromechanical Syst. 1, 31–36 (1992)CrossRef
27.26
Zurück zum Zitat C. Liu, T. Tsao, Y.-C. Tai, C.-M. Ho: Surface micromachined magnetic actuators, Proc. 7th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1994) pp. 57–62 C. Liu, T. Tsao, Y.-C. Tai, C.-M. Ho: Surface micromachined magnetic actuators, Proc. 7th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1994) pp. 57–62
27.27
Zurück zum Zitat J. Judy, D.L. Polla, W.P. Robbins: A linear piezoelectric stepper motor with submicron displacement and centimeter travel, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 37, 428–437 (1990)CrossRef J. Judy, D.L. Polla, W.P. Robbins: A linear piezoelectric stepper motor with submicron displacement and centimeter travel, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 37, 428–437 (1990)CrossRef
27.28
Zurück zum Zitat K. Nakamura, H. Ogura, S. Maeda, U. Sangawa, S. Aoki, T. Sato: Evaluation of the micro wobbler motor fabricated by concentric build-up process, Proc. 8th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1995) pp. 374–379 K. Nakamura, H. Ogura, S. Maeda, U. Sangawa, S. Aoki, T. Sato: Evaluation of the micro wobbler motor fabricated by concentric build-up process, Proc. 8th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1995) pp. 374–379
27.29
Zurück zum Zitat A. Teshigahara, M. Watanabe, N. Kawahara, I. Ohtsuka, T. Hattori: Performance of a 7-mm microfabricated car, IEEE/ASME J. Microelectromechanical Syst. 4, 76–80 (1995)CrossRef A. Teshigahara, M. Watanabe, N. Kawahara, I. Ohtsuka, T. Hattori: Performance of a 7-mm microfabricated car, IEEE/ASME J. Microelectromechanical Syst. 4, 76–80 (1995)CrossRef
27.30
Zurück zum Zitat K.R. Udayakumar, S.F. Bart, A.M. Flynn, J. Chen, L.S. Tavrow, L.E. Cross, R.A. Brooks, D.J. Ehrlich: Ferroelectric thin film ultrasonic micromotors, Proc. 4th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1991) pp. 109–113 K.R. Udayakumar, S.F. Bart, A.M. Flynn, J. Chen, L.S. Tavrow, L.E. Cross, R.A. Brooks, D.J. Ehrlich: Ferroelectric thin film ultrasonic micromotors, Proc. 4th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1991) pp. 109–113
27.31
Zurück zum Zitat P. Dario, R. Valleggi, M.C. Carrozza, M.C. Montesi, M. Cocco: Review – Microactuators for microrobots: A critical survey, J. Micromech. Microeng. 2, 141–157 (1992)CrossRef P. Dario, R. Valleggi, M.C. Carrozza, M.C. Montesi, M. Cocco: Review – Microactuators for microrobots: A critical survey, J. Micromech. Microeng. 2, 141–157 (1992)CrossRef
27.32
Zurück zum Zitat I. Shimoyama: Scaling in microrobots, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (1995) pp. 208–211 I. Shimoyama: Scaling in microrobots, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (1995) pp. 208–211
27.33
Zurück zum Zitat R.S. Fearing: Powering 3-dimensional microrobots: power density limitations, tutorial on Micro Mechatronics and Micro Robotics, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (1998) R.S. Fearing: Powering 3-dimensional microrobots: power density limitations, tutorial on Micro Mechatronics and Micro Robotics, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (1998)
27.34
Zurück zum Zitat R.G. Gilbertson, J.D. Busch: A survey of micro-actuator technologies for future spacecraft missions, J. Br. Interplanet. Soc. 49, 129–138 (1996) R.G. Gilbertson, J.D. Busch: A survey of micro-actuator technologies for future spacecraft missions, J. Br. Interplanet. Soc. 49, 129–138 (1996)
27.35
Zurück zum Zitat M. Mehregany, P. Nagarkar, S.D. Senturia, J.H. Lang: Operation of microfabricated harmonic and ordinary side-drive motors, Proc. 3rd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1990) pp. 1–8 M. Mehregany, P. Nagarkar, S.D. Senturia, J.H. Lang: Operation of microfabricated harmonic and ordinary side-drive motors, Proc. 3rd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1990) pp. 1–8
27.36
Zurück zum Zitat Y.C. Tai, L.S. Fan, R.S. Mulle: IC-processed micro-motors: design, technology, and testing, Proc. 2nd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1989) pp. 1–6 Y.C. Tai, L.S. Fan, R.S. Mulle: IC-processed micro-motors: design, technology, and testing, Proc. 2nd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1989) pp. 1–6
27.37
Zurück zum Zitat T. Ohnstein, T. Fukiura, J. Ridley, U. Bonne: Micromachined silicon microvalve, Proc. 3rd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1990) pp. 95–99 T. Ohnstein, T. Fukiura, J. Ridley, U. Bonne: Micromachined silicon microvalve, Proc. 3rd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1990) pp. 95–99
27.38
Zurück zum Zitat L.Y. Chen, S.L. Zhang, J.J. Yao, D.C. Thomas, N.C. MacDonald: Selective chemical vapor deposition of tungsten for microdynamic structures, Proc. 2nd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1989) pp. 82–87 L.Y. Chen, S.L. Zhang, J.J. Yao, D.C. Thomas, N.C. MacDonald: Selective chemical vapor deposition of tungsten for microdynamic structures, Proc. 2nd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1989) pp. 82–87
27.39
Zurück zum Zitat K. Yanagisawa, H. Kuwano, A. Tago: An electromagnetically driven microvalve, Proc. 7th Int. Conf. Solid-State Sens. Actuators (1993) pp. 102–105 K. Yanagisawa, H. Kuwano, A. Tago: An electromagnetically driven microvalve, Proc. 7th Int. Conf. Solid-State Sens. Actuators (1993) pp. 102–105
27.40
Zurück zum Zitat M. Esashi, S. Shoji, A. Nakano: Normally close microvalve and micropump fabricated on a silicon wafer, Proc. 2nd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1989) pp. 29–34 M. Esashi, S. Shoji, A. Nakano: Normally close microvalve and micropump fabricated on a silicon wafer, Proc. 2nd IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1989) pp. 29–34
27.41
Zurück zum Zitat R. Petrucci, K. Simmons: An introduction to piezoelectric crystals, Sens. J. Appl.Sens. Technol. 11(5), 26–31 (1994) R. Petrucci, K. Simmons: An introduction to piezoelectric crystals, Sens. J. Appl.Sens. Technol. 11(5), 26–31 (1994)
27.42
Zurück zum Zitat J. Goldstein, D. Newbury, D. Joy, C. Lyman, P. Echlin, E. Lifshin, L. Sawyer, J. Michael: Scanning Electron Microscopy and X-ray Microanalysis (Kluwer, New York 2003)CrossRef J. Goldstein, D. Newbury, D. Joy, C. Lyman, P. Echlin, E. Lifshin, L. Sawyer, J. Michael: Scanning Electron Microscopy and X-ray Microanalysis (Kluwer, New York 2003)CrossRef
27.43
Zurück zum Zitat G. Binnig, H. Rohrer: In touch with atoms, Rev. Mod. Phys. 71, S324–S330 (1999)CrossRef G. Binnig, H. Rohrer: In touch with atoms, Rev. Mod. Phys. 71, S324–S330 (1999)CrossRef
27.44
Zurück zum Zitat G. Binnig, C.F. Quate, C. Gerber: Atomic force microscope, Phys. Rev. Lett. 56, 93–96 (1986)CrossRef G. Binnig, C.F. Quate, C. Gerber: Atomic force microscope, Phys. Rev. Lett. 56, 93–96 (1986)CrossRef
27.45
Zurück zum Zitat M.J. Doktycz, C.J. Sullivan, P.R. Hoyt, D.A. Pelletier, S. Wu, D.P. Allison: AFM imaging of bacteria in liquid media immobilized on gelatin coated mica surfaces, Ultramicroscopy 97, 209–216 (2003)CrossRef M.J. Doktycz, C.J. Sullivan, P.R. Hoyt, D.A. Pelletier, S. Wu, D.P. Allison: AFM imaging of bacteria in liquid media immobilized on gelatin coated mica surfaces, Ultramicroscopy 97, 209–216 (2003)CrossRef
27.46
Zurück zum Zitat S.A. Campbell: The Science and Engineering of Microelectronic Fabrication (Oxford Univ. Press, New York 2001) S.A. Campbell: The Science and Engineering of Microelectronic Fabrication (Oxford Univ. Press, New York 2001)
27.47
Zurück zum Zitat C.J. Jaeger: Introduction to Microelectronic Fabrication (Prentice Hall, Upper Saddle River 2002) C.J. Jaeger: Introduction to Microelectronic Fabrication (Prentice Hall, Upper Saddle River 2002)
27.48
Zurück zum Zitat J.D. Plummer, M.D. Deal, P.B. Griffin: Silicon VLSI Technology (Prentice Hall, Upper Saddle River 2000) J.D. Plummer, M.D. Deal, P.B. Griffin: Silicon VLSI Technology (Prentice Hall, Upper Saddle River 2000)
27.49
Zurück zum Zitat M. Gad-el-Hak (Ed.): The MEMS Handbook (CRC, Boca Raton 2002)MATH M. Gad-el-Hak (Ed.): The MEMS Handbook (CRC, Boca Raton 2002)MATH
27.50
Zurück zum Zitat T.-R. Hsu: MEMS and Microsystems Design and Manufacture (McGraw-Hill, New York 2002) T.-R. Hsu: MEMS and Microsystems Design and Manufacture (McGraw-Hill, New York 2002)
27.51
Zurück zum Zitat G.T.A. Kovacs: Micromachined Transducers Sourcebook (McGraw-Hill, New York 1998) G.T.A. Kovacs: Micromachined Transducers Sourcebook (McGraw-Hill, New York 1998)
27.52
