Ausgabe 3/2010
Inhalt (16 Artikel)
Modeling and simulation of levitation control for a micromachined electrostatically suspended gyroscope
- Technical Paper
Qijun Xiao, Wenyuan Chen, Shengyong Li, Feng Cui, Weiping Zhang
A sub-micron metallic electrothermal gripper
- Technical Paper
Daniel Sang-Won Park, Arun Kumar Nallani, DonKyu Cha, Gil-Sik Lee, Moon J. Kim, George Skidmore, Jeong-Bong Lee, Jeong-Soo Lee
Mechanical characterization of post-buckled micro-bridge beams by micro-tensile testing
- Technical Paper
Duanqin Zhang, Jinkui Chu
Fabrication and mathematical analysis of an electrochemical microactuator (ECM) using electrodes coated with platinum nano-particles
- Technical Paper
Dong Eun Lee, Steven A. Soper, Wanjun Wang
Factors affecting the replication quality of micro metal gears produced by μ-PIM
- Technical Paper
Jinyan Tong, Haiqin Yin, Xuanhui Qu
Reinforcement of micro injection molded weld line strength with ultrasonic oscillation
- Technical Paper
Lei Xie, Gerhard Ziegmann, Bingyan Jiang
New fabrication techniques of SU-8 fiber holder with cantilever-type elastic microclips by inclined UV lithography in water using single Mylar mask
- Technical Paper
Zhong-geng Ling, Kun Lian
Linewidth design rules for microstructures manufactured in PMMA resist using X-ray LIGA
- Technical Paper
Ron A. Lawes
Study of novel electrical routing and integrated packaging on bio-compatible flexible substrates
- Technical Paper
Hong Hocheng, Chao-Ming Chen, Yu-Chang Chou, Chien-Hung Lin
An innovative micro-diamagnetic levitation system with coils applied in micro-gyroscope
- Technical Paper
Kai Liu, Weiping Zhang, Wu Liu, Wenyuan Chen, Kai Li, Feng Cui, Shipeng Li
Novel interconnection technology for heterogeneous integration of MEMS–LSI multi-chip module
- Technical Paper
Kang-Wook Lee, Mitsumasa Koyanagi
Dielectric materials for electrowetting-on-dielectric actuation
- Technical Paper
Hong Liu, Saman Dharmatilleke, Devendra K. Maurya, Andrew A. O. Tay
Performance optimization and mechanical modeling of uniaxial piezoresistive microaccelerometers
- Technical Paper
Angel R. Cortés-Pérez, Agustin Leobardo Herrera-May, Luz A. Aguilera-Cortés, Max A. González-Palacios, Miguel Torres-Cisneros
Fabrication of metallic micromolds by laser and electro-discharge micromachining
- Technical Paper
Pun-Pang Shiu, George K. Knopf, Mile Ostojic
Thermal bonding of PMMA: effect of polymer molecular weight
- Technical Paper
Nimai C. Nayak, C. Y. Yue, Y. C. Lam, Y. L. Tan