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Microsystem Technologies

Ausgabe 2/2016

Inhalt (25 Artikel)

Technical Paper

Design and vibration sensitivity of a MEMS tuning fork gyroscope with anchored coupling mechanism

Yanwei Guan, Shiqiao Gao, Lei Jin, Lianmin Cao

Technical Paper

Analytical and high accurate formula for electrostatic force of comb-actuators with ground substrate

Jiangbo He, Jin Xie, Xiaoping He, Lianming Du, Wu Zhou, Zhiyuan Hu

Technical Paper

Microstructural analysis of laser micro-welds between copper and aluminum

A. Mian, C. Taylor, H. Vijwani

Technical Paper

Three-axis pneumatic tactile display with integrated capacitive sensors for feedback control

Seokpyo Yun, Jihyung Yoo, Soochul Lim, Joonah Park, Hyung-Kew Lee, Kwang-Seok Yun

Technical Paper

Electrokinetic concentrating with a nanofluidic device for magnetic beads-based antigen–antibody immunoassay

Zheng Xu, Jun-yao Wang, Shuai-long Hu, Jia-qing Lu, Chong Liu, Jun-shan Liu

Technical Paper

Predicting the RVE size of micro-particle composite for electrical purpose using particles dispersion developed

M. Zulkarnain, R. A. Aziz Muhammad Hilmi, A. B. Muhammad Husaini, M. Mariatti, I. A. Azid

Technical Paper

Separated pivot-shaft actuator for small skew angle in hard disk drives

Shinji Koganezawa, Hiroshi Tani, Norio Tagawa

Technical Paper

Hybrid micro electrostatic actuator

Zewdu Hailu, Siyuan He, Ridha Ben Mrad

Technical Paper

High frequency characterization and analysis of through silicon vias and coplanar waveguides for silicon interposer

Huijuan Wang, Xiaoli Ren, Jing Zhou, Cheng Pang, Chongsheng Song, Fengwei Dai, Kai Xue, Feng Jiang, Daquan Yu, Lixi Wan

Technical Paper

Effect of cycloid movement on plate-to-roll gravure offset printing

Yongsik Kim, Sangshin Park, Kiyeol Shin, Cheolho Bai, Jaesool Shim

Technical Paper

Fabrication of a micro-tip array mold using a micro-lens mask with proximity printing

Tsung-Hung Lin, Ching-Kong Chao, Hsiharng Yang

Technical Paper

Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation

Stefan Weinberger, Tran Trung Nguyen, Roméo Lecomte, Yahia Cheriguen, Christoph Ament, Martin Hoffmann

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