nach oben

Erschienen in:

2017 | OriginalPaper | Buchkapitel

8. Micro-scale Geometry Measurement

verfasst von : Samanta Piano, Rong Su, Richard Leach

Erschienen in: Micro-Manufacturing Technologies and Their Applications

Verlag: Springer International Publishing

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config

KI-gestützte Suche

Aus

Abstract

The ability to produce complex, high-precision, miniature components is key to the transition to high-value manufacturing. The advanced manufacturing industries, using precision machining techniques, such as diamond turning, injection moulding, micro-milling and micro-electro-discharge machining, currently have a number of capabilities for measuring small-scale structures with micro-scale tolerances, either with tactile or non-tactile systems. Metrology is essential for the reduction of dimensional tolerances, which allows the production of more efficient machines and the improvement of their longevity by reducing play or wear. In this chapter, contact and non-contact techniques that can be used to measure 3D features on the micro-metre scale are reviewed.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

über 102.000 Bücher
über 537 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Finance + Banking
Management + Führung
Marketing + Vertrieb
Maschinenbau + Werkstoffe
Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

über 67.000 Bücher
über 390 Zeitschriften

aus folgenden Fachgebieten:

Automobil + Motoren
Bauwesen + Immobilien
Business IT + Informatik
Elektrotechnik + Elektronik
Energie + Nachhaltigkeit
Maschinenbau + Werkstoffe

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Vorheriges Kapitel Moulded Interconnect Devices

Nächstes Kapitel Micro-assembly

Tosello G, Hansen HN, Marinello F, Gasparin S (2010) Replication and dimensional quality control of industrial nanoscale surfaces using calibrated AFM measurements and SEM image processing. Ann CIRP 59:563–568CrossRef

Fang FZ, Zhang XD, Weckenmann A, Zhang GX, Evans C (2013) Manufacturing and measurement of freeform optics. Ann CIRP 62:823–846CrossRef

ISO 25178 part 601 (2010) Geometrical product specifications (GPS)—surface texture: Areal–Part 601: Nominal characteristics of contact (stylus) instruments. International Organization for Standardization

Leach RK (ed) (2014) Fundamental principles of engineering nanometrology, 2nd edn. Elsevier, Amsterdam

Whitehouse DJ (2010) Handbook of surface and nanometrology, 2nd edn. CRC Press, Florida

Thomas TR (1999) Rough surfaces, 2nd edn. Imperial College Press, London

Leach RK (2001) The measurement of surface texture using stylus instruments. NPL Good Practice Guide. National Physical Laboratory, UK

Radhakrishnan V (1970) Effect of stylus radius on the roughness value measured with tracing stylus instruments. Wear 16:325CrossRef

McCool JI (1984) Assessing the effect of stylus tip radius and flight on surface topography measurements. ASME J Tribol 106:202–209CrossRef

10.

Mendeleyev V (1997) Dependence of measuring errors of rms roughness on stylus tip size for mechanical profilers. Appl Opt 36:9005–9009CrossRef

11.

Lee C-O, Park K, Park BC, Lee YW (2005) An algorithm for stylus instruments to measure aspheric surfaces. Meas Sci Technol 16:1215CrossRef

12.

Lee DH (2013) 3-dimensional profile distortion measured by stylus type. Measurement 46:803–814CrossRef

13.

Fang H, Xu B, Chen W, Tang H, Zhao S (2015) A slope-adapted sample-tilting method for profile measurement of microstructures with steep surfaces. J Nanomater ID 253062 (in press)

14.

Hocken RJ, Pereira PH (eds) (2011) Coordinate measuring machines and systems, 2nd edn. CRC Press, New York

15.

ISO 10360 part 3 (2000) Geometrical product specifications (GPS)—acceptance and reverification tests for coordinate measuring machines (CMM)—Part 3: CMMs with the axis of a rotary table as the fourth axis. International Organization for Standardization

16.

Vermeulen MMPA, Rosielle PCJN, Schellekens PHJ (1998) Design of a high-precision 3D-coordinate measuring machine. Ann CIRP 47:447–450CrossRef

17.