Zurück zum Zitat G.T.A. Kovacs, N.I. Maluf, K.A. Petersen: Bulk micromachining of silicon, Proc. IEEE Int. Conf. Robotics Autom. (1998) pp. 1536–1551 G.T.A. Kovacs, N.I. Maluf, K.A. Petersen: Bulk micromachining of silicon, Proc. IEEE Int. Conf. Robotics Autom. (1998) pp. 1536–1551
27.53
Zurück zum Zitat P. Rai-Choudhury (Ed.): Handbook of Microlithography, Micromachining and Microfabrication (SPIE, Bellingham 1997) P. Rai-Choudhury (Ed.): Handbook of Microlithography, Micromachining and Microfabrication (SPIE, Bellingham 1997)
27.54
Zurück zum Zitat S.Y. Chou: Nano-imprint lithography and lithographically induced self-assembly, MRS Bulletin 26, 512–517 (2001)CrossRef S.Y. Chou: Nano-imprint lithography and lithographically induced self-assembly, MRS Bulletin 26, 512–517 (2001)CrossRef
27.55
Zurück zum Zitat M.A. Herman: Molecular Beam Epitaxy: Fundamentals and Current Status (Springer, New York 1996)CrossRef M.A. Herman: Molecular Beam Epitaxy: Fundamentals and Current Status (Springer, New York 1996)CrossRef
27.56
Zurück zum Zitat J.S. Frood, G.J. Davis, W.T. Tsang: Chemical Beam Epitaxy and Related Techniques (Wiley, New York 1997) J.S. Frood, G.J. Davis, W.T. Tsang: Chemical Beam Epitaxy and Related Techniques (Wiley, New York 1997)
27.57
Zurück zum Zitat S. Mahajan, K.S.S. Harsha: Principles of Growth and Processing of Semiconductors (McGraw-Hill, New York 1999) S. Mahajan, K.S.S. Harsha: Principles of Growth and Processing of Semiconductors (McGraw-Hill, New York 1999)
27.58
Zurück zum Zitat C.A. Mirkin: Dip-pen nanolithography: automated fabrication of custom multicomponent, sub-100 nanometer surface architectures, MRS Bulletin 26, 535–538 (2001)CrossRef C.A. Mirkin: Dip-pen nanolithography: automated fabrication of custom multicomponent, sub-100 nanometer surface architectures, MRS Bulletin 26, 535–538 (2001)CrossRef
27.59
Zurück zum Zitat C.A. Harper: Electronic Packaging and Interconnection Handbook (McGraw-Hill, New York 2000) C.A. Harper: Electronic Packaging and Interconnection Handbook (McGraw-Hill, New York 2000)
27.60
Zurück zum Zitat K.F. Bohringer, R.S. Fearing, K.Y. Goldberg: Microassembly. In: Handbook of Industrial Robotics, ed. by S. Nof (Wiley, New York 1999) pp. 1045–1066CrossRef K.F. Bohringer, R.S. Fearing, K.Y. Goldberg: Microassembly. In: Handbook of Industrial Robotics, ed. by S. Nof (Wiley, New York 1999) pp. 1045–1066CrossRef
27.61
Zurück zum Zitat G. Yang, J.A. Gaines, B.J. Nelson: A supervisory wafer-level 3D microassembly system for hybrid MEMS fabrication, J. Intell. Robotics Syst. 37, 43–68 (2003)CrossRef G. Yang, J.A. Gaines, B.J. Nelson: A supervisory wafer-level 3D microassembly system for hybrid MEMS fabrication, J. Intell. Robotics Syst. 37, 43–68 (2003)CrossRef
27.62
Zurück zum Zitat P. Dario, M. Carrozza, N. Croce, M. Montesi, M. Cocco: Non-traditional technologies for microfabrication, J. Micromech. Microeng. 5, 64–71 (1995)CrossRef P. Dario, M. Carrozza, N. Croce, M. Montesi, M. Cocco: Non-traditional technologies for microfabrication, J. Micromech. Microeng. 5, 64–71 (1995)CrossRef
27.63
Zurück zum Zitat W. Benecke: Silicon microactuators: activation mechanisms and scaling problems, Proc. IEEE Int. Conf. Solid-State Sens. Actuators (1991) pp. 46–50 W. Benecke: Silicon microactuators: activation mechanisms and scaling problems, Proc. IEEE Int. Conf. Solid-State Sens. Actuators (1991) pp. 46–50
27.64
Zurück zum Zitat A. Menciassi, A. Eisinberg, M. Mazzoni, P. Dario: A sensorized electro discharge machined superelastic alloy microgripper for micromanipulation: simulation and characterization, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (IROS) (2002) pp. 1591–1595 A. Menciassi, A. Eisinberg, M. Mazzoni, P. Dario: A sensorized electro discharge machined superelastic alloy microgripper for micromanipulation: simulation and characterization, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (IROS) (2002) pp. 1591–1595
27.65
Zurück zum Zitat T.R. Hsu: Packaging design of microsystems and meso-scale devices, IEEE Trans. Adv. Packag. 23, 596–601 (2000)CrossRef T.R. Hsu: Packaging design of microsystems and meso-scale devices, IEEE Trans. Adv. Packag. 23, 596–601 (2000)CrossRef
27.66
Zurück zum Zitat L. Lin: MEMS post-packaging by localized heating and bonding, IEEE Trans. Adv. Packag. 23, 608–616 (2000)CrossRef L. Lin: MEMS post-packaging by localized heating and bonding, IEEE Trans. Adv. Packag. 23, 608–616 (2000)CrossRef
27.67
Zurück zum Zitat A. Tixier, Y. Mita, S. Oshima, J.P. Gouy, H. Fujita: 3-D microsystem packaging for interconnecting electrical, optical and mechanical microdevices to the external world, Proc. 13th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (2000) pp. 698–703 A. Tixier, Y. Mita, S. Oshima, J.P. Gouy, H. Fujita: 3-D microsystem packaging for interconnecting electrical, optical and mechanical microdevices to the external world, Proc. 13th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (2000) pp. 698–703
27.68
Zurück zum Zitat M.J. Madou: Fundamentals of Microfabrication (CRC, Boca Raton 2002) M.J. Madou: Fundamentals of Microfabrication (CRC, Boca Raton 2002)
27.69
Zurück zum Zitat I. Shimoyama, O. Kano, H. Miura: 3D micro-structures folded by Lorentz force, Proc. 11th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1998) pp. 24–28 I. Shimoyama, O. Kano, H. Miura: 3D micro-structures folded by Lorentz force, Proc. 11th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1998) pp. 24–28
27.70
Zurück zum Zitat K.F. Bohringer, B.R. Donald, L. Kavraki, F.L. Lamiraux: Part orientation with one or two stable equilibria using programmable vector fields, IEEE Trans. Robot. Autom. 16, 157–170 (2000)CrossRef K.F. Bohringer, B.R. Donald, L. Kavraki, F.L. Lamiraux: Part orientation with one or two stable equilibria using programmable vector fields, IEEE Trans. Robot. Autom. 16, 157–170 (2000)CrossRef
27.71
Zurück zum Zitat V. Kaajakari, A. Lal: An electrostatic batch assembly of surface MEMS using ultrasonic triboelectricity, Proc. 14th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (2001) pp. 10–13 V. Kaajakari, A. Lal: An electrostatic batch assembly of surface MEMS using ultrasonic triboelectricity, Proc. 14th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (2001) pp. 10–13
27.72
Zurück zum Zitat G. Yang, B.J. Nelson: Micromanipulation contact transition control by selective focusing and microforce control, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (2003) pp. 3200–3206 G. Yang, B.J. Nelson: Micromanipulation contact transition control by selective focusing and microforce control, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (2003) pp. 3200–3206
27.73
Zurück zum Zitat G. Morel, E. Malis, S. Boudet: Impedance based combination of visual and force control, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (1998) pp. 1743–1748 G. Morel, E. Malis, S. Boudet: Impedance based combination of visual and force control, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (1998) pp. 1743–1748
27.74
Zurück zum Zitat F. Arai, D. Andou, T. Fukuda: Adhesion forces reduction for micro manipulation based on micro physics, Proc. 9th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1996) pp. 354–359 F. Arai, D. Andou, T. Fukuda: Adhesion forces reduction for micro manipulation based on micro physics, Proc. 9th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1996) pp. 354–359
27.75
Zurück zum Zitat Y. Zhou, B.J. Nelson: The effect of material properties and gripping force on micrograsping, Proc. IEEE Int. Conf. Robotics Autom (ICRA) (2000) pp. 1115–1120 Y. Zhou, B.J. Nelson: The effect of material properties and gripping force on micrograsping, Proc. IEEE Int. Conf. Robotics Autom (ICRA) (2000) pp. 1115–1120
27.76
Zurück zum Zitat K. Kurata: Mass production techniques for optical modules, Proc. 48th IEEE Electronic Components and Technology Conf. (1998) pp. 572–580 K. Kurata: Mass production techniques for optical modules, Proc. 48th IEEE Electronic Components and Technology Conf. (1998) pp. 572–580
27.77
Zurück zum Zitat V.T. Portman, B.-Z. Sandler, E. Zahavi: Rigid 6 ×6 parallel platform for precision 3-D micromanipulation: theory and design application, IEEE Trans. Robotics Autom. 16, 629–643 (2000)CrossRef V.T. Portman, B.-Z. Sandler, E. Zahavi: Rigid 6 ×6 parallel platform for precision 3-D micromanipulation: theory and design application, IEEE Trans. Robotics Autom. 16, 629–643 (2000)CrossRef
27.78
Zurück zum Zitat R.M. Haralick, L.G. Shapiro: Computer and Robot Vision (Addison-Wesley, Reading 1993) R.M. Haralick, L.G. Shapiro: Computer and Robot Vision (Addison-Wesley, Reading 1993)
