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Microsystem Technologies

Ausgabe 2/2009

Inhalt (15 Artikel)

A nodal analysis model for the out-of-plane beamshape electrothermal microactuator

  • Technical Paper

Rengang Li, Qing-An Huang, Weihua Li

Effect of microstructure on blood cell clogging in blood separators based on capillary action

  • Technical Paper

Duckjong Kim, Jae Young Yun, Sang-Jin Park, Seung S. Lee

Performance characterization of a decoupled tri-axis micro angular rate sensor

  • Technical Paper

Nan-Chyuan Tsai, Chung-Yang Sue, Chih-Che Lin

Rubber-assisted micro forming of polymer thin films

  • Technical Paper

Pratapkumar Nagarajan, Donggang Yao

Mechanical behavior of a novel resonant microstructure for magnetic applications considering the squeeze-film damping

  • Technical Paper

A. L. Herrera-May, L. A. Aguilera-Cortés, L. García-Gonzalez, E. Figueras-Costa

A study on the novel micromixer with chaotic flows

  • Technical Paper

Seung-Hyeon Lee, Ho-Jin Kang, Bumkyoo Choi

A system-level model for a silicon thermal flow sensor

  • Technical Paper

Guang-Ping Shen, Ming Qin, Qing-An Huang

Micromachining of passive planar micromixer on poly (methyl methacrylate) substrate with excimer laser ablation

  • Technical Paper

Heng Qi, Yuhong Liu, Xuan Wang, Feng Shen, Yong Yu, Tao Chen, Tiechuan Zuo

Numerical simulation and analysis of electrically actuated microbeam-based MEMS capacitive switch

  • Technical paper

Xun-jun He, Qun Wu, Yue Wang, Ming-xin Song, Jing-hua Yin

UV surface exposure for low temperature hydrophilic silicon direct bonding

  • Technical Paper

Xiaohui Lin, Guanglan Liao, Zirong Tang, Tielin Shi

The mechanics of polymer swelling on microcantilever sensors

  • Technical Paper

Natalya L. Privorotskaya, William P. King

Fast patterning microstructures using inkjet printing conformal masks

  • Erratum

C.-H. Lin, H. Yang, F.-Y. Chang, S.-H. Chang, M.-T. Yen

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