Widdershoven I, Donker RL, Spaan HAM (2011) Realization and calibration of the “Isara 400” ultra-precision CMM. J Phys: Conf Ser 311:012002

18.

Jäger G, Manske E, Hausotte T, Büchner H-J, Grünwald R, Schott W (2001) Nanomeasuring technology—nanomeasuring machine. In: Proceedings of the ASPE, Crystal City, VA, Nov. 2001, pp 23–27

19.

Leach RK (2015) Abbe error/offset. In: Laperrière L, Reinhart G (eds) CIRP encyclopaedia of production engineering. Springer, Berlin

20.

Fan K-C, Fei Y-T, Wang W, Chen Y, Chen Y-C (2008) Micro-CMM. In: Smart devices and machines for advanced manufacturing, pp 319–335

21.

Claverley JD, Leach RK (2015) A review of the existing performance verification infrastructure for micro-CMMs. Precis Eng 39:1–15CrossRef

22.

ISO 10360 part 1 (2001) Geometrical product specifications (GPS)—acceptance and reverification tests for coordinate measuring machines (CMM). International Organization for Standardization

23.

Weckenmann A, Estler T, Peggs G, McMurtry D (2004) Probing systems in dimensional metrology. Ann CIRP 53:657–684CrossRef

24.

Küng A, Meli F, Thalmann R (2007) Ultraprecision micro-CMM using a low force 3D touch probe. Measur Sci Technol 18:319–327CrossRef

25.

Chu C-L, Chiu C-Y (2007) Development of a low-cost nanoscale touch trigger probe based on two commercial DVD pick-up heads. Measur Sci Technol 18:1831–1842CrossRef

26.

Haitjema H, Pril WO, Schellekens PHJ (2001) Development of a silicon-based nanoprobe system for 3-D measurements. Ann CIRP 50:365–368CrossRef

27.

Brand U, Kleine-Besten T, Schwenke H (2000) Development of a special CMM for dimensional metrology on microsystem components. In: Proceedings of the ASPE, Scottsdale, AZ, Oct. 2000, pp 542–546

28.

Ruther P, Bartholomeyczik J, Trautmann A, Wandt M, Pau O, Dominicus W, Roth R, Seitz K, Strauss W (2005) Novel 3D piezoresistive silicon force sensor for dimensional metrology of micro components. In: Proceedings of the IEEE sensor, pp 1006–1009

29.

Dai G, Bütefisch S, Pohlenz F, Danzebrink H-U (2009) A high precision micro/nano CMM using piezoresistive tactile probes. Measur Sci Technol 20:084001CrossRef

30.

Muralikrishnan B, Stone J, Stoup J (2007) Roundness measurements using the NIST fibre probe. In: Proceedings of the ASPE, Dallas, TX, Oct. 2007, pp 89–92

31.

Takaya Y, Takahashi S, Miyoshi T, Saito K (1999) Development of the nano-CMM probe based on laser trapping technology. Ann CIRP 48:421–424CrossRef

32.

Seugling R, Darnell I (2008) Investigating scaling limits of a fibre based resonant probe for metrology applications. In: Proceedings of the ASPE, Livermore, CA, Oct. 2008

33.

Claverley JD, Leach RK (2013) Development of a three-dimensional vibrating tactile probe for miniature CMMs. Precis Eng 37:491–499CrossRef

34.

Lee ES, Burdekin M (2001) A hole plate artifact design for volumetric error calibration of a CMM. Int J Adv Manuf Technol 17:508–515CrossRef

35.

Schwenke H, Franke M, Hannaford J, Kunzmann H (2005) Error mapping of CMMs and machine tools by a single tracking interferometer. Ann CIRP 54:475–478CrossRef

36.

Schwenke H, Knapp W, Haitjema H, Weckenmann A, Schmitt R, Delbressine F (2008) Geometric error measurement and compensation for machines—an update. Ann CIRP 57:660–675CrossRef

37.