27.79
Zurück zum Zitat A. Khotanzad, H. Banerjee, M.D. Srinath: A vision system for inspection of ball bonds and 2-D profile of bonding wires in integrated circuits, IEEE Trans. Semicond. Manuf. 7, 413–422 (1994)CrossRef A. Khotanzad, H. Banerjee, M.D. Srinath: A vision system for inspection of ball bonds and 2-D profile of bonding wires in integrated circuits, IEEE Trans. Semicond. Manuf. 7, 413–422 (1994)CrossRef
27.80
Zurück zum Zitat J.T. Feddema, R.W. Simon: CAD-driven microassembly and visual servoing, Proc. IEEE Int. Conf. Robotics Autom (ICRA) (1998), pp. 1212 -1219 J.T. Feddema, R.W. Simon: CAD-driven microassembly and visual servoing, Proc. IEEE Int. Conf. Robotics Autom (ICRA) (1998), pp. 1212 -1219
27.81
Zurück zum Zitat E. Trucco, A. Verri: Introductory Techniques for 3-D Computer Vision (Prentice Hall, Upper Saddle River 1998) E. Trucco, A. Verri: Introductory Techniques for 3-D Computer Vision (Prentice Hall, Upper Saddle River 1998)
27.82
Zurück zum Zitat S. Hutchinson, G.D. Hager, P.I. Corke: A tutorial on visual servo control, IEEE Trans. Robotics Autom. 12, 651–670 (1996)CrossRef S. Hutchinson, G.D. Hager, P.I. Corke: A tutorial on visual servo control, IEEE Trans. Robotics Autom. 12, 651–670 (1996)CrossRef
27.83
Zurück zum Zitat B. Siciliano, L. Villani: Robot Force Control (Kluwer, Dordrecht 2000)MATH B. Siciliano, L. Villani: Robot Force Control (Kluwer, Dordrecht 2000)MATH
27.84
Zurück zum Zitat T. Yoshikawa: Force control of robot manipulators, Proc. IEEE Int. Conf. Robotics Autom (ICRA) (2000) pp. 220–226 T. Yoshikawa: Force control of robot manipulators, Proc. IEEE Int. Conf. Robotics Autom (ICRA) (2000) pp. 220–226
27.85
Zurück zum Zitat J.A. Thompson, R.S. Fearing: Automating microassembly with ortho-tweezers and force sensing, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (IROS) (2001) pp. 1327–1334 J.A. Thompson, R.S. Fearing: Automating microassembly with ortho-tweezers and force sensing, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (IROS) (2001) pp. 1327–1334
27.86
Zurück zum Zitat B.J. Nelson, P.K. Khosla: Force and vision resolvability for assimilating disparate sensory feedback, IEEE Trans. Robotics Autom. 12, 714–731 (1996)CrossRef B.J. Nelson, P.K. Khosla: Force and vision resolvability for assimilating disparate sensory feedback, IEEE Trans. Robotics Autom. 12, 714–731 (1996)CrossRef
27.87
Zurück zum Zitat Y. Haddab, N. Chaillet, A. Bourjault: A microgripper using smart piezoelectric actuators, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (IROS) (2000) pp. 659–664 Y. Haddab, N. Chaillet, A. Bourjault: A microgripper using smart piezoelectric actuators, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (IROS) (2000) pp. 659–664
27.88
Zurück zum Zitat D. Popa, B.H. Kang, J. Sin, J. Zou: Reconfigurable micro-assembly system for photonics applications, Proc. IEEE Int. Conf. Robotics Autom (ICRA) (2002) pp. 1495–1500 D. Popa, B.H. Kang, J. Sin, J. Zou: Reconfigurable micro-assembly system for photonics applications, Proc. IEEE Int. Conf. Robotics Autom (ICRA) (2002) pp. 1495–1500
27.89
Zurück zum Zitat A.P. Lee, D.R. Ciarlo, P.A. Krulevitch, S. Lehew, J. Trevin, M.A. Northrup: A practical microgripper by fine alignment, eutectic bonding and SMA actuation, Proc. IEEE Int. conf. Solid-State Sens. Actuators (1995) pp. 368–371 A.P. Lee, D.R. Ciarlo, P.A. Krulevitch, S. Lehew, J. Trevin, M.A. Northrup: A practical microgripper by fine alignment, eutectic bonding and SMA actuation, Proc. IEEE Int. conf. Solid-State Sens. Actuators (1995) pp. 368–371
27.90
Zurück zum Zitat H. Seki: Modeling and impedance control of a piezoelectric bimorph microgripper, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (IROS) (1992) pp. 958–965 H. Seki: Modeling and impedance control of a piezoelectric bimorph microgripper, Proc. IEEE/RSJ Int. Conf. Intell. Robots Syst. (IROS) (1992) pp. 958–965
27.91
Zurück zum Zitat W. Nogimori, K. Irisa, M. Ando, Y. Naruse: A laser-powered micro-gripper, Proc. 10th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1997) pp. 267–271 W. Nogimori, K. Irisa, M. Ando, Y. Naruse: A laser-powered micro-gripper, Proc. 10th IEEE Int. Conf. Micro Electro Mech. Syst. (MEMS) (1997) pp. 267–271
27.92
Zurück zum Zitat S. Fatikow, U. Rembold: Microsystem Technology and Microrobotics (Springer, Berlin, Heidelberg 1997)MATHCrossRef S. Fatikow, U. Rembold: Microsystem Technology and Microrobotics (Springer, Berlin, Heidelberg 1997)MATHCrossRef
27.93
27.94
Zurück zum Zitat S. Johansson: Micromanipulation for micro- and nanomanufacturing, INRIA/IEEE Symp. Emerging Technologies and Factory Automation (ETFA'95), Paris (1995) pp. 3–8 S. Johansson: Micromanipulation for micro- and nanomanufacturing, INRIA/IEEE Symp. Emerging Technologies and Factory Automation (ETFA'95), Paris (1995) pp. 3–8
27.95
Zurück zum Zitat K.-T. Park, M. Esashi: A multilink active catheter with polyimide-based integrated CMOS interface circuits, J. Microelectromechanical Syst. 8, 349–357 (1999)CrossRef K.-T. Park, M. Esashi: A multilink active catheter with polyimide-based integrated CMOS interface circuits, J. Microelectromechanical Syst. 8, 349–357 (1999)CrossRef
27.96
Zurück zum Zitat Y. Haga, Y. Tanahashi, M. Esashi: Small diameter active catheter using shape memory alloy, Proc. IEEE 11th Int. Workshop on Micro Electro Mechanical Systems, Heidelberg (1998) pp. 419–424 Y. Haga, Y. Tanahashi, M. Esashi: Small diameter active catheter using shape memory alloy, Proc. IEEE 11th Int. Workshop on Micro Electro Mechanical Systems, Heidelberg (1998) pp. 419–424
27.97
Zurück zum Zitat E.W.H. Jager, O. Inganas, I. Lundstrom: Microrobots for micrometer-size objects in aqueous media: Potential tools for single cell manipulation, Science 288, 2335–2338 (2000)CrossRef E.W.H. Jager, O. Inganas, I. Lundstrom: Microrobots for micrometer-size objects in aqueous media: Potential tools for single cell manipulation, Science 288, 2335–2338 (2000)CrossRef
27.98
Zurück zum Zitat E.W.H. Jager, E. Smela, O. Inganas: Microfabricating conjugated polymer actuators, Science 290, 1540–1545 (2000)CrossRef E.W.H. Jager, E. Smela, O. Inganas: Microfabricating conjugated polymer actuators, Science 290, 1540–1545 (2000)CrossRef
27.99
Zurück zum Zitat J.W. Suh, S.F. Glander, R.B. Darling, C.W. Storment, G.T.A. Kovacs: Organic thermal and electrostatic ciliary microactuator array for object manipulation, Sens. Actuators A 58, 51–60 (1997)CrossRef J.W. Suh, S.F. Glander, R.B. Darling, C.W. Storment, G.T.A. Kovacs: Organic thermal and electrostatic ciliary microactuator array for object manipulation, Sens. Actuators A 58, 51–60 (1997)CrossRef
27.100
Zurück zum Zitat E. Smela, M. Kallenbach, J. Holdenried: Electrochemically driven polypyrrole bilayers for moving and positioning bulk micromachined silicon plates, J. Microelectromechanical Syst. 8, 373–383 (1999)CrossRef E. Smela, M. Kallenbach, J. Holdenried: Electrochemically driven polypyrrole bilayers for moving and positioning bulk micromachined silicon plates, J. Microelectromechanical Syst. 8, 373–383 (1999)CrossRef
27.101
Zurück zum Zitat S. Konishi, H. Fujita: A conveyance system using air flow based on the concept of distributed micro motion systems, IEEE J. Microelectromechanical Syst. 3, 54–58 (1994)CrossRef S. Konishi, H. Fujita: A conveyance system using air flow based on the concept of distributed micro motion systems, IEEE J. Microelectromechanical Syst. 3, 54–58 (1994)CrossRef
27.102
Zurück zum Zitat M. Ataka, A. Omodaka, N. Takeshima, H. Fujita: Fabrication and operation of polyimide bimorph actuators for a ciliary motion system, J. Microelectromechanical Syst. 2, 146–150 (1993)CrossRef M. Ataka, A. Omodaka, N. Takeshima, H. Fujita: Fabrication and operation of polyimide bimorph actuators for a ciliary motion system, J. Microelectromechanical Syst. 2, 146–150 (1993)CrossRef
27.103
Zurück zum Zitat G.-X. Zhou: Swallowable or implantable body temperature telemeter-body temperature radio pill, Proc. IEEE 15th Annual Northeast Bioengineering Conf. (1989) pp. 165–166CrossRef G.-X. Zhou: Swallowable or implantable body temperature telemeter-body temperature radio pill, Proc. IEEE 15th Annual Northeast Bioengineering Conf. (1989) pp. 165–166CrossRef
27.104
Zurück zum Zitat A. Uchiyama: Endoradiosonde needs micro machine technology, Proc. IEEE 6th Int. Symp. Micro Mach. Hum. Sci. (MHS) (1995) pp. 31–37 A. Uchiyama: Endoradiosonde needs micro machine technology, Proc. IEEE 6th Int. Symp. Micro Mach. Hum. Sci. (MHS) (1995) pp. 31–37
