Ausgabe 1/2011
Inhalt (22 Artikel)
Application of wavelet neural network in signal processing of MEMS accelerometers
- Technical Paper
Dake Chen, Jiuqiang Han
A dry release of polyimide electrodes using Kapton film and application to EEG signal measurements
- Technical Paper
Dong-Hyun Baek, Jin-hee Moon, Yoon Young Choi, Mina Lee, Jee Hyun Choi, James Jungho Pak, Sang-Hoon Lee
Reliability of Pt ohmic contact on an undoped 3C-SiC micro-electrothermal device
- Technical Paper
Musaab Hassan
Wide range electrostatic MEMS Fabry Perot optical tunable filter: modelling an electrostatic and mechanic beam deflection
- Technical Paper
Nor Hafizah Ngajikin, Norazan Mohd Kassim, Abu Bakar Mohammad, Mohd Haniff Ibrahim
MEMS based humidity sensor using Si cantilever beam for harsh environmental conditions
- Technical Paper
N. J. R. Muniraj
Closed-form empirical relations to predict the static pull-in parameters of electrostatically actuated microcantilevers having linear width variation
- Technical Paper
M. M. Joglekar, D. N. Pawaskar
New system for real time study of in vivo migration and differentiation of stem cells
- Open Access
- Technical Paper
Siddiqul Haque, Günter R. Fuhr
Electromagnetic levitation micromotor with stator embedded (ELMSE): levitation and lateral stability characteristics analysis
- Technical Paper
Xiaosheng Wu, Teng Deng, Wenyuan Chen, Weiping Zhang
Theoretical and experimental study of capacitance considering fabrication process and edge effect for MEMS comb actuator
- Technical Paper
Guo Zhanshe, Feng Zhou, Cao Le, Fan Shangchun
Microstructures for characterization of seebeck coefficient of doped polysilicon films
- Technical Paper
Jin Xie, Chengkuo Lee, Ming-Fang Wang, Julius Minglin Tsai
Morphology and magnetic properties of electroplated Co-rich Co-Zn thin films
- Technical Paper
Tzu-Shun Yang, Naigang Wang, David P. Arnold
Study on the bimodal filler influence on the effective thermal conductivity of thermal conductive adhesive
- Technical Paper
Yan Zhang, Jing-yu Fan, Cong Yue, Johan Liu, Masahiro Inoue
A method of gap control based on the principle of equal thickness interference for HARNS fabrication
- Technical Paper
Jie Zhou, Gang Liu, Xiaobo Zhang, Ying Xiong, Yangchao Tian
Fabrication of GaN light emitting diode membrane on Si substrate for MEMS applications
- Technical Paper
M. Wakui, H. Sameshima, F.-R. Hu, K. Hane
Integrated micro Pirani gauge based hermetical package monitoring for uncooled VO x bolometer FPAs
- Technical Paper
Bin Xiao, Tao Dong, Einar Halvorsen, Zhaochu Yang, Yulong Zhang, Nils Hoivik, Dandan Gu, Nhut Minh Tran, Henrik Jakobsen
Active magnetic inertia latch for hard disk drives
- Technical Paper
Bu Hyun Shin, Kyung-Ho Kim, Seung-Yop Lee
Surface micromachining of unfired ceramic sheets
- Open Access
- Technical Paper
Jonathan M. Rheaume, Albert P. Pisano
A MEMS guide plate for a high temperature testing of a wafer level packaged die wafer
- Technical Paper
Woo-Chang Choi, Jee-Youl Ryu
A hybrid capacitive pressure and temperature sensor fabricated by adhesive bonding technique for harsh environment of kraft pulp digesters
- Technical Paper
Abdolreza R. Mohammadi, Chad P. J. Bennington, Mu Chiao
Design of high stroke electrostatic micropumps: a charge control approach with ring electrodes
- Technical Paper
Emanuele Bertarelli, Alberto Corigliano, Andreas Greiner, Jan G. Korvink
