Ausgabe 3/2013 Special Issue of the 9th High-Aspect-Ratio Micro-Structure Technology Workshop, HARMST 2011, in Hsinchu, Taiwan, June 12-18, 2011
Inhalt (25 Artikel)
Special issue of the 9th high-aspect-ratio micro-structure technology workshop, HARMST 2011, in Hsinchu, Taiwan, June 12–18, 2011
- Editorial
Chien-Chung Fu, Bernd Michel
Application of photo-etching of polytetrafluoroethylene induced by high energy synchrotron radiation to LIGA
- Technical Paper
Hideki Kido, Tomoyuki Kuroki, Masaaki Okubo, Yuichi Utsumi
Fabrication of high precision microstructure using ICP etching for capacitive inclination sensor
- Technical Paper
Daiji Noda, Yuu Kuboyama, Tadashi Hattori
Fabrication of glass-like carbon molds to imprint on glass materials by MEMS processing technologies
- Technical Paper
Harutaka Mekaru, Chieko Okuyama, Akihisa Ueno
Effect of buffer materials on thermal imprint on plastic optical fiber
- Technical Paper
Harutaka Mekaru, Akihiro Ohtomo, Hideki Takagi
3D deep X-ray lithography for producing a multi-channel Fourier transform interferometer
- Technical Paper
Sascha P. Heussler, Herbert O. Moser, S. M. P. Kalaiselvi
Manufacture of a micro-sized piezoelectric ceramic structure using a sacrificial polymer mold insert
- Technical Paper
Jong Hyun Kim, Si-Young Choi, Jae-Ho Jeon, Geunbae Lim, Suk Sang Chang
Fabrication of 3-D PTFE microstructures utilising change of etching rate with respect to exposure time
- Technical Paper
Mitsuhiro Horade, Susumu Sugiyama
Influence of developer temperature on the shape of structures fabricated by deep X-ray lithography
- Technical Paper
Mitsuhiro Horade, Susumu Sugiyama
Deposition property investigation of a focused ion beam for a high-aspect-ratio metal tip
- Technical Paper
Dae Keun Choi, Sang Hoon Lee
Obstacles for cognitive analogy in analysis and synthesis in microsystems development
- Technical Paper
Albert Albers, Peter Börsting, Sven Matthiesen
Numerical simulation of the capillary flow in the meander microchannel
- Technical Paper
C. C. Lai, C. K. Chung
On characteristics of pore size distribution in hybrid pulse anodized high-aspect-ratio aluminum oxide with Taguchi method
- Technical Paper
C. K. Chung, M. W. Liao, H. C. Chang, W. T. Chang, T. Y. Liu
Ensuring functional reliability of molded micro components
- Technical Paper
Albert Albers, Tarak Turki, Philipp Hoppen
A novel fast and low cost replication technology for high-aspect-ratio magnetic microstructures
- Technical Paper
Xuhan Dai, Xiaodan Miao, Guocheng Shao, Wanjun Wang
A magnetic nano-composite soft polymeric membrane
- Technical Paper
Akanksha Singh, Mandar Shirolkar, Mukta V. Limaye, Shubha Gokhale, Chantal Khan-Malek, Sulabha K. Kulkarni
BPN a new thick negative photoresist with high aspect ratio for MEMS applications
- Technical Paper
D. Bourrier, M. Dilhan, A. Ghannam, L. Ourak, H. Granier
High aspect ratio metal micro and nano pillars for minimal footprint MEMS suspension
- Technical Paper
Felix Greiner, Helmut F. Schlaak
Vertical Si nanowire with ultra-high-aspect-ratio by combined top-down processing technique
- Technical Paper
Jun Nakamura, Kohei Higuchi, Kazusuke Maenaka
Fabrication of flexible light guide plate using CO2 laser LIGA-like technology
- Technical Paper
C. K. Chung, Y. J. Syu, H. Y. Wang, C. C. Cheng, S. L. Lin, K. Z. Tu
Transparent thin thermoplastic biochip by injection-moulding and laser transmission welding
- Technical Paper
Akanksha Singh, Wilhelm Pfleging, Markus Beiser, Chantal Khan Malek
Metal deposition on flexible membrane through the combination of localized electrochemical deposition and electroless plating
- Technical Paper
Meng-Chi Huang, Tein-Li Chang, Tune-Hune Kao, Chien-Chung Fu
Application of the inclined exposure and molding process to fabricate a micro beam-splitter with nanometer roughness
- Technical Paper
Yun-Ju Chuang, Shih-Hao Huang, Ying-Chuan Chen, Kuo-Yung Hung
Supporting design of primary shaped micro parts and systems through provision of experience
- Technical Paper
Albert Albers, Tarak Turki
Fabrication of two dimensional high aspect ratio polymer photonic crystal laser
- Technical Paper
Jie Zhou, Gang Liu, Xiaobo Zhang, Xueliang Kang, Ying Xiong, Yangchao Tian