27.105
Zurück zum Zitat Y. Carts-Powell: Tiny Camera in a Pill Extends Limits of Endoscopy, OE-Rep. Aug., Vol. 200 (SPIE, Bellingham 2000) Y. Carts-Powell: Tiny Camera in a Pill Extends Limits of Endoscopy, OE-Rep. Aug., Vol. 200 (SPIE, Bellingham 2000)
27.106
Zurück zum Zitat R. Yeh, E.J.J. Kruglick, K.S.J. Pister: Surface-micromachined components for articulated microrobots, J. Microelectromechanical Syst. 5, 10–17 (1996)CrossRef R. Yeh, E.J.J. Kruglick, K.S.J. Pister: Surface-micromachined components for articulated microrobots, J. Microelectromechanical Syst. 5, 10–17 (1996)CrossRef
27.107
Zurück zum Zitat P.E. Kladitis, V.M. Bright, K.F. Harsh, Y.C. Lee: Prototype Microrobots for micro positioning in a manufacturing process and micro unmanned vehicles, Proc. IEEE 12th Int. Conf. Micro Electro Mech. Syst. (MEMS), Orlando (1999) pp. 570–575 P.E. Kladitis, V.M. Bright, K.F. Harsh, Y.C. Lee: Prototype Microrobots for micro positioning in a manufacturing process and micro unmanned vehicles, Proc. IEEE 12th Int. Conf. Micro Electro Mech. Syst. (MEMS), Orlando (1999) pp. 570–575
27.108
Zurück zum Zitat D. Ruffieux, N.F. Rooij: A 3-DoF bimorph actuator array capable of locomotion, Proc. 13th Eur. Conf. Solid-State Transducers (Eurosensors), Hague (1999) pp. 725–728 D. Ruffieux, N.F. Rooij: A 3-DoF bimorph actuator array capable of locomotion, Proc. 13th Eur. Conf. Solid-State Transducers (Eurosensors), Hague (1999) pp. 725–728
27.109
Zurück zum Zitat J.-M. Breguet, P. Renaud: A 4 degrees-of-freedoms microrobot with nanometer resolution, Robotics 14, 199–203 (1996) J.-M. Breguet, P. Renaud: A 4 degrees-of-freedoms microrobot with nanometer resolution, Robotics 14, 199–203 (1996)
27.110
Zurück zum Zitat A. Flynn, L.S. Tavrow, S.F. Bart, R.A. Brooks, D.J. Ehrlich, K.R. Udayakumar, L.E. Cross: Piezoelectric micromotors for microrobots, J. Microelectromechanical Syst. 1, 44–51 (1992)CrossRef A. Flynn, L.S. Tavrow, S.F. Bart, R.A. Brooks, D.J. Ehrlich, K.R. Udayakumar, L.E. Cross: Piezoelectric micromotors for microrobots, J. Microelectromechanical Syst. 1, 44–51 (1992)CrossRef
27.111
Zurück zum Zitat A. Teshigahara, M. Watanabe, N. Kawahara, Y. Ohtsuka, T. Hattori: Performance of a 7 mm microfabricated car, J. Microelectromechanical Syst. 4, 76–80 (1995)CrossRef A. Teshigahara, M. Watanabe, N. Kawahara, Y. Ohtsuka, T. Hattori: Performance of a 7 mm microfabricated car, J. Microelectromechanical Syst. 4, 76–80 (1995)CrossRef
27.112
Zurück zum Zitat T. Ebefors, J. Mattson, E. Kalvesten, G. Stemme: A walking silicon micro-robot, 10th Int. Conf. Solid-State Sens. Actuators (Transducers), Sendai (1999) pp. 1202–1205 T. Ebefors, J. Mattson, E. Kalvesten, G. Stemme: A walking silicon micro-robot, 10th Int. Conf. Solid-State Sens. Actuators (Transducers), Sendai (1999) pp. 1202–1205
27.113
Zurück zum Zitat N. Miki, I. Shimoyama: Flight performance of micro-wings rotating in an alternating magnetic field, Proc. IEEE 12th Int. Conf. Micro Electro Mech. Syst. (MEMS), Orlando (1999) pp. 153–158 N. Miki, I. Shimoyama: Flight performance of micro-wings rotating in an alternating magnetic field, Proc. IEEE 12th Int. Conf. Micro Electro Mech. Syst. (MEMS), Orlando (1999) pp. 153–158
27.115
Zurück zum Zitat K.I. Arai, W. Sugawara, T. Honda: Magnetic small flying machines, IEEE 8th Int. Conf. Solid-State Sens. Actuattors (1995) pp. 316–319 K.I. Arai, W. Sugawara, T. Honda: Magnetic small flying machines, IEEE 8th Int. Conf. Solid-State Sens. Actuattors (1995) pp. 316–319
27.116
Zurück zum Zitat T. Fukuda, A. Kawamoto, F. Arai, H. Matsuura: Mechanism and swimming experiment of micro mobile robot in water, Proc. IEEE 7th Int. Workshop Micro Electro Mech. Syst. (MEMS), Oiso (1994) pp. 273–278 T. Fukuda, A. Kawamoto, F. Arai, H. Matsuura: Mechanism and swimming experiment of micro mobile robot in water, Proc. IEEE 7th Int. Workshop Micro Electro Mech. Syst. (MEMS), Oiso (1994) pp. 273–278
27.117
Zurück zum Zitat I. Shimoyama: Hybrid system of mechanical parts and living organisms for microrobots, Proc. IEEE 6th Int. Symp. Micro Mach. Hum. Sci. (MHS) (1995) p. 55 I. Shimoyama: Hybrid system of mechanical parts and living organisms for microrobots, Proc. IEEE 6th Int. Symp. Micro Mach. Hum. Sci. (MHS) (1995) p. 55
27.118
Zurück zum Zitat A. Ashkin: Acceleration and trapping of particles by radiation pressure, Phys. Rev. Lett. 24, 156–159 (1970)CrossRef A. Ashkin: Acceleration and trapping of particles by radiation pressure, Phys. Rev. Lett. 24, 156–159 (1970)CrossRef
27.119
Zurück zum Zitat T.N. Bruican, M.J. Smyth, H.A. Crissman, G.C. Salzman, C.C. Stewart, J.C. Martin: Automated single-cell manipulation and sorting by light trapping, Appl. Opt. 26, 5311–5316 (1987)CrossRef T.N. Bruican, M.J. Smyth, H.A. Crissman, G.C. Salzman, C.C. Stewart, J.C. Martin: Automated single-cell manipulation and sorting by light trapping, Appl. Opt. 26, 5311–5316 (1987)CrossRef
27.120
Zurück zum Zitat J. Conia, B.S. Edwards, S. Voelkel: The micro-robotic laboratory: Optical trapping and scissing for the biologist, J. Clin. Lab. Anal. 11, 28–38 (1997)CrossRef J. Conia, B.S. Edwards, S. Voelkel: The micro-robotic laboratory: Optical trapping and scissing for the biologist, J. Clin. Lab. Anal. 11, 28–38 (1997)CrossRef
27.121
Zurück zum Zitat W.H. Wright, G.J. Sonek, Y. Tadir, M.W. Berns: Laser trapping in cell biology, IEEE J. Quant. Electron. 26, 2148–2157 (1990)CrossRef W.H. Wright, G.J. Sonek, Y. Tadir, M.W. Berns: Laser trapping in cell biology, IEEE J. Quant. Electron. 26, 2148–2157 (1990)CrossRef
27.122
Zurück zum Zitat F. Arai, K. Morishima, T. Kasugai, T. Fukuda: Bio-micromanipulation (new direction for operation improvement), Proc. IEEE/RSJ Int. Conf. Intell. Robotics Syst. (IROS) (1997) pp. 1300–1305 F. Arai, K. Morishima, T. Kasugai, T. Fukuda: Bio-micromanipulation (new direction for operation improvement), Proc. IEEE/RSJ Int. Conf. Intell. Robotics Syst. (IROS) (1997) pp. 1300–1305
27.123
Zurück zum Zitat M. Nishioka, S. Katsura, K. Hirano, A. Mizuno: Evaluation of cell characteristics by step-wise orientational rotation using optoelectrostatic micromanipulation, IEEE Trans. Ind. Appl. 33, 1381–1388 (1997)CrossRef M. Nishioka, S. Katsura, K. Hirano, A. Mizuno: Evaluation of cell characteristics by step-wise orientational rotation using optoelectrostatic micromanipulation, IEEE Trans. Ind. Appl. 33, 1381–1388 (1997)CrossRef
27.124
Zurück zum Zitat M. Washizu, Y. Kurahashi, H. Iochi, O. Kurosawa, S. Aizawa, S. Kudo, Y. Magariyama, H. Hotani: Dielectrophoretic measurement of bacterial motor characteristics, IEEE Trans. Ind. Appl. 29, 286–294 (1993)CrossRef M. Washizu, Y. Kurahashi, H. Iochi, O. Kurosawa, S. Aizawa, S. Kudo, Y. Magariyama, H. Hotani: Dielectrophoretic measurement of bacterial motor characteristics, IEEE Trans. Ind. Appl. 29, 286–294 (1993)CrossRef
27.125
Zurück zum Zitat Y. Kimura, R. Yanagimachi: Intracytoplasmic sperm injection in the mouse, Biol. Reprod. 52, 709–720 (1995)CrossRef Y. Kimura, R. Yanagimachi: Intracytoplasmic sperm injection in the mouse, Biol. Reprod. 52, 709–720 (1995)CrossRef
27.126
Zurück zum Zitat M. Mischel, A. Voss, H.A. Pohl: Cellular spin resonance in rotating electric fields, J. Biol. Phys. 10, 223–226 (1982)CrossRef M. Mischel, A. Voss, H.A. Pohl: Cellular spin resonance in rotating electric fields, J. Biol. Phys. 10, 223–226 (1982)CrossRef
27.127
Zurück zum Zitat W.M. Arnold, U. Zimmermann: Electro-Rotation: Development of a technique for dielectric measurements on individual cells and particles, J. Electrost. 21, 151–191 (1988)CrossRef W.M. Arnold, U. Zimmermann: Electro-Rotation: Development of a technique for dielectric measurements on individual cells and particles, J. Electrost. 21, 151–191 (1988)CrossRef
27.128
Zurück zum Zitat Y. Sun, B.J. Nelson: Autonomous injection of biological cells using visual servoing, Int. Symp. Experim. Robotics (ISER) (2000) pp. 175–184 Y. Sun, B.J. Nelson: Autonomous injection of biological cells using visual servoing, Int. Symp. Experim. Robotics (ISER) (2000) pp. 175–184
27.129
Zurück zum Zitat Y. Sun, B.J. Nelson, D.P. Potasek, E. Enikov: A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives, J. Micromech. Microeng. 12, 832–840 (2002)CrossRef Y. Sun, B.J. Nelson, D.P. Potasek, E. Enikov: A bulk microfabricated multi-axis capacitive cellular force sensor using transverse comb drives, J. Micromech. Microeng. 12, 832–840 (2002)CrossRef
27.130
