Skip to main content

2017 | OriginalPaper | Buchkapitel

16. Micro/Nanoscale Optical Devices for Hyperspectral Imaging System

verfasst von : Li Li, Chengjun Huang, Haiying Zhang

Erschienen in: Outlook and Challenges of Nano Devices, Sensors, and MEMS

Verlag: Springer International Publishing

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

Hyperspectral imaging (HSI) technique has successfully combined 2D images and spectral analysis for sensing and inspection functions and thus has a wide range of perspective applications. However, traditional HSI system using stand-alone dispersive optics or filters features with complex system structure, large devices and high cost. With development of microfabrication technology and materials, currently, compact microspectrometer integrated with spectral modulating optics and photodetectors have shown great potential in providing fast, reliable, robust and high performance hyperspectral imaging and spectroscopy system, which has drawn great attention in both academic researches and industry. Therefore, current research status of such devices are reviewed in this chapter in terms of novel structure design, fabrication techniques applied.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Literatur
1.
Zurück zum Zitat L.P. Schuler, J.S. Milne, J.M. Dell, L. Faraone, MEMS-based microspectrometer technologies for NIR and MIR wavelengths. J. Phys. D. Appl. Phys. 42(13), 33001 (2009)CrossRef L.P. Schuler, J.S. Milne, J.M. Dell, L. Faraone, MEMS-based microspectrometer technologies for NIR and MIR wavelengths. J. Phys. D. Appl. Phys. 42(13), 33001 (2009)CrossRef
2.
Zurück zum Zitat J.H. Correia, M. Bartek, R.F. Wolffenbuttel, Bulk-micromachined tunable Fabry–Perot microinterferometer for the visible spectral range. Sensors Actuators A Phys. 76(1–3), 191–196 (1999)CrossRef J.H. Correia, M. Bartek, R.F. Wolffenbuttel, Bulk-micromachined tunable Fabry–Perot microinterferometer for the visible spectral range. Sensors Actuators A Phys. 76(1–3), 191–196 (1999)CrossRef
3.
Zurück zum Zitat J.H. Correia, G. de Graaf, S.H. Kong, M. Bartek, R.F. Wolffenbuttel, Single-chip CMOS optical microspectrometer. Sensors Actuators A Phys. 82(1–3), 191–197 (2000)CrossRef J.H. Correia, G. de Graaf, S.H. Kong, M. Bartek, R.F. Wolffenbuttel, Single-chip CMOS optical microspectrometer. Sensors Actuators A Phys. 82(1–3), 191–197 (2000)CrossRef
4.
Zurück zum Zitat N.M. Lin, S.C. Shei, S.J. Chang, Design and Fabrication of a TiO2/SiO2 Dielectric broadband and wide-angle reflector and its application to GaN-based blue LEDs. IEEE J. Quantum Electron. 51(7), 1–5 (2015)CrossRef N.M. Lin, S.C. Shei, S.J. Chang, Design and Fabrication of a TiO2/SiO2 Dielectric broadband and wide-angle reflector and its application to GaN-based blue LEDs. IEEE J. Quantum Electron. 51(7), 1–5 (2015)CrossRef
5.
Zurück zum Zitat D.K. Tripathi, F. Jiang, R. Rafiei, K.K.M.B.D. Silva, J. Antoszewski, M. Martyniuk, J.M. Dell, L. Faraone, S. Member, Suspended large-area MEMS-based optical filters for multispectral shortwave infrared imaging applications. J. Microelectron. Syst. 24(4), 1102–1110 (2015)CrossRef D.K. Tripathi, F. Jiang, R. Rafiei, K.K.M.B.D. Silva, J. Antoszewski, M. Martyniuk, J.M. Dell, L. Faraone, S. Member, Suspended large-area MEMS-based optical filters for multispectral shortwave infrared imaging applications. J. Microelectron. Syst. 24(4), 1102–1110 (2015)CrossRef
6.