Zhang G, Veale R, Charlton T, Borchardt B, Hocken R (1985) Error compensation of coordinate measuring machines. Ann CIRP 34:445–448CrossRef

38.

Krutha J-P, Vanhercka P, Van den Bergha C (2001) Compensation of static and transient thermal errors on CMMs. Ann CIRP 50:377–380CrossRef

39.

Aggogeri F, Barbato G, Barini EM, Genta G, Levi R (2011) Measurement uncertainty assessment of coordinate measuring machines by simulation and planned experimentation. CIRP-JMST 4:51–56

40.

ISO 10360 part 6 (2001) Geometrical product specifications (GPS)—acceptance and reverification tests for coordinate measuring machines (CMM)—Part 6: estimation of errors in computing Gaussian associated features. International Organization for Standardization

41.

Danzl R, Helmli F, Rubert P, Prantl M (2008) Optical roughness measurements on specially designed roughness standards. Proc SPIE 7102:71020MCrossRef

42.

Hemli F (2011) Focus-variation instruments. In: Leach RK (ed) Optical measurement of surface topography. Springer, Berlin

43.

Scherer S (2007) Focus-variation for optical 3D measurement in the micro- and nano-range. In: Bauer N (ed) Handbuch zur Industriellen Bildverarbeitung. Fraunhofer IRB Verlag, Stuttgart

44.

Zhang Y, Zhang Y, Wen CY (2000) A new focus measure method using moments. Image Vision Comput 18:959–965CrossRef

45.

Helmli FS, Scherer S (2001) Adaptive shape from focus with an error estimation in light microscopy. In: ISPA 2001, Pula, Croatia, June 2001, pp 188–193

46.

Danzl R, Helmli F, Scherer S (2011) Focus variation—a robust technology for high resolution optical 3D surface metrology. J Mech Eng 57:245–256CrossRef

47.

ISO 25178 part 604 (2001) Geometrical product specification (GPS)—surface texture: Areal–Part 604: Nominal characteristics of non-contact (coherence scanning interferometry) instruments. International Organization for Standardization

48.

de Groot P (2011) Coherence scanning interferometry. In: Leach RK (ed) Optical measurement of surface topography, vol 9. Springer, Berlin

49.

de Groot P (2015) Principles of interference microscopy for the measurement of surface topography. Adv Opt Photon 7:1–65CrossRef

50.

de Groot P, Colonna de Lega X, Kramer J, Turzhitsky M (2002) Determination of fringe order in white-light interference microscopy. Appl Opt 41:4571–4578CrossRef

51.

Colonna de Lega X, Biegen J, de Groot P, Häusler G, Andretzky P (2003) Large field-of-view scanning white-light interferometers. In: Proceedings of the ASPE, Portland, OR, Oct. 2003, p 1275

52.

Wyant JC, Schmit J (1998) Large field of view, high spatial resolution, surface measurements. Int J Mach Tools Manuf 38:691–698CrossRef

53.

Gao F, Leach RK, Petzing J, Coupland JM (2008) Surface measurement errors using commercial scanning white light interferometers. Measur Sci Technol 19:015303CrossRef

54.

Schwider J, Zhou L (1994) Dispersive interferometric profilometer. Opt Lett 19:995–997CrossRef

55.

Marron JC, Gleichman KW (2000) Three-dimensional imaging using a tunable laser source. Opt Eng 39:47–51CrossRef

56.

Jiang X (2012) Precision surface measurement. Phil Trans R Soc A 370:4089–4114CrossRef

57.

Paz VF, Peterhänsel S, Frenner K, Osten W (2012) Solving the inverse grating problem by white light interference Fourier scatterometry. Light: Sci Appl 1:e36

58.

Colonna de Lega X, de Groot P (2005) Optical topography measurement of patterned wafers. AIP Conf Proc 788:432–436CrossRef

59.

Minsky M (1961) Microscopy apparatus. US patent, vol US3013467A

60.

Minsky M (1988) Memoir on inventing the confocal microscope. Scanning 10:128–138CrossRef

61.

