Ausgabe 1/2015
Inhalt (39 Artikel)
RETRACTED ARTICLE: A MEMS packaged capacitive pressure sensor employing 3C-SiC with operating temperature of 500 °C
- Review Paper
Noraini Marsi, Burhanuddin Yeop Majlis, Azrul Azlan Hamzah, Faisal Mohd-Yasin
Development research of thermocouple-based microwave power sensors using AC/DC substitution method
- Technical Paper
De-bo Wang, Wen-juan Bai, Changchun Zhang, Yanyan Guo, Jing Chen
Experimental study of a low-g micromachined electrostatically suspended accelerometer for space applications
- Technical Paper
G. Y. Ma, F. T. Han, P. C. You, L. Zhang, X. J. Yan
Multichannel oscillatory-flow PCR micro-fluidic chip with controllable temperature gradient
- Technical Paper
Jinquan Nie, Yulong Zhao, Niancai Peng
Improvement of measurement sensitivity near contact in intensity-interferometry flying height testers
- Technical Paper
Korakoch Phetdee, Alongkorn Pimpin, Werayut Srituravanich
Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers
- Technical Paper
Anindya Lal Roy, Tarun Kanti Bhattacharyya
Hydrodynamic focusing micropump module with PDMS/nickel-particle composite diaphragms for microfluidic systems
- Technical Paper
Jeonghwan Kim, Kyung-Nam Kang, Yoonyoung Jin, Jost Goettert, Pratul K. Ajmera
A new validation method for clinical grade micro-encapsulation: quantitative high speed video analysis of alginate capsule
- Open Access
- Technical Paper
Ina Meiser, Sabine C. Müller, Friederike Ehrhart, Stephen G. Shirley, Heiko Zimmermann
Design optimization of linearly DC controlled staggered vertical comb drive actuators
- Technical Paper
Alaa Elhady, Diaa Khalil, M. A. E. Mahmoud
Design and characterization of miniature fluid dynamic bearing using novel multi-step elliptical grooves
- Technical Paper
Chien-Yu Chen, Chien-Sheng Liu, Yu-Cheng Li
Optimal design of piezoelectric micromachined modal gyroscope (PMMG) with modes matched: modal analysis
- Technical Paper
Xiaosheng Wu, Wenyuan Chen, Abdolvand Reza
A new silicon biaxial decoupled resonant micro-accelerometer
- Technical Paper
Bo Yang, Hui Zhao, Bo Dai, Xiaojun Liu
Graphene diaphragm analysis for pressure or acoustic sensor applications
- Technical Paper
Dongxue Wang, Shangchun Fan, Wei Jin
Biomimetic superhydrophobic polymer surfaces by replication of hierarchical structures fabricated using precision tooling machine and anodized aluminum oxidation
- Technical Paper
Donghui Chu, Akihiko Nemoto, Hiroshi Ito
A near zero skew actuation mechanism for hard disk drives
- Technical Paper
Zhimin He, Jianqiang Mou, Kheong Sann Chan, Suet Hoi Lam, Wuzhong Lin
Implantable electrode array with platinum black coating for brain stimulation in fish
- Technical Paper
Chuan Zhang, Jing-Quan Liu, Hong-Chang Tian, Xiao-Yang Kang, Jing-Cheng Du, Yue-Feng Rui, Bin Yang, Chun-Sheng Yang
Development of a simple and reliable PDMS interconnect for high throughput microfluidic applications
- Technical Paper
C. J. Mu, Z. Y. Zhang, M. Lin, X. C. Cao
Integration method of silicon sensors on SU-8-based microfluidic platforms
- Technical Paper
Francisco Perdigones, Carmen Aracil, José M. Quero, Manuel Gutiérrez, Cecilia Jiménez, Pablo Giménez
Design and fabrication of a novel tri-axis gyroscope with sensing diagonal-pendulums
- Technical Paper
M. C. Wang, J. W. Jiao, P. L. Yan, B. W. Mi, S. Qin, W. J. Liu
Piezoelectric micro power harvester using flow-induced vibration for intrastructure health monitoring applications
- Technical Paper
Young Ho Seo, Byeong-Hee Kim, Doo-Sun Choi
Ultra-small micro pressure sensor chip design and fabrication featuring high-sensitivity and good-linearity
- Technical Paper
B. R. Zheng, C. Zhou, Q. Wang, X. M. Pan, W. Xue
Electromagnetic modeling and parameter extraction of RF-MEMS switch
- Technical Paper
Ashish Kumar Sharma, Navneet Gupta
Numerical study of the effect of microchannel geometry on temperature gradient focusing using the Joule heating effect
- Technical Paper
Taeheon Han, Sungjin Park, Tae-Joon Jeon, Sun Min Kim
Electrothermal modeling, fabrication and analysis of low-power consumption thermal actuator with buckling arm
- Technical Paper
Hongyun So, Albert P. Pisano
Fabrication of through substrate grooves on GaAs by deep wet etching and its application in GaAs CCD wafer level packaging
- Technical Paper
S. F. Wang, M. Han, J. T. Ye, G. W. Xu, L. Luo
High temperature characteristic for wireless pressure LTCC-based sensor
- Technical Paper
Tan Qiulin, Kang Hao, Qin Li, Xiong Jijun, Liu Jun, Xue Chenyang, Zhang Wendong, Luo Tao
Suspended high Q integrated inductor by wafer level packaging technology
- Technical Paper
M. Han, S. F. Wang, G. W. Xu, Le Luo
Study on effects of the damping ratio on output performance of micro electromagnetic vibration energy harvesters
- Technical Paper
YiMing Lei, Zhiyu Wen
A high sensitive and robust controllable MEMS gyroscope with inherently linear control force using a high performance 2-DOF oscillator
- Technical Paper
Zahra Deyhim, Zeinab Yousefi, Habib Badri Ghavifekr, Esmaeil Najafi Aghdam
Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer
- Technical Paper
Jeong Il Lee, Mitsuhiro Shikida, Kazuo Sato
Design and simulation of bidirectional impact sensors array with optimized air damped response
- Technical Paper
Saeid Hematian Dehkordi, Reza Askari Moghadam, Javad Koohsorkhi
Microfluidic chip for rapid and automatic extraction of plasma from whole human blood
- Technical Paper
Ju-Nan Kuo, Yu-Hui Zhan
Design of experiments based factorial design and response surface methodology for MEMS optimization
- Technical Paper
M. M. Saleem, A. Somá
Analysis of spring-back deformation of head-mounting-block after ball-swaging in hard disk drives
- Technical Paper
Shinji Koganezawa
Field effect transistor with integrated microfluidic channel as pH sensor
- Technical Paper
I. Bouhadda, O. De Sagazan, F. Le Bihan
Application of vertically aligned carbon nanotubes on burnishing slider in cleaning process of magnetic disk surfaces
- Technical Paper
Hiroshi Tani, Keisuke Konishi, Wataru Norimatsu, Michiko Kusunoki, Norio Tagawa
Temperature dependence of the electromechanical characteristics of superconducting RF-MEMS switches
- Technical Paper
N. Alcheikh, P. Xavier, J. M. Duchamp, K. F. Schuster, C. Malhaire, B. Remaki, C. Boucher, X. Mescot
Modeling and simulation of metal organic halide vapor phase epitaxy (MOHVPE) growth chamber
- Technical Paper
N. Zieyana Mohamed Annuar, Mohd Faizul Mohd Sabri, A. Shuhaimi Abu Bakar