Zurück zum Zitat C.A. Musca, J. Antoszewski, K.J. Winchester, A.J. Keating, T. Nguyen, K.K.M.B.D. Silva, J.M. Dell, L. Faraone, P. Mitra, J.D. Beck, M.R. Skokan, J.E. Robinson, Monolithic integration of an infrared photon detector with a MEMS-based tunable filter. IEEE Electron. Device Lett. 26(12), 888–890 (2005)CrossRef C.A. Musca, J. Antoszewski, K.J. Winchester, A.J. Keating, T. Nguyen, K.K.M.B.D. Silva, J.M. Dell, L. Faraone, P. Mitra, J.D. Beck, M.R. Skokan, J.E. Robinson, Monolithic integration of an infrared photon detector with a MEMS-based tunable filter. IEEE Electron. Device Lett. 26(12), 888–890 (2005)CrossRef
7.
Zurück zum Zitat D.K. Tripathi, H. Mao, K.K.M.B.D. Silva, J.W. Bumgarner, M. Martyniuk, J.M. Dell, L. Faraone, Large-area MEMS-based distributed bragg reflectors for short-wave and mid-wave infrared hyperspectral imaging applications. J. Microelectromech. Syst. 24(6), 2136–2144 (2015)CrossRef D.K. Tripathi, H. Mao, K.K.M.B.D. Silva, J.W. Bumgarner, M. Martyniuk, J.M. Dell, L. Faraone, Large-area MEMS-based distributed bragg reflectors for short-wave and mid-wave infrared hyperspectral imaging applications. J. Microelectromech. Syst. 24(6), 2136–2144 (2015)CrossRef
8.
Zurück zum Zitat T.G. Bifano, H.T. Johnson, P. Bierden, R.K. Mali, Elimination of stress-induced curvature in thin-film structures. J. Microelectromech. Syst. 11(5), 592–597 (2002)CrossRef T.G. Bifano, H.T. Johnson, P. Bierden, R.K. Mali, Elimination of stress-induced curvature in thin-film structures. J. Microelectromech. Syst. 11(5), 592–597 (2002)CrossRef
9.
Zurück zum Zitat J.S. Milne, J.M. Dell, A.J. Keating, L. Faraone, Widely tunable MEMS-based Fabry-Perot filter. J. Microelectromech. Syst. 18(4), 905–913 (2009)CrossRef J.S. Milne, J.M. Dell, A.J. Keating, L. Faraone, Widely tunable MEMS-based Fabry-Perot filter. J. Microelectromech. Syst. 18(4), 905–913 (2009)CrossRef
10.
Zurück zum Zitat M.S.C. Lu, G.K. Fedder, Position control of parallel-plate microactuators for probe-based data storage. J. Microelectromech. Syst. 13(5), 759–769 (2004)CrossRef M.S.C. Lu, G.K. Fedder, Position control of parallel-plate microactuators for probe-based data storage. J. Microelectromech. Syst. 13(5), 759–769 (2004)CrossRef
11.
Zurück zum Zitat S.-W. Wang, M. Li, C.-S. Xia, H.-Q. Wang, X.-S. Chen, W. Lu, 128 channels of integrated filter array rapidly fabricated by using the combinatorial deposition technique. Appl. Phys. B Lasers Opt. 88(2), 281–284 (2007)CrossRef S.-W. Wang, M. Li, C.-S. Xia, H.-Q. Wang, X.-S. Chen, W. Lu, 128 channels of integrated filter array rapidly fabricated by using the combinatorial deposition technique. Appl. Phys. B Lasers Opt. 88(2), 281–284 (2007)CrossRef
12.
Zurück zum Zitat C.M. Waits, A. Modafe, R. Ghodssi, Investigation of gray-scale technology for large area 3D silicon MEMS structures. J. Micromech. Microeng. 13(2), 170 (2003)CrossRef C.M. Waits, A. Modafe, R. Ghodssi, Investigation of gray-scale technology for large area 3D silicon MEMS structures. J. Micromech. Microeng. 13(2), 170 (2003)CrossRef
13.
Zurück zum Zitat M. Han, W. Lee, S.-K. Lee, S.S. Lee, 3D microfabrication with inclined/rotated UV lithography. Sensors Actuators A Phys. 111(1), 14–20 (2004)MathSciNetCrossRef M. Han, W. Lee, S.-K. Lee, S.S. Lee, 3D microfabrication with inclined/rotated UV lithography. Sensors Actuators A Phys. 111(1), 14–20 (2004)MathSciNetCrossRef
14.