Zurück zum Zitat Y. Sun, K. Wan, K.P. Roberts, J.C. Bischof, B.J. Nelson: Mechanical property characterization of mouse zona pellucida, IEEE Trans. Nanobiosci. 2, 279–286 (2003)CrossRef Y. Sun, K. Wan, K.P. Roberts, J.C. Bischof, B.J. Nelson: Mechanical property characterization of mouse zona pellucida, IEEE Trans. Nanobiosci. 2, 279–286 (2003)CrossRef
27.131
Zurück zum Zitat E.M. Purcell: Life at low Reynolds-number, Am. J. Phy. 45, 3–11 (1977)CrossRef E.M. Purcell: Life at low Reynolds-number, Am. J. Phy. 45, 3–11 (1977)CrossRef
27.132
Zurück zum Zitat R. Dreyfus, J. Baudry, M.L. Roper, M. Fermigier, H.A. Stone, J. Bibette: Microscopic artificial swimmers, Nature 437, 862–865 (2005)MATHCrossRef R. Dreyfus, J. Baudry, M.L. Roper, M. Fermigier, H.A. Stone, J. Bibette: Microscopic artificial swimmers, Nature 437, 862–865 (2005)MATHCrossRef
27.133
Zurück zum Zitat H.C. Berg, R.A. Anderson: Bacteria swim by rotating their flagellar filaments, Nature 245, 380–382 (1973)CrossRef H.C. Berg, R.A. Anderson: Bacteria swim by rotating their flagellar filaments, Nature 245, 380–382 (1973)CrossRef
27.134
Zurück zum Zitat L. Zhang, J.J. Abbott, L.X. Dong, B.E. Kratochvil, D.J. Bell, B.J. Nelson: Artificial bacterial flagella: Fabrication and magnetic control, Appl. Phys. Lett. 94, 064107 (2009)CrossRef L. Zhang, J.J. Abbott, L.X. Dong, B.E. Kratochvil, D.J. Bell, B.J. Nelson: Artificial bacterial flagella: Fabrication and magnetic control, Appl. Phys. Lett. 94, 064107 (2009)CrossRef
27.135
Zurück zum Zitat L. Zhang, E. Deckhardt, A. Weber, C. Schonenberger, D. Grutzmacher: Controllable fabrication of SiGe/Si and SiGe/Si/Cr helical nanobelts, Nanotechnology 16, 655–663 (2005)CrossRef L. Zhang, E. Deckhardt, A. Weber, C. Schonenberger, D. Grutzmacher: Controllable fabrication of SiGe/Si and SiGe/Si/Cr helical nanobelts, Nanotechnology 16, 655–663 (2005)CrossRef
27.136
Zurück zum Zitat V.Y. Prinz, V.A. Seleznev, A.K. Gutakovsky, A.V. Chehovskiy, V.V. Preobrazhenskii, M.A. Putyato, T.A. Gavrilova: Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays, Physica E Low-Dimen. Syst. Nanostructures 6, 828–831 (2000)CrossRef V.Y. Prinz, V.A. Seleznev, A.K. Gutakovsky, A.V. Chehovskiy, V.V. Preobrazhenskii, M.A. Putyato, T.A. Gavrilova: Free-standing and overgrown InGaAs/GaAs nanotubes, nanohelices and their arrays, Physica E Low-Dimen. Syst. Nanostructures 6, 828–831 (2000)CrossRef
27.137
Zurück zum Zitat F.B. Hagedorn, E.M. Gyorgy: Magnetic-Shape Anisotropy in Polygonal Prisms, J. Appl. Phys. 39, 995–997 (1968)CrossRef F.B. Hagedorn, E.M. Gyorgy: Magnetic-Shape Anisotropy in Polygonal Prisms, J. Appl. Phys. 39, 995–997 (1968)CrossRef
27.138
Zurück zum Zitat H.C. Berg, D.A. Brown: Chemotaxis in escherichia-coli analyzed by 3-dimensional tracking, Nature 239, 500–504 (1972)CrossRef H.C. Berg, D.A. Brown: Chemotaxis in escherichia-coli analyzed by 3-dimensional tracking, Nature 239, 500–504 (1972)CrossRef
27.139
Zurück zum Zitat A. Ashkin, J.M. Dziedzic: Optical trapping and manipulation of viruses and bacteria, Science 235, 1517–1520 (1987)CrossRef A. Ashkin, J.M. Dziedzic: Optical trapping and manipulation of viruses and bacteria, Science 235, 1517–1520 (1987)CrossRef
27.140
Zurück zum Zitat F.H.C. Crick, A.F.W. Hughes: The physical properties of cytoplasm: A study by means of the magnetic particle method, Part I, Exp. Cell Res. 1, 37–80 (1950)CrossRef F.H.C. Crick, A.F.W. Hughes: The physical properties of cytoplasm: A study by means of the magnetic particle method, Part I, Exp. Cell Res. 1, 37–80 (1950)CrossRef
27.141
Zurück zum Zitat M.F. Yu, M.J. Dyer, G.D. Skidmore, H.W. Rohrs, X.K. Lu, K.D. Ausman, J.R.V. Ehr, R.S. Ruoff: Three-dimensional manipulation of carbon nanotubes under a scanning electron microscope, Nanotechnology 10, 244–252 (1999)CrossRef M.F. Yu, M.J. Dyer, G.D. Skidmore, H.W. Rohrs, X.K. Lu, K.D. Ausman, J.R.V. Ehr, R.S. Ruoff: Three-dimensional manipulation of carbon nanotubes under a scanning electron microscope, Nanotechnology 10, 244–252 (1999)CrossRef
27.142
Zurück zum Zitat L.X. Dong, F. Arai, T. Fukuda: 3D nanorobotic manipulation of nano-order objects inside SEM, Proc. Int. Symp. Micromechatron. Hum. Sci. (MHS) (2000) pp. 151–156 L.X. Dong, F. Arai, T. Fukuda: 3D nanorobotic manipulation of nano-order objects inside SEM, Proc. Int. Symp. Micromechatron. Hum. Sci. (MHS) (2000) pp. 151–156
27.143
Zurück zum Zitat D.M. Eigler, E.K. Schweizer: Positioning single atoms with a scanning tunneling microscope, Nature 344, 524–526 (1990)CrossRef D.M. Eigler, E.K. Schweizer: Positioning single atoms with a scanning tunneling microscope, Nature 344, 524–526 (1990)CrossRef
27.144
Zurück zum Zitat P. Avouris: Manipulation of matter at the atomic and molecular levels, Acc. Chem. Res. 28, 95–102 (1995)CrossRef P. Avouris: Manipulation of matter at the atomic and molecular levels, Acc. Chem. Res. 28, 95–102 (1995)CrossRef
27.145
Zurück zum Zitat M.F. Crommie, C.P. Lutz, D.M. Eigler: Confinement of electrons to quantum corrals on a metal surface, Science 262, 218–220 (1993)CrossRef M.F. Crommie, C.P. Lutz, D.M. Eigler: Confinement of electrons to quantum corrals on a metal surface, Science 262, 218–220 (1993)CrossRef
27.146
Zurück zum Zitat L.J. Whitman, J.A. Stroscio, R.A. Dragoset, R.J. Cellota: Manipulation of adsorbed atoms and creation of new structures on room-temperature surfaces with a scanning tunneling microscope, Science 251, 1206–1210 (1991)CrossRef L.J. Whitman, J.A. Stroscio, R.A. Dragoset, R.J. Cellota: Manipulation of adsorbed atoms and creation of new structures on room-temperature surfaces with a scanning tunneling microscope, Science 251, 1206–1210 (1991)CrossRef
27.147
Zurück zum Zitat I.-W. Lyo, P. Avouris: Field-induced nanometer-scale to atomic-scale manipulation of silicon surfaces with the STM, Science 253, 173–176 (1991)CrossRef I.-W. Lyo, P. Avouris: Field-induced nanometer-scale to atomic-scale manipulation of silicon surfaces with the STM, Science 253, 173–176 (1991)CrossRef
27.148
Zurück zum Zitat G. Dujardin, R.E. Walkup, P. Avouris: Dissociation of individual molecules with electrons from the tip of a scanning tunneling microscope, Science 255, 1232–1235 (1992)CrossRef G. Dujardin, R.E. Walkup, P. Avouris: Dissociation of individual molecules with electrons from the tip of a scanning tunneling microscope, Science 255, 1232–1235 (1992)CrossRef
27.149
Zurück zum Zitat T.-C. Shen, C. Wang, G.C. Abeln, J.R. Tucker, J.W. Lyding, P. Avouris, R.E. Walkup: Atomic-scale desorption through electronic and vibrational-excitation mechanisms, Science 268, 1590–1592 (1995)CrossRef T.-C. Shen, C. Wang, G.C. Abeln, J.R. Tucker, J.W. Lyding, P. Avouris, R.E. Walkup: Atomic-scale desorption through electronic and vibrational-excitation mechanisms, Science 268, 1590–1592 (1995)CrossRef
27.150
Zurück zum Zitat M.T. Cuberes, R.R. Schittler, J.K. Gimzewsk: Room-temperature repositioning of individual C60 molecules at Cu steps: operation of a molecular counting device, Appl. Phys. Lett. 69, 3016–3018 (1996)CrossRef M.T. Cuberes, R.R. Schittler, J.K. Gimzewsk: Room-temperature repositioning of individual C60 molecules at Cu steps: operation of a molecular counting device, Appl. Phys. Lett. 69, 3016–3018 (1996)CrossRef
27.151
Zurück zum Zitat H.J. Lee, W. Ho: Single-bond formation and characterization with a scanning tunneling microscope, Science 286, 1719–1722 (1999)CrossRef H.J. Lee, W. Ho: Single-bond formation and characterization with a scanning tunneling microscope, Science 286, 1719–1722 (1999)CrossRef
27.152
Zurück zum Zitat T. Yamamoto, O. Kurosawa, H. Kabata, N. Shimamoto, M. Washizu: Molecular surgery of DNA based on electrostatic micromanipulation, IEEE Trans. Ind. Appl. 36, 1010–1017 (2000)CrossRef T. Yamamoto, O. Kurosawa, H. Kabata, N. Shimamoto, M. Washizu: Molecular surgery of DNA based on electrostatic micromanipulation, IEEE Trans. Ind. Appl. 36, 1010–1017 (2000)CrossRef
27.153
Zurück zum Zitat C. Haber, D. Wirtz: Magnetic tweezers for DNA micromanipulation, Rev. Sci. Instrum. 71, 4561–4570 (2000)CrossRef C. Haber, D. Wirtz: Magnetic tweezers for DNA micromanipulation, Rev. Sci. Instrum. 71, 4561–4570 (2000)CrossRef
27.154
Zurück zum Zitat D.M. Schaefer, R. Reifenberger, A. Patil, R.P. Andres: Fabrication of two-dimensional arrays of nanometer-size clusters with the atomic force microscope, Appl. Phys. Lett. 66, 1012–1014 (1995)CrossRef D.M. Schaefer, R. Reifenberger, A. Patil, R.P. Andres: Fabrication of two-dimensional arrays of nanometer-size clusters with the atomic force microscope, Appl. Phys. Lett. 66, 1012–1014 (1995)CrossRef
