Ausgabe 1/2007
Inhalt (14 Artikel)
Design of near-field recording optics using truncated hemispherical SIL with cover-layer incident dual recording layers
- Technical Paper
Wan-Chin Kim, Hyun Choi, TaeSun Song, No-Cheol Park, Young-Pil Park, Jin-Eui Lee
Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives
- Technical Paper
Bangtao Chen, Jianmin Miao, Francis E. H. Tay
Topology optimization of a swing arm type actuator using the response surface method
- Technical Paper
Jeonghoon Yoo, Choong-Yong Lee
Thermal and flow analysis of a magneto-hydrodynamic micropump
- Technical Paper
Hamzeh Duwairi, Mustafa Abdullah
Variable optical attenuator using planar light attenuation scheme based on rotational and translational misalignment
- Technical Paper
Chengkuo Lee
Influences of interface oxidation on transmission laser bonding of wafers for microsystem packaging
- Technical Paper
Ampere A. Tseng, Jong-Seung Park, George P. Vakanas, Hongtao Wu, Miroslav Raudensky, T. P. Chen
Analysis of the dynamic behaviour of a torsional micro-mirror
- Technical Paper
Dong-Ming Sun, Wei Dong, Cai-Xia Liu, Wei-You Chen, Michael Kraft
Surface characterization and friction of a bio-inspired reversible adhesive tape
- Technical Paper
Bharat Bhushan, Robert A. Sayer
Surface micromachined high-performance RF MEMS inductors
- Technical Paper
Dong-Ming Fang, Yong Zhou, Xi-Ning Wang, Xiao-Lin Zhao
Manufacturing costs for microsystems/MEMS using high aspect ratio microfabrication techniques
- Technical Paper
R. A. Lawes
Power consumption analysis of surface acoustic wave sensor systems using ANSYS and PSPICE
- Technical Paper
Yi Liu, Tianhong Cui
Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach
- Technical Paper
Mohammad Yeakub Ali, Yee Wei Loo
Thermal trajectory control for micro RT-PCR biochips
- Technical Paper
Nan-Chyuan Tsai, Chung-Yang Sue
2D- and 3D-transmission electron microscopy and optical microscopy in powder-based micro components
- Technical Paper
Johannes Böhm, Martin Beck, Jürgen Hausselt