Zurück zum Zitat W.X. Yu, X.-C. Yuan, N.Q. Ngo, W.X. Que, W.C. Cheong, V. Koudriachov, Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing. Opt. Express 10(10), 443–448 (2002)CrossRef W.X. Yu, X.-C. Yuan, N.Q. Ngo, W.X. Que, W.C. Cheong, V. Koudriachov, Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing. Opt. Express 10(10), 443–448 (2002)CrossRef
15.
Zurück zum Zitat D. Y. Choi, Shadow mask and method of fabricating vertically tapered structure using the shadow mask, US7425275 B2, 2008 D. Y. Choi, Shadow mask and method of fabricating vertically tapered structure using the shadow mask, US7425275 B2, 2008
16.
Zurück zum Zitat B. Sheng, P. Chen, C. Tao, R. Hong, Y. Huang, D. Zhang, Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique. Chin. Opt. Lett. 13(12), 122301 (2015)CrossRef B. Sheng, P. Chen, C. Tao, R. Hong, Y. Huang, D. Zhang, Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique. Chin. Opt. Lett. 13(12), 122301 (2015)CrossRef
17.
Zurück zum Zitat A. Emadi, H. Wu, S. Grabarnik, G. de Graaf, R.F. Wolffenbuttel, Vertically tapered layers for optical applications fabricated using resist reflow. J. Micromech. Microeng. 19(7), 074014 (2009)CrossRef A. Emadi, H. Wu, S. Grabarnik, G. de Graaf, R.F. Wolffenbuttel, Vertically tapered layers for optical applications fabricated using resist reflow. J. Micromech. Microeng. 19(7), 074014 (2009)CrossRef
18.
Zurück zum Zitat N.P. Ayerden, G. de Graaf, R.F. Wolffenbuttel, Compact gas cell integrated with a linear variable optical filter. Opt. Express 24(3), 2981–3002 (2016)CrossRef N.P. Ayerden, G. de Graaf, R.F. Wolffenbuttel, Compact gas cell integrated with a linear variable optical filter. Opt. Express 24(3), 2981–3002 (2016)CrossRef
19.
Zurück zum Zitat N. Tack, A. Lambrechts, P. Soussan, L. Haspeslagh, A compact, high-speed, and low-cost hyperspectral imager, Proc. SPIE 8266, Silicon Photonics VII, 82660Q (2012) N. Tack, A. Lambrechts, P. Soussan, L. Haspeslagh, A compact, high-speed, and low-cost hyperspectral imager, Proc. SPIE 8266, Silicon Photonics VII, 82660Q (2012)
20.
Zurück zum Zitat A. Lambrechts, P. Gonzalez, B. Geelen, P. Soussan, K. Tack, M. Jayapala, A CMOS-compatible, integrated approach to hyper- and multispectral imaging, 2014 I.E. International Electron Devices Meeting, 2014 pp. 10.5.1–10.5.4 A. Lambrechts, P. Gonzalez, B. Geelen, P. Soussan, K. Tack, M. Jayapala, A CMOS-compatible, integrated approach to hyper- and multispectral imaging, 2014 I.E. International Electron Devices Meeting, 2014 pp. 10.5.1–10.5.4
21.
Zurück zum Zitat J. Antoszewski, K. J. Winchester, A. J. Keating, T. Nguyen, K. Silva, H. Huang, C. A. Musca, J. M. Dell, L. Faraone, P. Mitra, J. D. Beck, M. R. Skokan, J. E. Robinson, A monolithically integrated HgCdTe SWIR photodetector and tunable MEMS-based optical filter, in Infrared Technology and Applications XXXI, Pts 1 and 2, 5783(1–2), 2005, pp. 719–727 J. Antoszewski, K. J. Winchester, A. J. Keating, T. Nguyen, K. Silva, H. Huang, C. A. Musca, J. M. Dell, L. Faraone, P. Mitra, J. D. Beck, M. R. Skokan, J. E. Robinson, A monolithically integrated HgCdTe SWIR photodetector and tunable MEMS-based optical filter, in Infrared Technology and Applications XXXI, Pts 1 and 2, 5783(1–2), 2005, pp. 719–727
22.
