Ausgabe 12/2010
Inhalt (17 Artikel)
High-performance capacitive humidity sensor with novel electrode and polyimide layer based on MEMS technology
- Technical Paper
Ji-Hong Kim, Sung-Min Hong, Byung-Moo Moon, Kunnyun Kim
E-beam lithography of nano-interdigital transducers on insulating and semiconducting substrates
- Technical Paper
G. F. Iriarte
Design and fabrication of a flexible three-axial tactile sensor array based on polyimide micromachining
- Technical Paper
Hyun-Jun Kwon, Woo-Chang Choi
The effects of metal particle size and distributions on dimensional accuracy for micro parts in micro metal injection molding
- Technical Paper
Kenji Okubo, Shigeo Tanaka, Hiroshi Ito
Bonding of planar poly (methyl methacrylate) (PMMA) nanofluidic channels using thermal assisted ultrasonic bonding method
- Technical Paper
Zongbo Zhang, Yi Luo, Xiaodong Wang, Shengqiang He, Fantao Meng, Liding Wang
Microfluidics-based immunoassays by using an integrated fluorescence detection system
- Technical Paper
Xing Chen, Dafu Cui, Hui Li, Haoyuan Cai, Jianhan Sun, Jian Chen
Design of an SOI-MEMS high resolution capacitive type single axis accelerometer
- Technical Paper
Kalyan Kumar Mistry, K. B. M. Swamy, Siddhartha Sen
Modeling of the intrinsic stress effect on the resonant frequency of NEMS resonators integrated by beams with variable cross-section
- Technical Paper
A. L. Herrera-May, L. A. Aguilera-Cortés, P. J. García-Ramírez, H. Plascencia-Mora, M. Torres-Cisneros
Influence of tool fabrication process on characteristics of hot embossed polymer microfluidic chips for electrospray
- Technical Paper
Sana Malahat, Pio G. Iovenitti, Igor Sbarski
Performance characterization of drop-on-demand micro-dispensing system with multi-printheads
- Technical Paper
J. Sun, R. Yang, K. K. Tan, J. Y. H. Fuh, Y. S. Wong, J. H. Ng
Fabrication of microfluidic device channel using a photopolymer for colloidal particle separation
- Technical Paper
Nurul Amziah Md Yunus, Nicolas G. Green
A water-tight packaging of MEMS electrostatic actuators for biomedical applications
- Technical Paper
M. A. Erismis, H. Pereira Neves, P. De Moor, R. Puers, C. Van Hoof
Length-dependent photoinduced current in vertically-aligned MWNTs forests
- Technical Paper
Jie Zhang, Yingqi Jiang, Pengbo Wang, Hailong Tian
Electrostatically driven tunable radio frequency inductor
- Technical Paper
Dong-Ming Fang, Quan Yuan, Xiu-Han Li, Hai-Xia Zhang
Ring shape anchored RF MEMS contour mode disk resonator for UHF communication applications
- Technical Paper
Masoud Baghelani, Habib Badri Ghavifekr
An experimental analysis of electrostatically vibrated array of polysilicon cantilevers
- Technical Paper
S. Chakraborty, K. B. M. Swamy, S. Sen, T. K. Bhattacharyya
