Ausgabe 4-5/2014 Special Issue of the Conference ‘SMART SENSORS, ACTUATORS AND MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Grenoble, France, 24 - 26 April 2013
Inhalt (52 Artikel)
Special issue of the conference ‘Smart Sensors, Actuators and MEMS’, within the SPIE EUROPE Symposium ‘MICROTECHNOLOGIES’ Grenoble, France, 24–26 April 2013
- Editorial
Ulrich Schmid, Thomas Becker, Bernd Michel
High temperature stability of electrically conductive Pt–Rh/ZrO2 and Pt–Rh/HfO2 nanocomposite thin film electrodes
- Technical Paper
Scott C. Moulzolf, David J. Frankel, Mauricio Pereira da Cunha, Robert J. Lad
Design and characterization of a multi-stable magnetic shape memory alloy hybrid actuator
- Technical Paper
Y. Le Gall, C. Bolzmacher
Pre-bond megasonic cleaning with improved process control
- Technical Paper
D. Dussault, E. Liebscher, F. Fournel, N. Payen, V. Dragoi
Thermal actuators featuring large displacements for passive temperature sensing
- Technical Paper
H. Steiner, W. Hortschitz, M. Stifter, F. Keplinger, T. Sauter
A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors
- Technical Paper
Hutomo Suryo Wasisto, Qing Zhang, Stephan Merzsch, Andreas Waag, Erwin Peiner
Finite element modeling and experimental proof of NEMS-based silicon pillar resonators for nanoparticle mass sensing applications
- Technical Paper
Hutomo Suryo Wasisto, Kai Huang, Stephan Merzsch, Andrej Stranz, Andreas Waag, Erwin Peiner
Development and characterization of a microthermoelectric generator with plated copper/constantan thermocouples
- Technical Paper
Silvia Pelegrini, Andrea Adami, Cristian Collini, Paolo Conci, Clodoaldo I. L. de Araújo, Vittorio Guarnieri, Saulo Güths, André A. Pasa, Leandro Lorenzelli
Micro molding for double-sided micro structuring of SU-8 resist
- Technical Paper
A. Oerke, S. Büttgenbach, A. Dietzel
Alterations in the complex refractive index of copper oxide thin films as sensing effect for hydrogen sulfide monitoring
- Technical Paper
Janosch Kneer, Manuel Boxberg, Sebastian Busch, André Eberhardt, Stefan Palzer, Jürgen Wöllenstein
Lock-in amplifier powered analogue Q-control circuit for self-actuated self-sensing piezoelectric MEMS resonators
- Technical Paper
M. Kucera, F. Hofbauer, E. Wistrela, T. Manzaneque, V. Ruiz-Díez, J. L. Sánchez-Rojas, A. Bittner, U. Schmid
Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes
- Technical Paper
J. Iannacci, E. Serra, R. Di Criscienzo, G. Sordo, M. Gottardi, A. Borrielli, M. Bonaldi, T. Kuenzig, G. Schrag, G. Pandraud, P. M. Sarro
Microthermal sensors for determining fluid composition and flow rate in fluidic systems
- Technical Paper
B. Schmitt, C. Kiefer, A. Schütze
Wafer bonding using Cu–Sn intermetallic bonding layers
- Technical Paper
C. Flötgen, M. Pawlak, E. Pabo, H. J. van de Wiel, G. R. Hayes, V. Dragoi
Electrical characterization of micromachined AlN resonators at various back pressures
- Technical Paper
Abdallah Ababneh, A. N. Al-Omari, A. M. K. Dagamseh, H. C. Qiu, D. Feili, V. Ruiz-Díez, T. Manzaneque, J. Hernando, J. L. Sánchez-Rojas, A. Bittner, U. Schmid, H. Seidel
Evaluation of low-acceleration MEMS piezoelectric energy harvesting devices
- Technical Paper
Nathan Jackson, Rosemary O’Keeffe, Finbarr Waldron, Mike O’Neill, Alan Mathewson
Microgalvanic nickel pulse plating process for the fabrication of thermal microactuators
- Technical Paper
