Ausgabe 3/2013
Special Issue of the 9th High-Aspect-Ratio Micro-Structure Technology Workshop, HARMST 2011, in Hsinchu, Taiwan, June 12-18, 2011
Inhalt (25 Artikel)
Special issue of the 9th high-aspect-ratio micro-structure technology workshop, HARMST 2011, in Hsinchu, Taiwan, June 12–18, 2011
Chien-Chung Fu, Bernd Michel
Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGA
Hideki Kido, Tomoyuki Kuroki, Masaaki Okubo, Yuichi Utsumi
Fabrication of high precision microstructure using ICP etching for capacitive inclination sensor
Daiji Noda, Yuu Kuboyama, Tadashi Hattori
Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologies
Harutaka Mekaru, Chieko Okuyama, Akihisa Ueno
Effect of buffer materials on thermal imprint on plastic optical fiber
Harutaka Mekaru, Akihiro Ohtomo, Hideki Takagi
3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer
Sascha P. Heussler, Herbert O. Moser, S. M. P. Kalaiselvi
Manufacture of a micro-sized piezoelectric ceramic structure using a sacrificial polymer mold insert
Jong Hyun Kim, Si-Young Choi, Jae-Ho Jeon, Geunbae Lim, Suk Sang Chang
Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure time
Mitsuhiro Horade, Susumu Sugiyama
Influence of developer temperature on the shape of structures fabricated by deep X-ray lithography
Mitsuhiro Horade, Susumu Sugiyama
Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tip
Dae Keun Choi, Sang Hoon Lee
Obstacles for cognitive analogy in analysis and synthesis in microsystems development
Albert Albers, Peter Börsting, Sven Matthiesen
Numerical simulation of the capillary flow in the meander microchannel
C. C. Lai, C. K. Chung
On characteristics of pore size distribution in hybrid pulse anodized high-aspect-ratio aluminum oxide with Taguchi method
C. K. Chung, M. W. Liao, H. C. Chang, W. T. Chang, T. Y. Liu
Ensuring functional reliability of molded micro components
Albert Albers, Tarak Turki, Philipp Hoppen
A novel fast and low cost replication technology for high-aspect-ratio magnetic microstructures
Xuhan Dai, Xiaodan Miao, Guocheng Shao, Wanjun Wang
A magnetic nano-composite soft polymeric membrane
Akanksha Singh, Mandar Shirolkar, Mukta V. Limaye, Shubha Gokhale, Chantal Khan-Malek, Sulabha K. Kulkarni
BPN a new thick negative photoresist with high aspect ratio for MEMS applications
D. Bourrier, M. Dilhan, A. Ghannam, L. Ourak, H. Granier
High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension
Felix Greiner, Helmut F. Schlaak
Vertical Si nanowire with ultra-high-aspect-ratio by combined top-down processing technique
Jun Nakamura, Kohei Higuchi, Kazusuke Maenaka
Fabrication of flexible light guide plate using CO2 laser LIGA-like technology
C. K. Chung, Y. J. Syu, H. Y. Wang, C. C. Cheng, S. L. Lin, K. Z. Tu
Transparent thin thermoplastic biochip by injection-moulding and laser transmission welding
Akanksha Singh, Wilhelm Pfleging, Markus Beiser, Chantal Khan Malek
Metal deposition on flexible membrane through the combination of localized electrochemical deposition and electroless plating
Meng-Chi Huang, Tein-Li Chang, Tune-Hune Kao, Chien-Chung Fu
Application of the inclined exposure and molding process to fabricate a micro beam-splitter with nanometer roughness
Yun-Ju Chuang, Shih-Hao Huang, Ying-Chuan Chen, Kuo-Yung Hung
Supporting design of primary shaped micro parts and systems through provision of experience
Albert Albers, Tarak Turki
Fabrication of two dimensional high aspect ratio polymer photonic crystal laser
Jie Zhou, Gang Liu, Xiaobo Zhang, Xueliang Kang, Ying Xiong, Yangchao Tian