Ausgabe 11-12/2007
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Stresa - Italy, 26-28 April 2006
Inhalt (33 Artikel)
A new generic surface micromachining module for MEMS hermetic packaging at temperatures below 200 °C
R. Hellín Rico, J.-P. Celis, K. Baert, C. Van Hoof, A. Witvrouw
A novel packaging approach for RF MEMS switching functions on alumina substrate
Mohamad El Khatib, Arnaud Pothier, Aurelian Crunteanu, Pierre Blondy
Au–Sn flip-chip solder bump for microelectronic and optoelectronic applications
Jeong-Won Yoon, Hyun-Suk Chun, Ja-Myeong Koo, Seung-Boo Jung
Ultra fine pitch flat panel display packaging using 3 μm conductive particles
G. J. Wang, Y. C. Lin, G. S. Lin
A novel contact resistance model of anisotropic conductive film for FPD packaging
G. J. Wang, Y. C. Lin, G. S. Lin
High quality factor copper inductors integrated in deep dry-etched quartz substrates
C. Leroy, M. B. Pisani, C. Hibert, D. Bouvet, M. Puech, A. M. Ionescu
Fabrication of silicon-on-insulator MEM resonators with deep sub-micron transduction gaps
Nicoleta Diana Badila Ciressan, Cyrille Hibert, Marco Mazza, Adrian M. Ionescu
Design of bossed silicon membranes for high sensitivity microphone applications
P. Martins, S. Beclin, S. Brida, S. Metivet, O. Stojanovic, C. Malhaire
Studies on a micro turbine device with both journal- and thrust-air bearings
X. C. Shan, Q. D. Zhang, Y. F. Sun, R. Maeda
Development of a multi-layer microelectrofluidic platform
S. H. Ng, Z. F. Wang, R. T. Tjeung, N. F. de Rooij
Quality factor of micro cantilevers transduced by piezoelectric lead zirconate titanate film
Jian Lu, Tsuyoshi Ikehara, Takeshi Kobayashi, Ryutaro Maeda, Takashi Mihara
The design and fabrication of polymerase chain reaction platform
Chao-Heng Chien, Hui-Min Yu
Design and fabrication of the concentric circle light guiding plate for LED-backlight module by MEMS technique
Chao-Heng Chien, Zhi-Peng Chen
Concave microlens array mold fabrication in photoresist using UV proximity printing
Tsung-Hung Lin, Hsiharng Yang, Ching-Kong Chao
Yield analysis via induction of process statistics into the design of MEMS and other microsystems
Shyam Praveen Vudathu, Kishore Kumar Duganapalli, Rainer Laur, Dorota Kubalińska, Angelika Bunse-Gerstner
High current densities in copper microcoils: influence of substrate on failure mode
Johan Moulin, Marion Woytasik, Jean-Paul Grandchamp, Elisabeth Dufour-Gergam, Alain Bosseboeuf
Design and development of sub-micron scale specimens with electroplated structures for the microtensile testing of thin films
Ming-Tzer Lin, Chi-Jia Tong, Chung-Hsun Chiang
Effect of surface finish of substrate on mechanical reliability of In-48Sn solder joints in MOEMS package
Ja-Myeong Koo, Seung-Boo Jung
Characterization of flexible RF microcoils dedicated to local MRI
M. Woytasik, J.-C. Ginefri, J.-S. Raynaud, M. Poirier-Quinot, E. Dufour-Gergam, J.-P. Grandchamp, O. Girard, P. Robert, J.-P. Gilles, E. Martincic, L. Darrasse
High viscous liquids as a source in micro-screw heat exchanger: fabrication, simulation and experiments
Haifa El-Sadi, Nabil Esmail, Andreas K. Athienitis
MEMS tunable capacitors with fragmented electrodes and rotational electro-thermal drive
A. Mehdaoui, M. B. Pisani, D. Tsamados, F. Casset, P. Ancey, A. M. Ionescu
Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect
Ruey Fang Shyu, Hsiharng Yang, Wen-Ren Tsai, Jhy-Cherng Tsai
Integration of micro-electro-mechanical deformable mirrors in doped fiber amplifiers
D. Bouyge, A. Crunteanu, D. Sabourdy, P. Blondy, V. Couderc, J. Lhermite, L. Grossard, A. Barthélemy
Design and modeling of electromagnetic actuator in mems-based valveless impedance pump
Hsien-Tsung Chang, Chia-Yen Lee, Chih-Yung Wen
Miniaturized fluorescence excitation platform with optical fiber for bio-detection chips
Hsiharng Yang, Chung-Tze Lee, Fuh-Yu Chang
Power processing circuits for electromagnetic, electrostatic and piezoelectric inertial energy scavengers
P. D. Mitcheson, T. C. Green, E. M. Yeatman
Scaling effects for electromagnetic vibrational power generators
Terence O’Donnell, Chitta Saha, Steve Beeby, John Tudor
Experimental comparison of macro and micro scale electromagnetic vibration powered generators
S. P. Beeby, M. J. Tudor, R. N. Torah, S. Roberts, T. O’Donnell, S. Roy
Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators
Christophe Serre, Alejandro Pérez-Rodríguez, Nuria Fondevilla, Joan Ramon Morante, Josep Montserrat, Jaume Esteve
MEMS design and fabrication of an electrostatic vibration-to-electricity energy converter
Yi Chiu, Chiung-Ting Kuo, Yu-Shan Chu
Recent developments in MEMS-based miniature fuel cells
Tristan Pichonat, Bernard Gauthier-Manuel