Wolfgang E. G. Hansal, Harald Steiner, R. Mann, M. Halmdienst, J. Schalko, F. Keplinger, P. Svasek
Piezoelectric in-plane microplate resonators based on contour and flexure-actuated modes
- Technical Paper
Tomás Manzaneque, V. Ruiz-Díez, J. Hernando-García, A. Ababneh, A. N. Al-Omari, M. Kucera, A. Bittner, U. Schmid, H. Seidel, J. L. Sánchez-Rojas
Energy storage options for wireless sensors powered by aircraft specific thermoelectric energy harvester
- Technical Paper
K. Thangaraj, A. Elefsiniots, Th. Becker, U. Schmid, J. Lees, C. A. Featherston, R. Pullin
2–2 composites based on [011]-poled relaxor-ferroelectric single crystals: analysis of the piezoelectric anisotropy and squared figures of merit for energy harvesting applications
- Technical Paper
C. R. Bowen, D. N. Betts, H. A. Kim, V. Yu. Topolov
Optimization of ceramics bonding in the area of pressure sensor manufacturing
- Technical Paper
Radovan Novotný, Radek Vlach, Jaroslav Kadlec, Radek Kuchta
A biomimetic approach to machine olfaction, featuring a very large-scale chemical sensor array and embedded neuro-bio-inspired computation
- Technical Paper
S. Marco, A. Gutiérrez-Gálvez, A. Lansner, D. Martinez, J. P. Rospars, R. Beccherelli, A. Perera, T. C. Pearce, P. F. M. J. Verschure, K. Persaud
Compact optical position feedback scheme for MOEMS mirrors
- Technical Paper
Andreas Tortschanoff, M. Baumgart, D. Holzmann, M. Lenzhofer, T. Sandner, A. Kenda
Temperature dependant dielectric breakdown of sputter-deposited AlN thin films using a time-zero approach
- Technical Paper
Michael Schneider, Achim Bittner, Ulrich Schmid
Production of vertical nanowire resonators by cryogenic-ICP–DRIE
- Technical Paper
S. Merzsch, F. Steib, H. S. Wasisto, A. Stranz, P. Hinze, T. Weimann, E. Peiner, A. Waag
High-resolution low-cost optoelectronic instrument for supervising grape must fermentation
- Technical Paper
F. Jiménez-Márquez, J. Vázquez, J. Úbeda, J. L. Sánchez-Rojas
Principles of nonlinear MEMS-resonators regarding magnetic-field detection and the interaction with a capacitive read-out system
- Technical Paper
Michael Stifter, Franz Keplinger, Harald Steiner, Wilfried Hortschitz, Thilo Sauter
Magnetic tunnel junction sensors with pTesla sensitivity
- Technical Paper
S. Cardoso, D. C. Leitao, L. Gameiro, F. Cardoso, R. Ferreira, E. Paz, P. P. Freitas
Influence of interfacial adhesion on the mechanical response of magneto-rheological elastomers at high strain
- Technical Paper
T. Pössinger, C. Bolzmacher, L. Bodelot, N. Triantafyllidis
Integration of polystyrene microlenses with both convex and concave profiles in a polymer-based microfluidic system
- Technical Paper
Yiqiang Fan, Huawei Li, Ian G. Foulds
Flexible hot-film anemometer arrays on curved structures for active flow control on airplane wings
- Technical Paper
M. Schwerter, T. Beutel, M. Leester-Schädel, S. Büttgenbach, A. Dietzel
Model-based design and test of vibration energy harvester for aircraft application
- Technical Paper
Zdenek Hadas, Vojtech Vetiska, Rostislav Huzlik, Vladislav Singule
Principal tests and verification of a resonance-based solar harvester utilizing micro/nano technology
- Technical Paper
P. Fiala, P. Drexler, D. Nespor
Temperature characterization of flip-chip packaged piezoresistive barometric pressure sensors
- Technical Paper
T. Waber, W. Pahl, M. Schmidt, G. Feiertag, S. Stufler, R. Dudek, A. Leidl
Design of an electro-thermally actuated cell microgripper