27.155
Zurück zum Zitat T. Junno, K. Deppert, L. Montelius, L. Samuelson: Controlled manipulation of nanoparticles with an atomic force microscope, Appl. Phys. Lett. 66, 3627–3629 (1995)CrossRef T. Junno, K. Deppert, L. Montelius, L. Samuelson: Controlled manipulation of nanoparticles with an atomic force microscope, Appl. Phys. Lett. 66, 3627–3629 (1995)CrossRef
27.156
Zurück zum Zitat P.E. Sheehan, C.M. Lieber: Nanomachining, manipulation and fabrication by force microscopy, Nanotechnology 7, 236–240 (1996)CrossRef P.E. Sheehan, C.M. Lieber: Nanomachining, manipulation and fabrication by force microscopy, Nanotechnology 7, 236–240 (1996)CrossRef
27.157
Zurück zum Zitat C. Baur, B.C. Gazen, B. Koel, T.R. Ramachandran, A.A.G. Requicha, L. Zini: Robotic nanomanipulation with a scanning probe microscope in a networked computing environment, J. Vac. Sci. Tech. B 15, 1577–1580 (1997)CrossRef C. Baur, B.C. Gazen, B. Koel, T.R. Ramachandran, A.A.G. Requicha, L. Zini: Robotic nanomanipulation with a scanning probe microscope in a networked computing environment, J. Vac. Sci. Tech. B 15, 1577–1580 (1997)CrossRef
27.158
Zurück zum Zitat A.A.G. Requicha: Nanorobots, NEMS, and nanoassembly, Proceedings IEEE 91, 1922–1933 (2003)CrossRef A.A.G. Requicha: Nanorobots, NEMS, and nanoassembly, Proceedings IEEE 91, 1922–1933 (2003)CrossRef
27.159
Zurück zum Zitat R. Resch, C. Baur, A. Bugacov, B.E. Koel, A. Madhukar, A.A.G. Requicha, P. Will: Building and manipulating 3-D and linked 2-D structures of nanoparticles using scanning force microscopy, Langmuir 14, 6613–6616 (1998)CrossRef R. Resch, C. Baur, A. Bugacov, B.E. Koel, A. Madhukar, A.A.G. Requicha, P. Will: Building and manipulating 3-D and linked 2-D structures of nanoparticles using scanning force microscopy, Langmuir 14, 6613–6616 (1998)CrossRef
27.160
Zurück zum Zitat J. Hu, Z.-H. Zhang, Z.-Q. Ouyang, S.-F. Chen, M.-Q. Li, F.-J. Yang: Stretch and align virus in nanometer scale on an atomically flat surface, J. Vac. Sci. Tech. B 16, 2841–2843 (1998)CrossRef J. Hu, Z.-H. Zhang, Z.-Q. Ouyang, S.-F. Chen, M.-Q. Li, F.-J. Yang: Stretch and align virus in nanometer scale on an atomically flat surface, J. Vac. Sci. Tech. B 16, 2841–2843 (1998)CrossRef
27.161
Zurück zum Zitat M. Sitti, S. Horiguchi, H. Hashimoto: Controlled pushing of nanoparticles: modeling and experiments, IEEE/ASME Trans. Mechatron. 5, 199–211 (2000)CrossRef M. Sitti, S. Horiguchi, H. Hashimoto: Controlled pushing of nanoparticles: modeling and experiments, IEEE/ASME Trans. Mechatron. 5, 199–211 (2000)CrossRef
27.162
Zurück zum Zitat M. Guthold, M.R. Falvo, W.G. Matthews, S. Paulson, S. Washburn, D.A. Erie, R. Superfine, J.F.P. Brooks, I.R.M. Taylor: Controlled manipulation of molecular samples with the nanoManipulator, IEEE/ASME Trans. Mechatron. 5, 189–198 (2000)CrossRef M. Guthold, M.R. Falvo, W.G. Matthews, S. Paulson, S. Washburn, D.A. Erie, R. Superfine, J.F.P. Brooks, I.R.M. Taylor: Controlled manipulation of molecular samples with the nanoManipulator, IEEE/ASME Trans. Mechatron. 5, 189–198 (2000)CrossRef
27.163
Zurück zum Zitat G.Y. Li, N. Xi, M.M. Yu, W.K. Fung: Development of augmented reality system for AFM-based nanomanipulation, IEEE/ASME Trans. Mechatron. 9, 358–365 (2004)CrossRef G.Y. Li, N. Xi, M.M. Yu, W.K. Fung: Development of augmented reality system for AFM-based nanomanipulation, IEEE/ASME Trans. Mechatron. 9, 358–365 (2004)CrossRef
27.164
Zurück zum Zitat F. Arai, D. Andou, T. Fukuda: Micro manipulation based on micro physics–strategy based on attractive force reduction and stress measurement, Proc. IEEE/RSJ Int. Conf. Intell. Robotics Syst. (1995) pp. 236–241 F. Arai, D. Andou, T. Fukuda: Micro manipulation based on micro physics–strategy based on attractive force reduction and stress measurement, Proc. IEEE/RSJ Int. Conf. Intell. Robotics Syst. (1995) pp. 236–241
27.165
Zurück zum Zitat H.W.P. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm, K.L. Lee: Characterization and application of materials grown by electron-beam-induced deposition, Jpn. J. Appl. Phys. 33, 7099–7107 (1994)CrossRef H.W.P. Koops, J. Kretz, M. Rudolph, M. Weber, G. Dahm, K.L. Lee: Characterization and application of materials grown by electron-beam-induced deposition, Jpn. J. Appl. Phys. 33, 7099–7107 (1994)CrossRef
27.166
Zurück zum Zitat S. Iijima: Helical microtubules of graphitic carbon, Nature 354, 56–58 (1991)CrossRef S. Iijima: Helical microtubules of graphitic carbon, Nature 354, 56–58 (1991)CrossRef
27.167
Zurück zum Zitat S.J. Tans, A.R.M. Verchueren, C. Dekker: Room-temperature transistor based on a single carbon nanotube, Nature 393, 49–52 (1998)CrossRef S.J. Tans, A.R.M. Verchueren, C. Dekker: Room-temperature transistor based on a single carbon nanotube, Nature 393, 49–52 (1998)CrossRef
27.168
Zurück zum Zitat R.H. Baughman, A.A. Zakhidov, W.A. de Heer: Carbon nanotubes-the route toward applications, Science 297, 787–792 (2002)CrossRef R.H. Baughman, A.A. Zakhidov, W.A. de Heer: Carbon nanotubes-the route toward applications, Science 297, 787–792 (2002)CrossRef
27.169
Zurück zum Zitat M.J. Treacy, T.W. Ebbesen, J.M. Gibson: Exceptionally high Young's modulus observed for individual carbon nanotubes, Nature 381, 678–680 (1996)CrossRef M.J. Treacy, T.W. Ebbesen, J.M. Gibson: Exceptionally high Young's modulus observed for individual carbon nanotubes, Nature 381, 678–680 (1996)CrossRef
27.170
Zurück zum Zitat P. Poncharal, Z.L. Wang, D. Ugarte, W.A. de Heer: Electrostatic deflections and electromechanical resonances of carbon nanotubes, Science 283, 1513–1516 (1999)CrossRef P. Poncharal, Z.L. Wang, D. Ugarte, W.A. de Heer: Electrostatic deflections and electromechanical resonances of carbon nanotubes, Science 283, 1513–1516 (1999)CrossRef
27.171
Zurück zum Zitat M.F. Yu, O. Lourie, M.J. Dyer, K. Moloni, T.F. Kelley, R.S. Ruoff: Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load, Science 287, 637–640 (2000)CrossRef M.F. Yu, O. Lourie, M.J. Dyer, K. Moloni, T.F. Kelley, R.S. Ruoff: Strength and breaking mechanism of multiwalled carbon nanotubes under tensile load, Science 287, 637–640 (2000)CrossRef
27.172
Zurück zum Zitat T.W. Ebbesen, H.J. Lezec, H. Hiura, J.W. Bennett, H.F. Ghaemi, T. Thio: Electrical conductivity of individual carbon nanotubes, Nature 382, 54–56 (1996)CrossRef T.W. Ebbesen, H.J. Lezec, H. Hiura, J.W. Bennett, H.F. Ghaemi, T. Thio: Electrical conductivity of individual carbon nanotubes, Nature 382, 54–56 (1996)CrossRef
27.173
Zurück zum Zitat P. Kim, L. Shi, A. Majumdar, P.L. McEuen: Thermal transport measurements of individual multiwalled nanotubes, Phys. Rev. Lett. 87, 215502 (2001)CrossRef P. Kim, L. Shi, A. Majumdar, P.L. McEuen: Thermal transport measurements of individual multiwalled nanotubes, Phys. Rev. Lett. 87, 215502 (2001)CrossRef
27.174
Zurück zum Zitat W.J. Liang, M. Bockrath, D. Bozovic, J.H. Hafner, M. Tinkham, H. Park: Fabry-Perot interference in a nanotube electron waveguide, Nature 411, 665–669 (2001)CrossRef W.J. Liang, M. Bockrath, D. Bozovic, J.H. Hafner, M. Tinkham, H. Park: Fabry-Perot interference in a nanotube electron waveguide, Nature 411, 665–669 (2001)CrossRef
27.175
Zurück zum Zitat X.B. Zhang, D. Bernaerts, G.V. Tendeloo, S. Amelincks, J.V. Landuyt, V. Ivanov, J.B. Nagy, P. Lambin, A.A. Lucas: The texture of catalytically grown coil-shaped carbon nanotubules, Europhys. Lett. 27, 141–146 (1994)CrossRef X.B. Zhang, D. Bernaerts, G.V. Tendeloo, S. Amelincks, J.V. Landuyt, V. Ivanov, J.B. Nagy, P. Lambin, A.A. Lucas: The texture of catalytically grown coil-shaped carbon nanotubules, Europhys. Lett. 27, 141–146 (1994)CrossRef
27.176
Zurück zum Zitat X.Y. Kong, Z.L. Wang: Spontaneous polarization-induced nanohelixes, nanosprings, and nanorings of piezoelectric nanobelts, Nano Lett. 3, 1625–1631 (2003)CrossRef X.Y. Kong, Z.L. Wang: Spontaneous polarization-induced nanohelixes, nanosprings, and nanorings of piezoelectric nanobelts, Nano Lett. 3, 1625–1631 (2003)CrossRef
27.177
Zurück zum Zitat S.V. Golod, V.Y. Prinz, V.I. Mashanov, A.K. Gutakovsky: Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils, Semicond. Sci. Technol. 16, 181–185 (2001)CrossRef S.V. Golod, V.Y. Prinz, V.I. Mashanov, A.K. Gutakovsky: Fabrication of conducting GeSi/Si micro- and nanotubes and helical microcoils, Semicond. Sci. Technol. 16, 181–185 (2001)CrossRef
27.178
