Ausgabe 3/1998
Inhalt (15 Artikel)
Editorial
International Conference on High Aspect Ratio Microstructure Technology HARMST ‘97
Peter Bley
Technical papers
Structural changes in PMMA under hard X-ray irradiation
A. C. Henry, R. L. McCarley, S. Das, C. Khan Malek, D. S. Poche
A new method for mass fabrication of metallic microstructures
A. Thies, V. Piotter, J. H. Hausselt, O. F. Hagena
Comparative study of hot embossed micro structures fabricated by laboratory and commercial environments
L. Lin, Y.-T. Cheng, C.-J. Chiu
Technology for movable microstructures - Transfer of laboratory processes to industrial production
O. Roetting, M. Heckele, W. Bacher
Hot embossing - The molding technique for plastic microstructures
M. Heckele, W. Bacher, K. D. Müller
Multi-functional valve components fabricated by combination of LIGA processes and high precision mechanical engineering
A. Ruzzu, J. Fahrenberg, M. Heckele, T. Schaller
Angular rate sensor and accelerometer combined on the same micromachined CMOS chip
D. R. Sparks, X. Huang, W. Higdon, J. D. Johnson
Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
L. Dellmann, S. Roth, C. Beuret, L. Paratte, G.-A. Racine, H. Lorenz, M. Despont, P. Renaud, P. Vettiger, N. F. de Rooij
Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist
H. Lorenz, M. Despont, P. Vettiger, P. Renaud
Heat exchange in short microtubes and micro heat exchangers with low hydraulic losses
D. A. Rachkovskij, E. M. Kussul, S. A. Talayev