Zurück zum Zitat A.J. Keating, K.K.M.B.D. Silva, J.M. Dell, C.A. Musca, L. Faraone, Optical characterization of Fabry-Perot MEMS filters integrated on tunable short-wave IR detectors. IEEE Photon. Technol. Lett. 18(9), 1079–1081 (2006)CrossRef A.J. Keating, K.K.M.B.D. Silva, J.M. Dell, C.A. Musca, L. Faraone, Optical characterization of Fabry-Perot MEMS filters integrated on tunable short-wave IR detectors. IEEE Photon. Technol. Lett. 18(9), 1079–1081 (2006)CrossRef
23.
Zurück zum Zitat R.C. Batra, M. Porfiri, D. Spinello, Electromechanical model of electrically actuated narrow microbeams. J. Microelectromech. Syst. 15(5), 1175–1189 (2006)CrossRef R.C. Batra, M. Porfiri, D. Spinello, Electromechanical model of electrically actuated narrow microbeams. J. Microelectromech. Syst. 15(5), 1175–1189 (2006)CrossRef
24.
Zurück zum Zitat H. Rong, Q.-A. Huang, M. Nie, W. Li, An analytical model for pull-in voltage of clamped–clamped multilayer beams. Sensors Actuators A Phys. 116(1), 15–21 (2004)CrossRef H. Rong, Q.-A. Huang, M. Nie, W. Li, An analytical model for pull-in voltage of clamped–clamped multilayer beams. Sensors Actuators A Phys. 116(1), 15–21 (2004)CrossRef
25.
Zurück zum Zitat J.S. Milne, A.J. Keating, J. Antoszewski, J.M. Dell, C.A. Musca, L. Faraone, Extending the tuning range of SWIR microspectrometers. Proc. SPIE 6542, 65420M-1–65420M-11 (2007)CrossRef J.S. Milne, A.J. Keating, J. Antoszewski, J.M. Dell, C.A. Musca, L. Faraone, Extending the tuning range of SWIR microspectrometers. Proc. SPIE 6542, 65420M-1–65420M-11 (2007)CrossRef
26.
Zurück zum Zitat J. Milne, J. Dell, A. Keating, L. Faraone, Extended tuning range Fabry-Perot etalon with doubly-supported beam actuators. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, 2006, pp. 134–135 J. Milne, J. Dell, A. Keating, L. Faraone, Extended tuning range Fabry-Perot etalon with doubly-supported beam actuators. in IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006, 2006, pp. 134–135
27.
Zurück zum Zitat H. Mao, K.K.M.B.D. Silva, M. Martyniuk, J. Antoszewski, J. Bumgarner, B.D. Nener, J.M. Dell, L. Faraone, MEMS-based tunable Fabry-Perot filters for adaptive multispectral thermal imaging. J. Microelectromech. Syst. 25(1), 227–235 (2016)CrossRef H. Mao, K.K.M.B.D. Silva, M. Martyniuk, J. Antoszewski, J. Bumgarner, B.D. Nener, J.M. Dell, L. Faraone, MEMS-based tunable Fabry-Perot filters for adaptive multispectral thermal imaging. J. Microelectromech. Syst. 25(1), 227–235 (2016)CrossRef
28.
Zurück zum Zitat Q. Meng, S. Chen, J. Lai, Y. Huang, Z. Sun, Multi-physics simulation and fabrication of a compact 128x128 micro-electro-mechanical system Fabry-Perot cavity tunable filter array for infrared hyperspectral imager. Appl. Opt. 54(22), 6850–6856 (2015)CrossRef Q. Meng, S. Chen, J. Lai, Y. Huang, Z. Sun, Multi-physics simulation and fabrication of a compact 128x128 micro-electro-mechanical system Fabry-Perot cavity tunable filter array for infrared hyperspectral imager. Appl. Opt. 54(22), 6850–6856 (2015)CrossRef
29.
Zurück zum Zitat A. Emadi, H. Wu, G. de Graaf, K. Hedsten, P. Enoksson, J.H. Correia, R.F. Wolffenbuttel, An UV linear variable optical filter-based micro-spectrometer. Proc. Eng. 5, 416–419 (2010)CrossRef A. Emadi, H. Wu, G. de Graaf, K. Hedsten, P. Enoksson, J.H. Correia, R.F. Wolffenbuttel, An UV linear variable optical filter-based micro-spectrometer. Proc. Eng. 5, 416–419 (2010)CrossRef
30.