Zurück zum Zitat L. Zhang, E. Deckhardt, A. Weber, C. Schönenberger, D. Grützmacher: Controllable fabrication of SiGe/Si and SiGe/Si/Cr helical nanobelts, Nanotechnology 16, 655–663 (2005)CrossRef L. Zhang, E. Deckhardt, A. Weber, C. Schönenberger, D. Grützmacher: Controllable fabrication of SiGe/Si and SiGe/Si/Cr helical nanobelts, Nanotechnology 16, 655–663 (2005)CrossRef
27.179
Zurück zum Zitat L. Zhang, E. Ruh, D. Grützmacher, L.X. Dong, D.J. Bell, B.J. Nelson, C. Schönenberger: Anomalous coiling of SiGe/Si and SiGe/Si/Cr helical nanobelts, Nano Lett. 6, 1311–1317 (2006)CrossRef L. Zhang, E. Ruh, D. Grützmacher, L.X. Dong, D.J. Bell, B.J. Nelson, C. Schönenberger: Anomalous coiling of SiGe/Si and SiGe/Si/Cr helical nanobelts, Nano Lett. 6, 1311–1317 (2006)CrossRef
27.180
Zurück zum Zitat D.J. Bell, L.X. Dong, B.J. Nelson, M. Golling, L. Zhang, D. Grützmacher: Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings, Nano Lett. 6, 725–729 (2006)CrossRef D.J. Bell, L.X. Dong, B.J. Nelson, M. Golling, L. Zhang, D. Grützmacher: Fabrication and characterization of three-dimensional InGaAs/GaAs nanosprings, Nano Lett. 6, 725–729 (2006)CrossRef
27.181
Zurück zum Zitat D.J. Bell, Y. Sun, L. Zhang, L.X. Dong, B.J. Nelson, D. Grutzmacher: Three-dimensional nanosprings for electromechanical sensors, Sens. Actuators A Phys. 130, 54–61 (2006)CrossRef D.J. Bell, Y. Sun, L. Zhang, L.X. Dong, B.J. Nelson, D. Grutzmacher: Three-dimensional nanosprings for electromechanical sensors, Sens. Actuators A Phys. 130, 54–61 (2006)CrossRef
27.182
Zurück zum Zitat R. Martel, T. Schmidt, H.R. Shea, T. Herte, P. Avouris: Single- and multi-wall carbon nanotube field-effect transistors, Appl. Phys. Lett. 73, 2447–2449 (1998)CrossRef R. Martel, T. Schmidt, H.R. Shea, T. Herte, P. Avouris: Single- and multi-wall carbon nanotube field-effect transistors, Appl. Phys. Lett. 73, 2447–2449 (1998)CrossRef
27.183
Zurück zum Zitat N.R. Franklin, Y.M. Li, R.J. Chen, A. Javey, H.J. Dai: Patterned growth of single-walled carbon nanotubes on full 4-inch wafers, Appl. Phys. Lett. 79, 4571–4573 (2001)CrossRef N.R. Franklin, Y.M. Li, R.J. Chen, A. Javey, H.J. Dai: Patterned growth of single-walled carbon nanotubes on full 4-inch wafers, Appl. Phys. Lett. 79, 4571–4573 (2001)CrossRef
27.184
Zurück zum Zitat T. Rueckes, K. Kim, E. Joselevich, G.Y. Tseng, C.-L. Cheung, C.M. Lieber: Carbon nanotube-based non-volatile random access memory for molecular computing science, Science 289, 94–97 (2000)CrossRef T. Rueckes, K. Kim, E. Joselevich, G.Y. Tseng, C.-L. Cheung, C.M. Lieber: Carbon nanotube-based non-volatile random access memory for molecular computing science, Science 289, 94–97 (2000)CrossRef
27.185
Zurück zum Zitat A. Subramanian, B. Vikramaditya, L.X. Dong, D.J. Bell, B.J. Nelson: Micro and nanorobotic assembly using dielectrophoresis. In: Robotics Sci. Syst, ed. by S. Thrun, G.S. Sukhatme, S. Schaal, O. Brock (MIT Press, Cambridge 2005) pp. 327–334 A. Subramanian, B. Vikramaditya, L.X. Dong, D.J. Bell, B.J. Nelson: Micro and nanorobotic assembly using dielectrophoresis. In: Robotics Sci. Syst, ed. by S. Thrun, G.S. Sukhatme, S. Schaal, O. Brock (MIT Press, Cambridge 2005) pp. 327–334
27.186
Zurück zum Zitat C.K.M. Fung, V.T.S. Wong, R.H.M. Chan, W.J. Li: Dielectrophoretic batch fabrication of bundled carbon nanotube thermal sensors, IEEE Trans. Nanotechnol. 3, 395–403 (2004)CrossRef C.K.M. Fung, V.T.S. Wong, R.H.M. Chan, W.J. Li: Dielectrophoretic batch fabrication of bundled carbon nanotube thermal sensors, IEEE Trans. Nanotechnol. 3, 395–403 (2004)CrossRef
27.187
Zurück zum Zitat T. Fukuda, F. Arai, L.X. Dong: Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations, Proceedings IEEE 91, 1803–1818 (2003)CrossRef T. Fukuda, F. Arai, L.X. Dong: Assembly of nanodevices with carbon nanotubes through nanorobotic manipulations, Proceedings IEEE 91, 1803–1818 (2003)CrossRef
27.188
Zurück zum Zitat E.W. Wong, P.E. Sheehan, C.M. Lieber: Nanobeam mechanics: elasticity, strength, and toughness of nanorods and nanotubes, Science 277, 1971–1975 (1997)CrossRef E.W. Wong, P.E. Sheehan, C.M. Lieber: Nanobeam mechanics: elasticity, strength, and toughness of nanorods and nanotubes, Science 277, 1971–1975 (1997)CrossRef
27.189
Zurück zum Zitat M.R. Falvo, G.J. Clary, R.M. Taylor, V. Chi, F.P. Brooks, S. Washburn, R. Superfine: Bending and buckling of carbon nanotubes under large strain, Nature 389, 582–584 (1997)CrossRef M.R. Falvo, G.J. Clary, R.M. Taylor, V. Chi, F.P. Brooks, S. Washburn, R. Superfine: Bending and buckling of carbon nanotubes under large strain, Nature 389, 582–584 (1997)CrossRef
27.190
Zurück zum Zitat H.W.C. Postma, A. Sellmeijer, C. Dekker: Manipulation and imaging of individual single-walled carbon nanotubes with an atomic force microscope, Adv. Mater. 12, 1299–1302 (2000)CrossRef H.W.C. Postma, A. Sellmeijer, C. Dekker: Manipulation and imaging of individual single-walled carbon nanotubes with an atomic force microscope, Adv. Mater. 12, 1299–1302 (2000)CrossRef
27.191
Zurück zum Zitat T. Hertel, R. Martel, P. Avouris: Manipulation of individual carbon nanotubes and their interaction with surfaces, J. Phys. Chem. B 102, 910–915 (1998)CrossRef T. Hertel, R. Martel, P. Avouris: Manipulation of individual carbon nanotubes and their interaction with surfaces, J. Phys. Chem. B 102, 910–915 (1998)CrossRef
27.192
Zurück zum Zitat P. Avouris, T. Hertel, R. Martel, T. Schmidt, H.R. Shea, R.E. Walkup: Carbon nanotubes: nanomechanics, manipulation, and electronic devices, Appl. Surf. Sci. 141, 201–209 (1999)CrossRef P. Avouris, T. Hertel, R. Martel, T. Schmidt, H.R. Shea, R.E. Walkup: Carbon nanotubes: nanomechanics, manipulation, and electronic devices, Appl. Surf. Sci. 141, 201–209 (1999)CrossRef
27.193
Zurück zum Zitat M. Ahlskog, R. Tarkiainen, L. Roschier, P. Hakonen: Single-electron transistor made of two crossing multiwalled carbon nanotubes and its noise properties, Appl. Phys. Lett. 77, 4037–4039 (2000)CrossRef M. Ahlskog, R. Tarkiainen, L. Roschier, P. Hakonen: Single-electron transistor made of two crossing multiwalled carbon nanotubes and its noise properties, Appl. Phys. Lett. 77, 4037–4039 (2000)CrossRef
27.194
Zurück zum Zitat M.R. Falvo, R.M.I. Taylor, A. Helser, V. Chi, F.P.J. Brooks, S. Washburn, R. Superfine: Nanometre-scale rolling and sliding of carbon nanotubes, Nature 397, 236–238 (1999)CrossRef M.R. Falvo, R.M.I. Taylor, A. Helser, V. Chi, F.P.J. Brooks, S. Washburn, R. Superfine: Nanometre-scale rolling and sliding of carbon nanotubes, Nature 397, 236–238 (1999)CrossRef
27.195
Zurück zum Zitat B. Bhushan, V.N. Koinkar: Nanoindentation hardness measurements using atomic-force microscopy, Appl. Phys. Lett. 64, 1653–1655 (1994)CrossRef B. Bhushan, V.N. Koinkar: Nanoindentation hardness measurements using atomic-force microscopy, Appl. Phys. Lett. 64, 1653–1655 (1994)CrossRef
27.196
Zurück zum Zitat P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, W. Haberle, M.A. Lantz, H.E. Rothuizen, R. Stutz, G.K. Binnig: The millipede - Nanotechnology entering data storage, IEEE Trans. Nanotechnol. 1, 39–55 (2002)CrossRef P. Vettiger, G. Cross, M. Despont, U. Drechsler, U. Durig, B. Gotsmann, W. Haberle, M.A. Lantz, H.E. Rothuizen, R. Stutz, G.K. Binnig: The millipede - Nanotechnology entering data storage, IEEE Trans. Nanotechnol. 1, 39–55 (2002)CrossRef
27.197
Zurück zum Zitat L.X. Dong: Nanorobotic manipulations of carbon nanotubes. Ph.D. Thesis Ser (Nagoya Univ., Nagoya 2003) L.X. Dong: Nanorobotic manipulations of carbon nanotubes. Ph.D. Thesis Ser (Nagoya Univ., Nagoya 2003)
27.198
Zurück zum Zitat J.H. Hafner, C.-L. Cheung, T.H. Oosterkamp, C.M. Lieber: High-yield assembly of individual single-walled carbon nanotube tips for scanning probe microscopies, J. Phys. Chem. B 105, 743–746 (2001)CrossRef J.H. Hafner, C.-L. Cheung, T.H. Oosterkamp, C.M. Lieber: High-yield assembly of individual single-walled carbon nanotube tips for scanning probe microscopies, J. Phys. Chem. B 105, 743–746 (2001)CrossRef
27.199
Zurück zum Zitat L.X. Dong, F. Arai, T. Fukuda: Electron-beam-induced deposition with carbon nanotube emitters, Appl. Phys. Lett. 81, 1919–1921 (2002)CrossRef L.X. Dong, F. Arai, T. Fukuda: Electron-beam-induced deposition with carbon nanotube emitters, Appl. Phys. Lett. 81, 1919–1921 (2002)CrossRef
27.200
Zurück zum Zitat L.X. Dong, F. Arai, T. Fukuda: 3D nanorobotic manipulations of multi-walled carbon nanotubes, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (2001) pp. 632–637 L.X. Dong, F. Arai, T. Fukuda: 3D nanorobotic manipulations of multi-walled carbon nanotubes, Proc. IEEE Int. Conf. Robotics Autom. (ICRA) (2001) pp. 632–637
27.201
