Ausgabe 1/2014
Inhalt (19 Artikel)
Fabrication flaws and reliability in MEMS thin film polycrystalline flow sensor
- Review Paper
M. T. Bensidhoum, M. Laghrouche, A. Sidi Said, L. Montes, J. Boussey
Wide bandgap semiconductor thin films for piezoelectric and piezoresistive MEMS sensors applied at high temperatures: an overview
- Review Paper
M. A. Fraga, H. Furlan, R. S. Pessoa, M. Massi
Electro-thermal analysis of an embedded boron diffused microheater for thruster applications
- Technical Paper
Pijus Kundu, Tarun Kanti Bhattacharyya, Soumen Das
Ion-enrichment and ion-depletion of nanochannels based on electrochemical potential in a micro-nanofluidic chip
- Technical Paper
Jun-yao Wang, Chong Liu, Zheng Xu, Yong-kui Li, Yun-liang Liu
On the crystallinity of PVA/palm leaf biocomposite using DSC and XRD techniques
- Technical Paper
Arunendra Kumar Patel, R. Bajpai, J. M. Keller
Polymethylmethacrylate/polyethyleneglycol-based partially water soluble binder system for micro ceramic injection moulding
- Technical Paper
Thomas Hanemann, Oxana Weber
PMMA to Polystyrene bonding for polymer based microfluidic systems
- Technical Paper
Yiqiang Fan, Huawei Li, Ying Yi, Ian G. Foulds
Design and simulation of a novel metallic microgripper using vibration to release nano objects actively
- Technical Paper
Hamed Demaghsi, Hadi Mirzajani, Habib Badri Ghavifekr
Compact thermoelectric coupled models of micromachined thermal sensors using trajectory piecewise-linear model order reduction
- Technical Paper
Ying Liu, Weizheng Yuan, Honglong Chang, Binghe Ma
Micro-punching process of stainless steel foil with micro-die fabricated by micro-EDM
- Technical Paper
Jie Xu, Bin Guo, Debin Shan, Zhenlong Wang, Mingxing Li, Xiang Fei
Design optimization of micromixer with square-wave microchannel on compact disk microfluidic platform
- Technical Paper
Ju-Nan Kuo, Li-Ren Jiang
Design and fabrication of 3-dimensional helical structures in polydimethylsiloxane for flow control applications
- Technical Paper
Rajeev Kumar Singh, Avinash Kumar, Rishi Kant, Ankur Gupta, E. Suresh, Shantanu Bhattacharya
Vertically aligned multi-walled CNT arrays coated by gold nanoparticles for surface-enhanced Raman scattering
- Technical Paper
Jie Zhang, Yulin Chen, Tuo Fan, Chunhong Lai, Yong Zhu
A rotary comb-actuated microgripper with a large displacement range
- Technical Paper
Honglong Chang, Haitao Zhao, Fang Ye, Guangmin Yuan, Jianbing Xie, Michael Kraft, Weizheng Yuan
Fabrication of electrostatic MEMS microactuator based on X-ray lithography with Pb-based X-ray mask and dry-film-transfer-to-PCB process
- Technical Paper
Pongsak Kerdlapee, Anurat Wisitsoraat, Ditsayuth Phokaratkul, Komgrit Leksakul, Rungreung Phatthanakun, Adisorn Tuantranont
Design and fabrication of a micromachined gyroscope with high shock resistance
- Technical Paper
Jian Zhou, Tao Jiang, Ji-wei Jiao, Ming Wu
CMOS integrated elliptic diaphragm capacitive pressure sensor in SiGe MEMS
- Technical Paper
Ananiah Durai Sundararajan, S. M. Rezaul Hasan
Theoretical and numerical investigations of an electroosmotic flow micropump with interdigitated electrodes
- Technical Paper
Ujjal Barman, Ashis K. Sen, Subhash C. Mishra
Galvanic deposition in partially conductive plastic molds for manufacture of finely detailed microcomponents
- Technical Paper
Volker Piotter, Jürgen Prokop