Zurück zum Zitat A. Emadi, Spectral measurement with a UV linear-variable optical filter microspectrometer, IEEE Sensors, 2011, pp. 420–423 A. Emadi, Spectral measurement with a UV linear-variable optical filter microspectrometer, IEEE Sensors, 2011, pp. 420–423
31.
Zurück zum Zitat A. Emadi, H. Wu, G. de Graaf, P. Enoksson, J.H. Correia, R. Wolffenbuttel, Linear variable optical filter-based ultraviolet microspectrometer. Appl. Opt. 51(19), 4308–4315 (2012)CrossRef A. Emadi, H. Wu, G. de Graaf, P. Enoksson, J.H. Correia, R. Wolffenbuttel, Linear variable optical filter-based ultraviolet microspectrometer. Appl. Opt. 51(19), 4308–4315 (2012)CrossRef
32.
Zurück zum Zitat A. Emadi, H. Wu, S. Grabarnik, G. De Graaf, K. Hedsten, P. Enoksson, J.H. Correia, R.F. Wolffenbuttel, Fabrication and characterization of IC-compatible linear variable optical filters with application in a micro-spectrometer. Sensors Actuators A Phys. 162(2), 400–405 (2010)CrossRef A. Emadi, H. Wu, S. Grabarnik, G. De Graaf, K. Hedsten, P. Enoksson, J.H. Correia, R.F. Wolffenbuttel, Fabrication and characterization of IC-compatible linear variable optical filters with application in a micro-spectrometer. Sensors Actuators A Phys. 162(2), 400–405 (2010)CrossRef
33.
Zurück zum Zitat A. Emadi, H. Wu, G. de Graaf, R. Wolffenbuttel, Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter. Opt. Express 20(1), 489–507 (2012)CrossRef A. Emadi, H. Wu, G. de Graaf, R. Wolffenbuttel, Design and implementation of a sub-nm resolution microspectrometer based on a Linear-Variable Optical Filter. Opt. Express 20(1), 489–507 (2012)CrossRef
34.
Zurück zum Zitat N. P. Ayerden, M. Ghaderi, M. F. Silva, A. Emadi, P. Enoksson, J. H. Correia, G. de Graaf, R. F. Wolffenbuttel, Design, fabrication and characterization of LVOF-based IR microspectrometers, in Proc. SPIE 9130, Micro-Optics 2014, vol 9130, p. 91300 T, 16–19 April 2014 N. P. Ayerden, M. Ghaderi, M. F. Silva, A. Emadi, P. Enoksson, J. H. Correia, G. de Graaf, R. F. Wolffenbuttel, Design, fabrication and characterization of LVOF-based IR microspectrometers, in Proc. SPIE 9130, Micro-Optics 2014, vol 9130, p. 91300 T, 16–19 April 2014
35.
Zurück zum Zitat M. Ghaderi, N.P. Ayerden, A. Emadi, P. Enoksson, J.H. Correia, G. de Graaf, R.F. Wolffenbuttel, Design, fabrication and characterization of infrared LVOFs for measuring gas composition. J. Micromech. Microeng. 24(8), 84001 (2014)CrossRef M. Ghaderi, N.P. Ayerden, A. Emadi, P. Enoksson, J.H. Correia, G. de Graaf, R.F. Wolffenbuttel, Design, fabrication and characterization of infrared LVOFs for measuring gas composition. J. Micromech. Microeng. 24(8), 84001 (2014)CrossRef
36.
Zurück zum Zitat A. Emadi, S. Grabarnik, H. Wu, G. de Graaf, K. Hedsten, P. Enoksson, J. H. Correia, R. F. Wolffenbuttel, Spectral measurement using IC-compatible linear variable optical filter, in Micro-optics 2010, 2010, vol 7716 A. Emadi, S. Grabarnik, H. Wu, G. de Graaf, K. Hedsten, P. Enoksson, J. H. Correia, R. F. Wolffenbuttel, Spectral measurement using IC-compatible linear variable optical filter, in Micro-optics 2010, 2010, vol 7716
37.
Zurück zum Zitat A. Emadi, H. Wu, G. de Graaf, P. Enoksson, J. H. Correia, R. Wolffenbuttel, Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer, in Optical Sensing and Detection II, 2012, vol. 8439 A. Emadi, H. Wu, G. de Graaf, P. Enoksson, J. H. Correia, R. Wolffenbuttel, Design, fabrication and measurements with a UV linear-variable optical filter microspectrometer, in Optical Sensing and Detection II, 2012, vol. 8439
38.