Zurück zum Zitat L.X. Dong, F. Arai, T. Fukuda: Destructive constructions of nanostructures with carbon nanotubes through nanorobotic manipulation, IEEE/ASME Trans. Mechatron. 9, 350–357 (2004)CrossRef L.X. Dong, F. Arai, T. Fukuda: Destructive constructions of nanostructures with carbon nanotubes through nanorobotic manipulation, IEEE/ASME Trans. Mechatron. 9, 350–357 (2004)CrossRef
27.202
Zurück zum Zitat J. Cumings, P.G. Collins, A. Zettl: Peeling and sharpening multiwall nanotubes, Nature 406, 58 (2000)CrossRef J. Cumings, P.G. Collins, A. Zettl: Peeling and sharpening multiwall nanotubes, Nature 406, 58 (2000)CrossRef
27.203
Zurück zum Zitat J. Cumings, A. Zettl: Low-friction nanoscale linear bearing realized from multiwall carbon nanotubes, Science 289, 602–604 (2000)CrossRef J. Cumings, A. Zettl: Low-friction nanoscale linear bearing realized from multiwall carbon nanotubes, Science 289, 602–604 (2000)CrossRef
27.204
Zurück zum Zitat A. Kis, K. Jensen, S. Aloni, W. Mickelson, A. Zettl: Interlayer forces and ultralow sliding friction in multiwalled carbon nanotubes, Phys. Rev. Lett. 97, 025501 (2006)CrossRef A. Kis, K. Jensen, S. Aloni, W. Mickelson, A. Zettl: Interlayer forces and ultralow sliding friction in multiwalled carbon nanotubes, Phys. Rev. Lett. 97, 025501 (2006)CrossRef
27.205
Zurück zum Zitat L.X. Dong, F. Arai, T. Fukuda: Nanoassembly of carbon nanotubes through mechanochemical nanorobotic manipulations, Jpn. J. Appl. Phys. 42, 295–298 (2003)CrossRef L.X. Dong, F. Arai, T. Fukuda: Nanoassembly of carbon nanotubes through mechanochemical nanorobotic manipulations, Jpn. J. Appl. Phys. 42, 295–298 (2003)CrossRef
27.206
Zurück zum Zitat L. Chico, V.H. Crespi, L.X. Benedict, S.G. Louie, M.L. Cohen: Pure carbon nanoscale devices: Nanotube heterojunctions, Phys. Rev. Lett. 76, 971–974 (1996)CrossRef L. Chico, V.H. Crespi, L.X. Benedict, S.G. Louie, M.L. Cohen: Pure carbon nanoscale devices: Nanotube heterojunctions, Phys. Rev. Lett. 76, 971–974 (1996)CrossRef
27.207
Zurück zum Zitat Z. Yao, H.W.C. Postma, L. Balents, C. Dekker: Carbon nanotube intramolecular junctions, Nature 402, 273–276 (1999)CrossRef Z. Yao, H.W.C. Postma, L. Balents, C. Dekker: Carbon nanotube intramolecular junctions, Nature 402, 273–276 (1999)CrossRef
27.208
Zurück zum Zitat H.W.C. Postma, T. Teepen, Z. Yao, M. Grifoni, C. Dekker: Carbon nanotube single-electron transistors at room temperature, Science 293, 76–79 (2001)CrossRef H.W.C. Postma, T. Teepen, Z. Yao, M. Grifoni, C. Dekker: Carbon nanotube single-electron transistors at room temperature, Science 293, 76–79 (2001)CrossRef
27.209
Zurück zum Zitat M.S. Fuhrer, J. Nygård, L. Shih, M. Forero, Y.-G. Yoon, M.S.C. Mazzoni, H.J. Choi, J. Ihm, S.G. Louie, A. Zettl, P.L. McEuen: Crossed nanotube junctions, Science 288, 494–497 (2000)CrossRef M.S. Fuhrer, J. Nygård, L. Shih, M. Forero, Y.-G. Yoon, M.S.C. Mazzoni, H.J. Choi, J. Ihm, S.G. Louie, A. Zettl, P.L. McEuen: Crossed nanotube junctions, Science 288, 494–497 (2000)CrossRef
27.210
Zurück zum Zitat T. Rueckes, K. Kim, E. Joselevich, G.Y. Tseng, C.-L. Cheung, C.M. Lieber: Carbon nanotube-based nonvolatile random access memory for molecular computing science, Science 289, 94–97 (2000)CrossRef T. Rueckes, K. Kim, E. Joselevich, G.Y. Tseng, C.-L. Cheung, C.M. Lieber: Carbon nanotube-based nonvolatile random access memory for molecular computing science, Science 289, 94–97 (2000)CrossRef
27.211
Zurück zum Zitat A.G. Rinzler, J.H. Hafner, P. Nikolaev, L. Lou, S.G. Kim, D. Tománek, P. Nordlander, D.T. Colbert, R.E. Smalley: Unraveling nanotubes: field emission from an atomic wire, Science 269, 1550–1553 (1995)CrossRef A.G. Rinzler, J.H. Hafner, P. Nikolaev, L. Lou, S.G. Kim, D. Tománek, P. Nordlander, D.T. Colbert, R.E. Smalley: Unraveling nanotubes: field emission from an atomic wire, Science 269, 1550–1553 (1995)CrossRef
27.212
Zurück zum Zitat S.C. Minne, G. Yaralioglu, S.R. Manalis, J.D. Adams, J. Zesch, A. Atalar, C.F. Quate: Automated parallel high-speed atomic force microscopy, Appl. Phys. Lett. 72, 2340–2342 (1998)CrossRef S.C. Minne, G. Yaralioglu, S.R. Manalis, J.D. Adams, J. Zesch, A. Atalar, C.F. Quate: Automated parallel high-speed atomic force microscopy, Appl. Phys. Lett. 72, 2340–2342 (1998)CrossRef
27.213
Zurück zum Zitat G.D. Skidmore, E. Parker, M. Ellis, N. Sarkar, R. Merkle: Exponential assembly, Nanotechnology 11, 316–321 (2001)CrossRef G.D. Skidmore, E. Parker, M. Ellis, N. Sarkar, R. Merkle: Exponential assembly, Nanotechnology 11, 316–321 (2001)CrossRef
27.214
Zurück zum Zitat H.J. Dai, J.H. Hafner, A.G. Rinzler, D.T. Colbert, R.E. Smalley: Nanotubes as nanoprobes in scanning probe microscopy, Nature 384, 147–150 (1996)CrossRef H.J. Dai, J.H. Hafner, A.G. Rinzler, D.T. Colbert, R.E. Smalley: Nanotubes as nanoprobes in scanning probe microscopy, Nature 384, 147–150 (1996)CrossRef
27.215
Zurück zum Zitat J.H. Hafner, C.L. Cheung, C.M. Lieber: Growth of nanotubes for probe microscopy tips, Nature 398, 761–762 (1999)CrossRef J.H. Hafner, C.L. Cheung, C.M. Lieber: Growth of nanotubes for probe microscopy tips, Nature 398, 761–762 (1999)CrossRef
27.216
Zurück zum Zitat L.X. Dong, B.J. Nelson, T. Fukuda, F. Arai: Towards Nanotube Linear Servomotors, IEEE Trans. Autom. Sci. Eng. 3, 228–235 (2006)CrossRef L.X. Dong, B.J. Nelson, T. Fukuda, F. Arai: Towards Nanotube Linear Servomotors, IEEE Trans. Autom. Sci. Eng. 3, 228–235 (2006)CrossRef
27.217
Zurück zum Zitat Y.H. Gao, Y. Bando: Carbon nanothermometer containing gallium, Nature 415, 599 (2002)CrossRef Y.H. Gao, Y. Bando: Carbon nanothermometer containing gallium, Nature 415, 599 (2002)CrossRef
27.218
Zurück zum Zitat L.X. Dong, X.Y. Tao, L. Zhang, B.J. Nelson, X.B. Zhang: Nanorobotic spot welding: Controlled metal deposition with attogram precision from Copper-filled carbon nanotubes, Nano Lett. 7, 58–63 (2007)CrossRef L.X. Dong, X.Y. Tao, L. Zhang, B.J. Nelson, X.B. Zhang: Nanorobotic spot welding: Controlled metal deposition with attogram precision from Copper-filled carbon nanotubes, Nano Lett. 7, 58–63 (2007)CrossRef
27.219
Zurück zum Zitat S.W. Lee, D.S. Lee, R.E. Morjan, S.H. Jhang, M. Sveningsson, O.A. Nerushev, Y.W. Park, E.E.B. Campbell: A three-terminal carbon nano-relay, Nano Lett. 4, 2027–2030 (2004)CrossRef S.W. Lee, D.S. Lee, R.E. Morjan, S.H. Jhang, M. Sveningsson, O.A. Nerushev, Y.W. Park, E.E.B. Campbell: A three-terminal carbon nano-relay, Nano Lett. 4, 2027–2030 (2004)CrossRef
27.220
Zurück zum Zitat A.M. Fennimore, T.D. Yuzvinsky, W.-Q. Han, M.S. Fuhrer, J. Cumings, A. Zettl: Rotational actuators based on carbon nanotubes, Nature 424, 408–410 (2003)CrossRef A.M. Fennimore, T.D. Yuzvinsky, W.-Q. Han, M.S. Fuhrer, J. Cumings, A. Zettl: Rotational actuators based on carbon nanotubes, Nature 424, 408–410 (2003)CrossRef
27.221
Zurück zum Zitat A. Subramanian, L.X. Dong, J. Tharian, U. Sennhauser, B.J. Nelson: Batch fabrication of carbon nanotube bearings, Nanotechnology 18, 075703 (2007)CrossRef A. Subramanian, L.X. Dong, J. Tharian, U. Sennhauser, B.J. Nelson: Batch fabrication of carbon nanotube bearings, Nanotechnology 18, 075703 (2007)CrossRef
27.222
Zurück zum Zitat P. Kim, C.M. Lieber: Nanotube nanotweezers, Science 286, 2148–2150 (1999)CrossRef P. Kim, C.M. Lieber: Nanotube nanotweezers, Science 286, 2148–2150 (1999)CrossRef
27.223
Zurück zum Zitat L.X. Dong, A. Subramanian, D. Hugentobler, B.J. Nelson, Y. Sun: Nano Encoders based on Vertical Arrays of Individual Carbon Nanotubes, Adv. Robotics 20, 1281–1301 (2006)CrossRef L.X. Dong, A. Subramanian, D. Hugentobler, B.J. Nelson, Y. Sun: Nano Encoders based on Vertical Arrays of Individual Carbon Nanotubes, Adv. Robotics 20, 1281–1301 (2006)CrossRef
27.224
Zurück zum Zitat L.X. Dong, B.J. Nelson: Robotics in the small, Part II: Nanorobotics, IEEE Robotics Autom. Mag. 14, 111–121 (2007)CrossRef L.X. Dong, B.J. Nelson: Robotics in the small, Part II: Nanorobotics, IEEE Robotics Autom. Mag. 14, 111–121 (2007)CrossRef
27.225
Zurück zum Zitat I. Asimov: Fantastic Voyage (Bantam Books, New York 1966) I. Asimov: Fantastic Voyage (Bantam Books, New York 1966)
27.226
Zurück zum Zitat R.A. Freitas: Nanomedicine, Volume I: Basic Capabilities (Landes Bioscience, Austin 1999) R.A. Freitas: Nanomedicine, Volume I: Basic Capabilities (Landes Bioscience, Austin 1999)
Metadaten
Titel
Micro-/Nanorobots
verfasst von
Bradley J. Nelson
Lixin Dong
Fumihito Arai
Copyright-Jahr
2016
Verlag
Springer International Publishing
DOI
https://doi.org/10.1007/978-3-319-32552-1_27

Neuer Inhalt