Wilson T (ed) (1990) Confocal microscopy. Academic Press, London

62.

Diaspro A (ed) (2002) Confocal and two—photon microscopy: foundations, applications, and advances. Wiley-Liss, New York

63.

Hibbs AR (2004) Confocal microscopy for biologists. Kluwer Press, New YorkCrossRef

64.

Artigas R (2001) Imaging confocal microscopy. In: Leach RK (ed) Optical measurement of surface topography. Springer, Berlin

65.

Semwogere D, Weeks ER (2005) Confocal microscopy. In: Encyclopedia of biomaterials and biomedical engineering. Taylor&Francis, London

66.

Brakenhoff GJ, Blom P, Barends P (1976) Confocal scanning light microscopy with high aperture immersion lenses. J Microsc 117:21932

67.

Wilson T (2011) Resolution and optical sectioning in the confocal microscope. J Microsc 244:113–121CrossRef

68.

Leach RK (ed) (2011) Optical measurement of surface topography. Springer, Berlin, Germany

69.

Muralikrishnan B, Ren W, Everett D, Stanfield E, Doiron T (2011) Dimensional metrology of bipolar fuel cell plates using laser spot triangulation probes. Meas Sci Technol 22:075102CrossRef

70.

Kjaer KH, Ottose C-O (2015) 3D laser triangulation for plant phenotyping in challenging environments. Sensors 15:13533–13547CrossRef

71.

Peiravi A, Taabbodi B (2010) A reliable 3D laser triangulation-based scanner with a new simple but accurate procedure for finding scanner parameters. J Am Sci 6:80

72.

Clarke TA, Grattan KTV, Lindsey NE (1991) Laser-based triangulation techniques in optical inspection of industrial structures. Proc SPIE 1332:474–486CrossRef

73.

MacKinnon D, Beraldin J-A, Cournoyer L, Picard M, Blais F (2012) Lateral resolution challenges for triangulation-based three-dimensional imaging systems. Opt Eng 51:021111CrossRef

74.

Zeng L, Matsumoto H, Kawachi K (1997) Two-directional scanning method for reducing the shadow effects in laser triangulation. Measur Sci Technol 8:262–266CrossRef

75.

Gorthi SS, Rastogi P (2010) Fringe projection techniques: whither we are? Opt Lasers Eng 48(2):133–140CrossRef

76.

Leonhardt K, Droste U, Tiziani HJ (1994) Micro shape and rough-surface analysis by fringe projection. Appl Opt 33:7477–7488CrossRef

77.

Quan C, Tay CJ, He XY, Kang X, Shang HM (2002) Microscopic surface contouring by fringe projection method. Opt Laser Technol 34(7):547–552CrossRef

78.

Chen L-C, Liao C-C, Lai M-J (2005) Full-field micro surface profilometry using digital fringe projection with spatial encoding principle. J Phys: Conf Series 13:147–150

79.

He X, Sun W, Zheng X, Nie M (2006) Static and dynamic deformation measurements of micro beams by the technique of digital image correlation. Key Eng Mater 326–328:211–214CrossRef

80.

Chen L, Chang Y (2008) High accuracy confocal full-field 3-D surface profilometry for micro lenses using a digital fringe projection strategy. Key Eng Mater 364–366:113–116

81.

Li A, Peng X, Yina Y, Liua X, Zhao Q, Körner K, Osten W (2013) Fringe projection based quantitative 3D microscopy. Optik 124:5052–5056CrossRef

82.

Yin Y, Wang M, Gao BZ, Liu X, Peng X (2015) Fringe projection 3D microscopy with the general imaging model. Opt Express 23:6846CrossRef

83.

Chen J, Guo T, Wang L, Wu Z, Fu X, Hu X (2013) Microscopic fringe projection system and measuring method. Proc SPIE 8759:87594UCrossRef

84.

Drexler W, Fujimoto JG (eds) (2008) Optical coherence tomography: technology and applications. Springer, Berlin

85.