Zurück zum Zitat M.P. Christensen, G.W. Euliss, M.J. McFadden, K.M. Coyle, P. Milojkovic, M.W. Haney, J. van der Gracht, R.A. Athale, ACTIVE-EYES: an adaptive pixel-by-pixel image-segmentation sensor architecture for high-dynamic-range hyperspectral imaging. Appl. Opt. 41(29), 6093–6103 (2002)CrossRef M.P. Christensen, G.W. Euliss, M.J. McFadden, K.M. Coyle, P. Milojkovic, M.W. Haney, J. van der Gracht, R.A. Athale, ACTIVE-EYES: an adaptive pixel-by-pixel image-segmentation sensor architecture for high-dynamic-range hyperspectral imaging. Appl. Opt. 41(29), 6093–6103 (2002)CrossRef
39.
Zurück zum Zitat A. Bednarkiewicz, M. Bouhifd, M.P. Whelan, Digital micromirror device as a spatial illuminator for fluorescence lifetime and hyperspectral imaging. Appl. Opt. 47(9), 1193–1199 (2008)CrossRef A. Bednarkiewicz, M. Bouhifd, M.P. Whelan, Digital micromirror device as a spatial illuminator for fluorescence lifetime and hyperspectral imaging. Appl. Opt. 47(9), 1193–1199 (2008)CrossRef
40.
Zurück zum Zitat M.L. Mangum, E. Livingston, K.J. Zuzak, Visible to NIR DLP hyperspectral imaging system for surgical utility using inherent chromophores and fluorescent probes. Proc. SPIE 7932, 793203–793211 (2011)CrossRef M.L. Mangum, E. Livingston, K.J. Zuzak, Visible to NIR DLP hyperspectral imaging system for surgical utility using inherent chromophores and fluorescent probes. Proc. SPIE 7932, 793203–793211 (2011)CrossRef
41.
Zurück zum Zitat E. Livingston, K. Zuzak, NIR DLP hyperspectral imaging system for medical applications. Proc. SPIE—Int. Soc. Opt. Eng. 7932, 793204–793209 (2011) E. Livingston, K. Zuzak, NIR DLP hyperspectral imaging system for medical applications. Proc. SPIE—Int. Soc. Opt. Eng. 7932, 793204–793209 (2011)
42.
Zurück zum Zitat Y. Wang, Y.D. Gokdel, N. Triesault, L. Wang, Y.-Y. Huang, X. Zhang, Magnetic-actuated stainless steel scanner for two-photon hyperspectral fluorescence microscope. J. Microelectron. Syst. 23(5), 1208–1218 (2014)CrossRef Y. Wang, Y.D. Gokdel, N. Triesault, L. Wang, Y.-Y. Huang, X. Zhang, Magnetic-actuated stainless steel scanner for two-photon hyperspectral fluorescence microscope. J. Microelectron. Syst. 23(5), 1208–1218 (2014)CrossRef
43.
Zurück zum Zitat Y. Wang, S. Bish, J.W. Tunnell, X. Zhang, MEMS scanner based handheld fluorescence hyperspectral imaging system. Sensors Actuators A Phys. 188, 450–455 (2012)CrossRef Y. Wang, S. Bish, J.W. Tunnell, X. Zhang, MEMS scanner based handheld fluorescence hyperspectral imaging system. Sensors Actuators A Phys. 188, 450–455 (2012)CrossRef
44.
Zurück zum Zitat Y. Wang, S. Bish, A. Gopal, J. W. Tunnell, X. Zhang, MEMS scanner enabled real-time depth sensitive hyperspectral imaging, in Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on, 2010, pp. 2–4 Y. Wang, S. Bish, A. Gopal, J. W. Tunnell, X. Zhang, MEMS scanner enabled real-time depth sensitive hyperspectral imaging, in Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on, 2010, pp. 2–4
Metadaten
Titel
Micro/Nanoscale Optical Devices for Hyperspectral Imaging System
verfasst von
Li Li
Chengjun Huang
Haiying Zhang
Copyright-Jahr
2017
DOI
https://doi.org/10.1007/978-3-319-50824-5_16

Neuer Inhalt