- Technical Paper
Sonia Iamoni, Aurelio Somà
Rotational micro actuator for microsurgery
- Technical Paper
M. Leester-Schädel, J.-W. Thies, T. Schubert, S. Büttgenbach, A. Dietzel
Wafer-level reliability characterization for wafer-level-packaged microbolometer with ultrasmall array size
- Technical Paper
Chung Mo Yang, Ho Jung, Jae Hong Park, Hee Yeoun Kim
Design and characteristics of a-Si-based micro-bolometers with shared-anchor structure in vacuum packaged systems
- Technical Paper
Ho Jung, Tae Hyun Kim, Gyungtae Kim, Chung Mo Yang, Jae Hong Park, Hee Yeoun Kim
Design of silicon micro-resonators with low mechanical and optical losses for quantum optics experiments
- Technical Paper
A. Borrielli, M. Bonaldi, E. Serra, A. Bagolini, P. Bellutti, F. S. Cataliotti, F. Marin, F. Marino, A. Pontin, G. A. Prodi, G. Pandraud, P. M. Sarro, G. Lorito, T. Zoumpoulidis
Evaluation of bioinspired functional surfaces for nanoparticle filtering
- Technical Paper
Sebastian Busch, Manuel Ketterer, Xenia Vinzenz, Christian Hoffmann, Katrin Schmitt, Jürgen Wöllenstein
Silicon cantilevers with piezo-resistive measuring bridge for tactile line measurement
- Technical Paper
Thomas Frank, L. Doering, G. Heinrich, N. Thronicke, C. Löbner, St. Völlmeke, A. Steinke, S. Reich
Unimorph and bimorph piezoelectric energy harvester stimulated by β-emitting radioisotopes: a modeling study
- Technical Paper
Ali B. Alamin Dow, Ulrich Schmid, Nazir P. Kherani
Application of quartz tuning forks and extensional microresonators for viscosity and density measurements in oil/fuel mixtures
- Technical Paper
J. Toledo, T. Manzaneque, J. Hernando-García, J. Vázquez, A. Ababneh, H. Seidel, M. Lapuerta, J. L. Sánchez-Rojas
Single mask fabrication process for movable MEMS devices
- Technical Paper
Ali B. Alamin Dow, Adel Gougam, Nazir P. Kherani, I. W. Rangelow
Estimation of squeeze film damping in artificial hair-sensor towards the detection-limit of crickets’ hairs
- Technical Paper
A. M. K. Dagamseh
Component design and testing for a miniaturised autonomous sensor based on a nanowire materials platform
- Technical Paper
Giorgos Fagas, Michael Nolan, Yordan M. Georgiev, Ran Yu, Olan Lotty, Nikolay Petkov, Justin D. Holmes, Guobin Jia, Björn Eisenhawer, Annett Gawlik, Fritz Falk, Naser Khosropour, Elizabeth Buitrago, Montserrat Fernández-Bolaños Badia, Francois Krummenacher, Adrian M. Ionescu, Maher Kayal, Adrian M. Nightingale, John C. de Mello, Erik Puik, Franc van der Bent, Rik Lafeber, Rajesh Ramaneti, Hien Duy Tong, Cees van Rijn
Development of a novel piezoresistive thin film sensor system based on hydrogenated carbon
- Technical Paper
Saskia Biehl, Christian Rumposch, Günter Bräuer, Hans-Werner Hoffmeister, Martin Luig
Multi field modeling of a microelectromechanical speaker system with electrostatic driving principle
- Technical Paper
David Tumpold, Manfred Kaltenbacher, Christoph Glacer, Mohsin Nawaz, Alfons Dehé
Towards a complementary balanced energy harvesting solution for low power embedded systems
- Open Access
- Technical Paper
Yannick Verbelen, An Braeken, Abdellah Touhafi
A microbial fuel cell powering an all-digital piezoresistive wireless sensor system
- Technical Paper
T. Tommasi, A. Chiolerio, M. Crepaldi, D. Demarchi
Design, fabrication and testing of a piezoelectric energy microgenerator
- Technical Paper
Ali B. Alamin Dow, Achim Bittner, Ulrich Schmid, Nazir P. Kherani