Stifter D (2007) Beyond biomedicine: a review of alternative applications and developments for optical coherence tomography. Appl Phys B 88:337–357CrossRef

86.

Guan G, Hirsch M, Lu ZH, Childs DT, Matcher SJ, Goodridge R, Groom KM, Clare AT (2015) Evaluation of selective laser sintering processes by optical coherence tomography. J: Mater Design (accepted)

87.

Wieser W, Biedermann BR, Klein T, Eigenwillig CM, Huber R (2010) Multi-megahertz OCT: high quality 3D imaging at 20 million A-scans and 4.5 GVoxels per second. Opt Express 18:14685–14704CrossRef

88.

Czajkowski J, Vilmi P, Lauri J, Sliz R, Fabritius T, Myllylä R (2012) Characterization of ink-jet printed RGB color filters with spectral domain optical coherence tomography. Proc SPIE 8496:849308CrossRef

89.

Thrane L, Jørgensen TM, Jørgensen M, Krebs FC (2012) Application of optical coherence tomography (OCT) as a 3-dimensional imaging technique for roll-to-roll coated polymer solar cells. Solar Energy Mater Solar Cells 97:181–185CrossRef

90.

Su R, Kirillin M, Ekberg P, Mattsson L (2015) Three-dimensional metrology of embedded microfeatures in ceramics by infra-red optical coherence tomography—advantages and limitations. In: Proceedings of the 11th LAMDAMAP, March 2015. Swindon, UK, pp 74–83

91.

Ahn Y, Jung W, Chen Z (2008) Optical sectioning for microfluidics: secondary flow and mixing in a meandering microchannel. Lab Chip 8:125–133CrossRef

92.

Stifter D, Leiss-Holzinger E, Major Z, Baumann B, Pircher M, Götzinger E, Hitzenberger CK, Heise B (2010) Dynamic optical studies in materials testing with spectral-domain polarization-sensitive optical coherence tomography. Opt Express 18:25712–25725CrossRef

93.

Dubois A, Grieve K, Moneron G, Lecaque R, Vabre L, Boccara C (2004) Ultrahigh-resolution full-field optical coherence tomography. Appl Opt 43:2874–2883CrossRef

94.

Chen T, Zhang N, Huo T, Wang C, Zheng J, Zhou T, Xue P (2013) Tiny endoscopic optical coherence tomography probe driven by a miniaturized hollow ultrasonic motor. J Biomed Opt 18:086011CrossRef

95.

Prylepa A, Duchoslav J, Keppert T, Luckeneder G, Stellnberger K-H, Stifter D (2013) Nonlinear imaging with interferometric SHG microscopy using a broadband 1550 nm fs-fiber laser. In: CLEO EUROPE/IQEC, Munich, Germany, May 2013, p 1

96.

Su R, Kirillin M, Chang EW, Sergeeva E, Yun SH, Mattsson L (2014) Perspectives of mid-infrared optical coherence tomography for inspection and micrometrology of industrial ceramics. Opt Express 22:15804–15819CrossRef

97.

Schmitt JM, Xiang SH, Yung KM (1999) Speckle in optical coherence tomography. J Biomed Opt 4:95–105CrossRef

98.

Hitzenberger CK, Baumgartner A, Fercher AF (1998) Dispersion in-duced multiple signal peak splitting in partial coherence interferometry. Opt Commun 154:179–185CrossRef

99.

Su R, Ekberg P, Leitner M, Mattsson L (2014) Accurate and automated image segmentation of 3D optical coherence tomography data suffering from low signal-to-noise levels. J Opt Soc Am A 31:2551–2560CrossRef

100.

Chiffre LD, Carmignato S, Kruth J-P, Schmit R, Wecken-mann A (2014) Industrial applications of computed tomography. Ann CIRP 63:655–677CrossRef

101.

Kruth JP, Bartscher M, Carmignato S, Schmitt R, Chiffre LD, Weckenmannf A (2011) Computed tomography for dimensional metrology. Ann CIRP 60:821–842CrossRef

102.

