Ausgabe 2/2014
Inhalt (21 Artikel)
Design and control of a single-stage dual-actuator system for high-precision manufacturing
- Technical Paper
Michael D. Kim, Kwang-Hee Lee, Kyung-Tae Nam, Sang-Moo Lee
Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope
- Technical Paper
Yongsong He, Xiaosheng Wu, Fu Zheng, Wenyuan Chen, Weiping Zhang, Feng Cui, Wu Liu
Effects of geometric parameters for superhydrophobicity of polymer surfaces fabricated by precision tooling machines
- Technical Paper
Donghui Chu, Akihiro Nemoto, Hiroshi Ito
Fabrication of CNT-carbon composite microstructures using Si micromolding and pyrolysis
- Technical Paper
Liang He, Masaya Toda, Yusuke Kawai, Hidetoshi Miyashita, Mamoru Omori, Toshiyuki Hashida, Rüdiger Berger, Takahito Ono
Chemiluminescence detection for Cu (II) based on 1,10-Phenanthroline-hydrogen peroxide reaction on a PDMS microfluidic chip
- Technical Paper
Xueye Chen, Hong Zeng, Xing Wei, Jincheng Yang
A study on effect of wafer bow in wafer-level BCB cap transfer packaging
- Technical Paper
Seonho Seok, Janggil Kim
Silicon 45° micromirrors fabricated by etching in alkaline solutions with organic additives
- Open Access
- Technical Paper
Krzysztof P. Rola, Konrad Ptasiński, Adrian Zakrzewski, Irena Zubel
Transition interface for improving the temperature characteristics of micromachined gyroscopes
- Technical Paper
Zhanqiang Hou, Xuezhong Wu, Dingbang Xiao, Zhihua Chen, Jianbin Su
Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
- Technical Paper
Mohamed Sultan Mohamed Ali, Wang Ning Yuan, Kenichi Takahata
An experimental investigation of mixing of carbon nanotube/polymer composite in a batch-type screw mixer
- Technical Paper
Kyoung Duck Seo, Jang Min Park, Hyeonsoo Jeong, Dong Sung Kim
A novel self-aligned electrostatic vertical actuator using plastic deformation technology
- Technical Paper
Wei Li, Zhaohui Song, Xiaohong Ge, Lufeng Che, Yuelin Wang
Preparation of sacrificial layer for MEMS devices by lift-off technology
- Technical Paper
Jie Yang, Yu Shi, Hui Zhong, Xiangquan Jiao, Rui Zhang, Bo Du
A microacoustic analysis including viscosity and thermal conductivity to model the effect of the protective cap on the acoustic response of a MEMS microphone
- Technical Paper
D. Homentcovschi, R. N. Miles, P. V. Loeppert, A. J. Zuckerwar
Development of the automated gold-linked electrochemical immunoassay system for blood monitoring
- Technical Paper
Suguru Shiohara, Miyuki Chikae, Yoshiaki Ukita, Hiromi Ushijima, Yasukazu Fukumura, Toshinari Takamura, Yuzuru Takamura
Design and analysis of a z-axis tuning fork gyroscope with guided-mechanical coupling
- Technical Paper
Thong Quang Trinh, Long Quang Nguyen, Dzung Viet Dao, Hoang Manh Chu, Hung Ngoc Vu
Modeling the instability of CNT tweezers using a continuum model
- Technical Paper
Amin Farrokhabadi, Ali Koochi, Mohamadreza Abadyan
Measurement of local electric field in microdevices for low-voltage electroporation of adherent cells
- Technical Paper
Hirofumi Shintaku, Kazumi Hakamada, Hiroshi Fujimoto, Takeshi Nagata, Jun Miyake, Satoyuki Kawano
Droplet-based biochemical assay by magnetic wire manipulation between multiple droplets
- Technical Paper
Mitsuhiro Shikida, Tatsuaki Sugito, Mina Okochi, Hiroyuki Honda
Carbon nanotube based miniaturized electron gun and column assembly
- Technical Paper
Javad Koohsorkhi, Shamsoddin Mohajerzadeh
Design of novel compact anti-stiction and low insertion loss RF MEMS switch
- Technical Paper
Deepak Bansal, Amit Kumar, Akshdeep Sharma, Prem Kumar, K. J. Rangra
New approach for batch microfabrication of silicon-based micro fuel cells
- Technical Paper
N. Sabaté, J. P. Esquivel, J. Santander, J. G. Hauer, R. W. Verjulio, I. Gràcia, M. Salleras, C. Calaza, E. Figueras, C. Cané, L. Fonseca