Hsieh J (2009) Computed tomography: principles, design, artifacts, and recent advances, 2nd edn. SPIE Press, Bellingham

103.

Boone JM (2000) X-ray production, interaction, and detection in diagnostic imaging. In: Beutel J, Kundel HL, Van Metter RL (eds) Handbook of medical imaging, physics and psychophysics. SPIE Press, Bellingham, pp 1–78

104.

Requena G, Cloetens P, Altendorfer W, Poletti C, Tolnai D, Warchomickaa F, Degischera HP (2009) Sub-micrometer synchrotron tomography of multiphase metals using Kirkpatrick-Baez optics. Scripta Mater 61:760–763CrossRef

105.

Yaffe MJ, Rowlands JA (1997) X-ray detectors for digital radiography. Phys Med Biol 42:1–39CrossRef

106.

Smith BD (1990) Cone-beam tomography: recent advances and a tutorial review. Opt Eng 29:524–534CrossRef

107.

Ferrucci M, Leach RK, Giusca C, Carmignato S, Dewulf W (2015) Towards geometrical calibration of x-ray computed tomography systems—a review. Meas Sci Technol 26:092003CrossRef

108.

Flay N, Sun W, Brown S, Leach RK, Blumensat T (2015) Investigation of the focal spot drift in industrial cone-beam x-ray computed tomography. In: Proceedings of the DIR 2015, Ghent, Belgium, June 2015

109.

Brooks RA, Di Chiro G (1976) Beam hardening in x-ray reconstructive tomography. Phys Med Biol 21:390–398CrossRef

110.

Santiago P, Gage HD (1995) Statistical-models of partial volume effect. IEEE Trans Image Processing 4:1531–1540CrossRef

111.

Schorner K, Goldammer M, Stephan J (2011) Comparison between beam-stop and beam-hole array scatter correction techniques for industrial X-ray cone-beam CT. Nucl Instrum Meth B 269:292–299CrossRef

112.

Mail N, Moseley DJ, Siewerdsen JH, Jaffray DA (2008) An empirical method for lag correction in cone-beam CT. Med Phys 35:5187–5196CrossRef

113.

Carmignato S, Pierobon A, Savio E (2011) First international intercomparison of computed tomography systems for dimensional metrology. In: Proceedings of the 11th Euspen international conference, Como, Italy, May 2011. pp 84–87

114.

Dewulf W, Kiekens K, Tan Y, Welkenhuyzen F, Kruth J-P (2013) Uncertainty determination and quantification for dimensional measurements with industrial computed tomography. Ann CIRP 62:535–538CrossRef

115.

Hiller J, Maisl M, Reindl LM (2012) Physical characterization and performance evaluation of an X-ray micro-computed tomography system for dimensional metrology applications. Measur Sci Technol 23:085404CrossRef

116.

Hsieh J, Chao E, Thibault J, Grekowicz B, Horst A, McOlash S, Myers TJ (2004) A novel reconstruction algorithm to extend the CT scan field-of-view. Med Phys 31:2385–2391CrossRef

117.

Krämer P, Weckenmann A (2010) Multi-energy image stack fusion in computed tomography. Measur Sci Technol 21:045105CrossRef

118.

Fitzgerald R (2007) Phase-sensitive x-ray imaging. Phys Today 53:23–26CrossRef

119.

Flay N, Leach RK (2012) Application of the optical transfer function in x-ray computed tomography—a review. NPL Report ENG 41

120.

Landis EN, Keane DT (2010) X-ray microtomography. Mater Charact 61:1305–1316CrossRef

Titel: Micro-scale Geometry Measurement
verfasst von: Samanta Piano
Rong Su
Richard Leach
Verlag: Springer International Publishing
Buch: Micro-Manufacturing Technologies and Their Applications
Print ISBN: 978-3-319-39650-7

Electronic ISBN: 978-3-319-39651-4

Copyright-Jahr: 2017
DOI: https://doi.org/10.1007/978-3-319-39651-4_8

Premium Partner

Marktübersichten

Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.

Zur Marktübersicht